Optical measurement apparatus and method therefor
First Claim
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1. An optical measurement apparatus comprising:
- an optical system comprising;
a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured;
a detector arranged to receive, when in use, a reflected beam from the location to be measured; and
a receiving axis;
wherein the apparatus further comprises;
a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, assessment of the characteristic of the output corresponding to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system; and
a store for storing reference profile data corresponding to at least part of a profile and/or reference characteristic data relating thereto, the reference profile data and/or the reference characteristic data corresponding to a state of alignment with the optical system;
wherein the processing resource is arranged to make the assessment of the degree of alignment based upon comparison of at least part of the signal profile and/or characteristic data relating thereto in respect of the output measured and the stored reference profile data and/or the stored reference characteristic data.
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Abstract
An optical measurement apparatus comprises an optical system (100) having a receiving axis (115). The optical system (100) comprises a source (102) that generates a probe beam that is directed to a location to be measured (114). A detector (112) of the optical system receives a reflected beam from the location to be measured (114). The apparatus also comprises a processing resource that receives an output signal from the detector (112) and makes an assessment of a characteristic of the output signal in order to determine a degree of alignment of the location to be measured (114) with the receiving axis (115) of the optical system (100).
41 Citations
18 Claims
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1. An optical measurement apparatus comprising:
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an optical system comprising; a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured; a detector arranged to receive, when in use, a reflected beam from the location to be measured; and a receiving axis; wherein the apparatus further comprises; a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, assessment of the characteristic of the output corresponding to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system; and a store for storing reference profile data corresponding to at least part of a profile and/or reference characteristic data relating thereto, the reference profile data and/or the reference characteristic data corresponding to a state of alignment with the optical system; wherein the processing resource is arranged to make the assessment of the degree of alignment based upon comparison of at least part of the signal profile and/or characteristic data relating thereto in respect of the output measured and the stored reference profile data and/or the stored reference characteristic data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of optical measurement, comprising:
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generating a probe beam; directing the probe beam to a location to be measured; receiving via an optical system having a receiving axis a reflected beam from the location to be measured; assessing with a processing resource a characteristic of an output signal corresponding to the reflected beam in order to determine the degree of alignment of the location to be measured with the receiving axis of the optical system; storing reference profile data corresponding to at least part of a profile and/or reference characteristic data relating thereto, the reference profile data and/or the reference characteristic data corresponding to a state of alignment with the optical system; and the processing resource making the assessment of the degree of alignment based upon comparison of at least part of the signal profile and/or characteristic data relating thereto in respect of the output measured and the stored reference profile data and/or the stored reference characteristic data.
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16. An optical measurement apparatus comprising:
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an optical system comprising; a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured; a detector arranged to receive, when in use, a reflected beam from the location to be measured; and a receiving axis; wherein the apparatus further comprises; a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, the output of the detector having a signal profile corresponding to a reflection of the probe beam in respect of the location to be measured;
whereinthe signal profile is generated by acquiring a number of sequential profiles over a period of time using the probe beam and processing a number of output signals corresponding to the sequential profiles; and assessment of the characteristic of the output corresponds to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system. - View Dependent Claims (17, 18)
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Specification