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Optical measurement apparatus and method therefor

  • US 8,696,128 B2
  • Filed: 07/29/2008
  • Issued: 04/15/2014
  • Est. Priority Date: 07/30/2007
  • Status: Active Grant
First Claim
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1. An optical measurement apparatus comprising:

  • an optical system comprising;

    a source arranged to generate, when in use, a probe beam, the optical system being arranged to direct, when in use, the probe beam to a location to be measured;

    a detector arranged to receive, when in use, a reflected beam from the location to be measured; and

    a receiving axis;

    wherein the apparatus further comprises;

    a processing resource operably coupled to the detector and capable of assessing when in use, a characteristic of an output generated by the detector, assessment of the characteristic of the output corresponding to an assessment of degree of alignment of the location to be measured with the receiving axis of the optical system; and

    a store for storing reference profile data corresponding to at least part of a profile and/or reference characteristic data relating thereto, the reference profile data and/or the reference characteristic data corresponding to a state of alignment with the optical system;

    wherein the processing resource is arranged to make the assessment of the degree of alignment based upon comparison of at least part of the signal profile and/or characteristic data relating thereto in respect of the output measured and the stored reference profile data and/or the stored reference characteristic data.

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