Pivot-balanced floating platen lapping machine

• US 8,696,405 B2
• Filed: 10/06/2011
• Issued: 04/15/2014
• Est. Priority Date: 03/12/2010
• Status: Expired due to Fees

• Current Assignee: Wayne O. Duescher
• Original Assignee: Wayne O. Duescher
• Inventors: Duescher, Wayne O.
• Primary Examiner(s): ROSE, ROBERT A
• Application Number:
  US13/267,305
• Publication Number:
  US 20120028545A1
• Time in Patent Office: 922 Days
• Field of Search: 451/5, 451/11, 451/28, 451/36, 451/37, 451/41, 451/59, 451/64, 451/259, 451/260, 451/270, 451/271, 451/280, 451/283, 451/285, 451/288, 451/287
• US Class Current: 451/11
• CPC Class Codes: B24B 37/005 Control means for lapping machines or devices
• CPC Class Codes: B24B 37/04 designed for working plane surfaces
• CPC Class Codes: B24B 37/107 in a rotary movement only, about an axis being stationary during lapping
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: B24B 37/345 Feeding, loading or unloading work specially adapted to lapping
• CPC Class Codes: B24B 41/047 Grinding heads for working on plane surfaces
• CPC Class Codes: B24B 49/12 involving optical means
• CPC Class Codes: B24B 49/16 taking regard of the load
• CPC Class Codes: B24B 7/22 for grinding inorganic material, e.g. stone, ceramics, porcelain
• CPC Class Codes: B24B 7/228 for grinding thin, brittle parts, e.g. semiconductors, wafers grinding edges of thin, brittle parts B24B9/065

Abstract

A low friction flat-lapping abrading apparatus and method for releasably attaching flexible abrasive disks to a flat-surfaced platen that floats in three-point abrading contact with flat-surfaced workpieces that are attached to three rotary spindles. The rigid equal-height flat-surfaced rotatable fixed-position workpiece spindles are mounted on a flat abrading machine base. They are positioned to form a triangle to provide stable support of the floating platen. All three spindle-tops are co-planar aligned to provide a precision-flat reference plane for mounting of the workpieces. The lapping operation has very high abrading speeds and very low abrading forces. The lightweight but strong lapping machine employs a pivot-balance structure where the weight of the drive motor is used to balance the weight of the abrading platen. Use of low-friction air bearings provides the capability for precision control of the abrading forces. The lapping machine is robust and well suited for a harsh abrading environment.

Claims

1. An at least three-point, fixed-spindle floating-platen abrading machine comprising:

a) at least three rotary spindles having rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at the center of a respective rotatable flat-surfaced spindle-top for each respective rotary spindles;

b) wherein the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

c) an abrading machine base having a horizontal, nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

d) wherein the at least three rotary spindles are located with near-equal spacing between the respective at least three of the rotary spindles where the respective at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the respective at least three rotary spindles are mechanically attached to the machine base;

e) wherein the at least three spindle-tops'"'"' flat surfaces are adjustably alignable to be co-planar with each other;

f) a rotatable floating abrading platen having a flat annular abrading surface where the floating abrading platen is supported by and is rotationally driven about a floating abrading platen cylindrical-rotation axis located at a cylindrical-rotation center of the floating abrading platen and perpendicular to the rotatable floating abrading platen flat annular abrading surface by a spherical-action rotation device located coincident with the cylindrical-rotation axis of the floating abrading platen where the floating abrading platen spherical-action rotation device restrains the floating abrading platen in a radial direction relative to the floating abrading platen cylindrical-rotation axis where the floating abrading platen cylindrical-rotation axis is nominally concentric with and perpendicular to the machine base spindle-circle where the floating abrading platen spherical-action rotation device has a spherical center of rotation that is coincident with the floating abrading platen cylindrical-rotation axis where the floating abrading platen has a center of mass that is coincident with the floating abrading platen cylindrical-rotation axis;

g) wherein the floating abrading platen spherical-action rotation device allows spherical motion of the floating abrading platen about the floating abrading platen spherical-action rotation device spherical center of rotation where the flat annular abrading surface of the floating abrading platen that is supported by the floating abrading platen spherical-action rotation device is nominally horizontal; and

h) a pivot frame that has a pivot frame pivot center, a pivot frame floating abrading platen end and a pivot frame floating abrading platen drive motor end where the pivot frame rotates about a pivot frame rotation axis that intersects the pivot frame pivot center where the pivot frame rotation axis is perpendicular to the length of the pivot frame that extends from the pivot frame floating abrading platen end to the pivot frame floating abrading platen drive motor end where the pivot frame comprises a low friction pivot frame rotation bearing that is concentric with the pivot frame rotation axis;

i) a platen drive motor is attached to the pivot frame on the pivot frame floating abrading platen drive motor end and a counterbalance weight is attached to the pivot frame on the pivot frame floating abrading platen drive motor end, and a right-angle gearbox having a hollow output platen drive shaft is attached to the pivot frame on the pivot frame floating abrading platen end and the floating abrading platen is attached to the pivot frame on the pivot frame floating abrading platen end and the floating abrading platen spherical-action rotation device is attached to the pivot frame on the pivot frame floating abrading platen end;

j) the floating abrading platen drive motor is connected to and rotates a platen drive motor drive shaft attached to and rotates a right-angle gearbox input drive shaft and the right-angle gearbox hollow output platen drive shaft is attached to a universal joint attached to a floating abrading platen rotary drive shaft that rotates the floating abrading platen;

k) wherein the floating abrading platen drive motor and the counterbalance weight are positioned on the pivot frame floating abrading platen drive motor end to act as a counterbalance to the right-angle gearbox, the rotatable floating abrading platen and the floating abrading platen spherical-action rotation device that are positioned on the pivot frame floating abrading platen end wherein the pivot frame is nominally balanced about the pivot frame pivot rotation axis;

l) flexible abrasive disk articles having annular bands of abrasive coated surfaces where a selected flexible abrasive disk is attached in flat conformal contact with the floating abrading platen flat annular abrading surface such that the attached abrasive disk is concentric with the floating abrading platen flat annular abrading surface;

m) wherein equal-thickness workpieces having parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces are attached to the respective at least three spindle-tops where the flat workpiece bottom surfaces are in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops;

n) an elevation frame that supports the pivot frame at the pivot frame pivot center where the elevation frame is attached to a linear slide device that is attached to the abrading machine base wherein the elevation frame can be raised and lowered by an elevation frame lift device;

o) wherein the floating abrading platen can be moved vertically by activating the lift frame lift device to allow the abrasive surface of the flexible abrasive disk that is attached to the floating abrading platen flat annular abrading surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the floating abrading platen and wherein the floating abrading platen spherical-action rotation device allows spherical motion of the floating abrading platen about the floating abrading platen spherical-action rotation device spherical center of rotation to provide uniform abrading contact of the abrasive surface of the flexible abrasive disk with the respective workpieces;

p) a pivot frame locking device that is attached to both the pivot frame and the pivot frame lift frame where the pivot frame locking device can be activated to lock the pivot frame that is rotated about the pivot frame rotation axis at selected pivot frame rotated position;

q) an abrading contact force device that is attached to both the pivot frame and the pivot frame lift frame where the abrading contact force device can apply an abrading contact force to the pivot frame wherein the pivot frame tends to be rotated about the pivot frame pivot rotation axis where the abrading contact force device applies an abrading contact force to the pivot frame and the pivot frame applies the abrading contact force to the floating abrading platen spherical-action rotation device that is attached to the pivot frame wherein the applied abrading contact force is applied to the floating abrading platen by the floating abrading platen spherical-action rotation device and the applied abrading contact force is applied to the workpieces by the floating abrading platen;

r) wherein the total floating abrading platen abrading contact force applied to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the floating abrading platen flat annular abrading surface with the top surfaces of the workpieces is controlled through the floating abrading platen spherical-action floating abrading platen rotation device to allow the total floating abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops; and

s) wherein the at least three spindle-tops having attached equal-thickness workpieces can be rotated about the respective spindle-tops'"'"' rotation axes and the floating abrading platen having the attached flexible abrasive disk can be rotated about the floating abrading platen cylindrical-rotation axis to single-side abrade the workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving floating abrading platen flat annular abrading surface is in force-controlled abrading contact with the top surfaces of the workpieces that are attached to the respective at least three spindle-tops.

2. The machine of claim 1 wherein each flexible abrasive disk is attached in flat conformal contact with the floating abrading platen flat annular abrading surface by disk attachment techniques selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques.

3. The machine of claim 1 wherein the machine base structural material is selected from the group consisting of granite, epoxy-granite, cast iron and steel and wherein the machine base structural material and the machine base structural material is either solid or is temperature controlled by a temperature-controlled fluid that circulates in fluid passageways internal to the machine base structural materials.

4. The machine of claim 1 wherein the at least three rotary spindles are air bearing rotary spindles.

5. The machine of claim 1 wherein the floating abrading platen spherical-action rotation device is an air bearing spherical-action rotation device having a spherical-action rotation device air bearing rotor that supports the floating abrading platen and the abrading platen spherical-action rotation device has a spherical-action rotation device air bearing housing that is attached to the pivot frame where pressurized air is supplied to the air bearing spherical-action rotation device air bearing housing to create a friction-free air film that is positioned between the spherical-action rotation device air bearing rotor and the spherical-action rotation device air bearing housing to allow friction-free spherical rotation of the spherical-action rotation device air bearing rotor.

6. The machine of claim 1 wherein the floating abrading platen spherical-action rotation device is a roller bearing having spherical-action rotation capabilities where the roller bearing spherical-action rotation device has a spherical-action rotation device roller bearing rotor that supports the floating abrading platen and the abrading platen spherical-action rotation device has a spherical-action rotation device roller bearing housing that is attached to the pivot frame to allow spherical rotation of the spherical-action rotation device air bearing rotor.

7. The machine of claim 1 wherein the pivot frame abrading contact force devices are selected from the group consisting of air cylinders, air bearing air cylinders, hydraulic cylinders, electric solenoid devices and piezo-electric devices wherein a force sensor can be attached to the pivot frame abrading contact force device to measure the magnitude of the abrading contact force that is applied by the pivot frame abrading contact force device to the pivot frame.

8. The machine of claim 1 wherein the pivot frame locking device is selected from the group consisting of hydraulic cylinders, electric solenoid devices and friction brake devices and where the pivot frame locking device can also have the capability to provide vibration damping of the pivot frame.

9. The pivot frame locking device of claim 8 wherein the pivot frame locking device is a hydraulic cylinder comprising:

a) a cylinder body, a cylinder body external surface, a cylinder body internal portion, two cylinder internal hydraulic chambers, a hydraulic by-pass tube, nominally-incompressible non-air-entrained hydraulic fluid that completely fills the cylinder internal hydraulic chambers and fills the hydraulic by-pass tube;

b) a movable linear translating cylinder rod, the cylinder rod having a cylinder rod attachment end and a cylinder rod piston end, a cylinder hydraulic rod seal, a cylinder body rod end and a cylinder body mounting base end where a movable cylinder piston that is positioned internally in the cylinder body internal portion has hydraulic fluid contact with the hydraulic fluid contained in the two cylinder hydraulic chambers and the movable cylinder piston is attached to the cylinder rod piston end;

c) where a cylinder rod end internal hydraulic chamber extends from the cylinder piston to the cylinder rod end of the cylinder and where a cylinder mounting base internal hydraulic chamber extends from the cylinder piston to the cylinder mounting base end of the cylinder where the cylinder piston acts as a hydraulic seal between the cylinder rod end internal hydraulic chamber and the cylinder mounting base internal hydraulic chamber;

d) wherein the cylinder rod has an integral rod section that is located internal to the cylinder body and has an integral rod section that extends external to the cylinder body external surface where the cylinder rod extends continuously from the cylinder piston past a cylinder hydraulic rod seal located at the cylinder body cylinder rod end to the cylinder rod attachment end wherein the cylinder rod attachment end can be attached to the pivot frame;

e) wherein a by-pass tube having an integral by-pass hydraulic shut-off valve and an integral adjustable hydraulic metering valve allows hydraulic fluid to pass between the cylinder rod end internal hydraulic chamber and the cylinder mounting base end internal hydraulic chamber as the moving cylinder rod and the cylinder piston that is attached to the cylinder rod is translated relative to the external surface of the cylinder;

f) wherein the integral by-pass hydraulic shut-off valve can be operated manually or operated by electrical devices such as an electric solenoid and the integral adjustable hydraulic metering valve can be adjusted manually or operated by electrical devices such as an electric screw device;

g) wherein by closing the by-pass hydraulic shut-off valve, the nominally-incompressible hydraulic fluid can not pass between the cylinder rod end internal hydraulic chamber and the cylinder mounting base internal hydraulic chamber with the result that the cylinder piston and the cylinder rod are locked in place relative to the cylinder body and the pivot frame that is attached to the cylinder rod attachment end can not be rotated and is locked in place by the hydraulic cylinder pivot frame locking device.

10. The pivot frame hydraulic cylinder locking device of claim 9 wherein the pivot frame hydraulic cylinder locking device can be used to limit the rotational speed of the pivot frame and to attenuate vibrations of the pivot frame comprising:

a) where the hydraulic by-pass tube integral adjustable hydraulic metering valve has an adjustable hydraulic flow orifice that acts as a hydraulic fluid flow restriction device that can restrict the flow of hydraulic fluid in the hydraulic by-pass tube as the hydraulic fluid passes between the cylinder rod end internal hydraulic chamber and the cylinder mounting base end internal hydraulic chamber as the moving cylinder rod is translated relative to the external surface of the cylinder body;

b) whereby, when the hydraulic metering valve hydraulic flow orifice is adjusted to be fully open, the hydraulic metering valve hydraulic flow orifice allows the moving hydraulic fluid in the hydraulic by-pass tube to pass freely between the cylinder rod end internal hydraulic chamber and the cylinder mounting base end internal hydraulic chamber of the cylinder as the moving cylinder rod is translated relative to the external surface of the cylinder body;

c) whereby, when the hydraulic metering valve hydraulic flow orifice is adjusted to be partially closed to act as a hydraulic fluid flow restriction device, the fluid orifice provides a hydraulic flow restriction to the moving hydraulic fluid in the hydraulic by-pass tube as hydraulic fluid passes between the cylinder rod end internal hydraulic chamber and the cylinder mounting base end internal hydraulic chamber as the moving cylinder rod is translated relative to the external surface of the cylinder body;

d) whereby, when the hydraulic metering valve hydraulic flow orifice is adjusted to be partially closed, a hydraulic damping force is generated by restricting the flow of the hydraulic fluid as it passes between the cylinder rod end internal hydraulic chamber and the cylinder mounting base end internal hydraulic chamber as the moving cylinder rod and the cylinder piston that is attached to the cylinder rod is translated relative to the external surface of the cylinder wherein the respective hydraulic damping force is applied to the cylinder piston in a direction that opposes the movement of the cylinder rod that is moved by the rotation motion of the pivot frame wherein the rotation motion of the pivot frame is slowed by the respective hydraulic damping force and wherein rotation oscillations of the pivot frame are resisted by hydraulic damping forces that are applied to the cylinder piston in directions that oppose the oscillating movement of the cylinder rod that is moved by the oscillating rotation motion of the pivot frame wherein the rotation motion of the pivot frame is slowed by the respective hydraulic damping forces.

11. The machine of claim 1 wherein the elevation frame is raised and lowered by a elevation frame lift device where the elevation frame lift device is selected from the group consisting of electric motor driven screw jack lift devices and a hydraulic lift device where the elevation frame lift device can have a elevation frame lift device vertical position sensor that can be used to sense the vertical position of the elevation frame whereby the elevation frame lift device vertical position sensor can be used to control the position of the elevation frame and whereby where the elevation frame lift device vertical position sensor can be used to indirectly control the position of the floating abrading platen abrasive coating relative to the workpieces that are attached to the rotary workpiece spindles.

12. The machine of claim 1 wherein one or more universal joints can be attached to a floating abrading platen idler drive shaft that is used to couple the right-angle gearbox hollow output platen drive shaft to the floating abrading platen rotary drive shaft that rotates the floating abrading platen where the universal joints can be selected from the group consisting of conventional universal joints, plate-type universal joints and constant velocity universal joints.

13. The machine of claim 1 where a rotary union device is attached to the right-angle gearbox hollow output platen drive shaft to provide vacuum to the right-angle gearbox hollow output platen drive shaft wherein a flexible vacuum tube can be attached to the right-angle gearbox hollow output platen drive shaft and also attached to the floating abrading platen rotary drive shaft to provide a vacuum passageway from the right-angle gearbox hollow output platen drive shaft to the floating abrading platen rotary drive shaft where vacuum passages within the floating abrading platen are routed to the floating abrading platen flat annular abrading surface such that a flexible abrasive disk can be attached to the floating abrading platen by the vacuum supplied by the rotary union device.

14. The machine of claim 1 where a spherical action locking device can be used to lock the floating abrading platen spherical-action rotation device to prevent spherical rotation of the floating abrading platen spherical-action rotation device which prevents spherical rotation of the floating abrading platen whereby the floating abrading platen is locked in a selected spherical-rotation position.

15. The machine of claim 14 where a floating abrading platen spherical action locking device is an integral part of a floating abrading platen air bearing spherical-action rotation device having a spherical-action rotation device air bearing rotor that supports the floating abrading platen and the abrading platen spherical-action rotation device has a spherical-action rotation device air bearing housing that is attached to the pivot frame where pressurized air is supplied to the air bearing spherical-action rotation device air bearing housing to create a friction-free air film that is positioned between the spherical-action rotation device air bearing rotor and the spherical-action rotation device air bearing housing to allow friction-free spherical rotation of the spherical-action rotation device air bearing rotor and friction-free spherical rotation of the floating abrading platen and wherein vacuum that is supplied to the air bearing spherical-action rotation device spherical-action rotation device air bearing housing can lock the spherical-action rotation device air bearing rotor to the spherical-action rotation device air bearing housing whereby the floating abrading platen is locked in a selected spherical-rotation position.

16. The machine of claim 14 where a floating abrading platen spherical action locking device is a mechanical brake device comprising:

a) a mechanical brake rotor having a spherical brake rotor surface that has a spherical center of rotation that coincides with the floating abrading platen spherical-action rotation device spherical center of rotation;

b) where the floating abrading platen spherical action locking device mechanical brake device has a mechanical brake pad having a spherical brake pad surface that has a spherical center of rotation that coincides with the floating abrading platen spherical-action rotation device spherical center of rotation;

c) wherein the spherical radius of the mechanical brake device mechanical brake pad is nominally equal to the spherical radius of the mechanical brake device mechanical brake rotor; and

d) where the floating abrading platen spherical-action rotation device mechanical brake pad can be moved along an axis that intersects the floating abrading platen spherical-action rotation device spherical center of rotation by a floating abrading platen anti-rotation braking force device into forced contact with the floating abrading platen spherical-action rotation device mechanical brake rotor to lock the floating abrading platen spherical-action rotation device mechanical brake pad to the floating abrading platen spherical-action rotation device mechanical brake rotor to prevent spherical rotation of the floating abrading platen spherical-action rotation device which prevents spherical rotation of the floating abrading platen spherical-action rotation device mechanical brake rotor;

e) whereby the floating abrading platen spherical-action rotation device is locked in a selected spherical-rotation position whereby the floating abrading platen is locked in a selected spherical-rotation position.

17. The floating abrading platen mechanical brake device of claim 16 where the floating abrading platen spherical action locking device mechanical brake pad can be moved from a position that is separated from the floating abrading platen spherical action locking device mechanical brake rotor into braking contact with the floating abrading platen spherical action locking device mechanical brake rotor by a floating abrading platen anti-rotation braking force device selected from the group consisting of air cylinders, spring-return air cylinders, hydraulic cylinders, electric solenoid devices and piezo-electric devices wherein the anti-rotation braking force device can be activated to move the floating abrading platen spherical action locking device mechanical brake pad manually or by electrical devices into braking contact with the floating abrading platen spherical action locking device mechanical brake rotor.

18. The machine of claim 1 where the center of mass of the floating abrading platen is less that 2 inches from the spherical center of rotation of the floating abrading platen spherical-action rotation device.

19. The machine of claim 1 where the center of mass of the floating abrading platen is less that 0.5 inches from the spherical center of rotation of the floating abrading platen spherical-action rotation device.

20. A process of providing abrasive flat lapping using an at least three-point, fixed-spindle floating-platen abrading machine comprising:

a) providing least three rotary spindles having rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at the center of a respective rotatable flat-surfaced spindle-top for respective rotary spindles;

b) providing that the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

c) providing an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

d) positioning the at least three rotary spindles to be located with near-equal spacing between the respective at least three of the rotary spindles where the respective at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the respective at least three rotary spindles are mechanically attached to the machine base;

e) aligning the at least three spindle-tops'"'"' flat surfaces to be co-planar with each other;

f) providing a rotatable floating abrading platen having a flat annular abrading surface where the floating abrading platen is supported by and is rotationally driven about a floating abrading platen cylindrical-rotation axis located at a cylindrical-rotation center of the floating abrading platen and perpendicular to the rotatable floating abrading platen flat annular abrading surface by a spherical-action rotation device located coincident with the cylindrical-rotation axis of the floating abrading platen where the floating abrading platen spherical-action rotation device restrains the floating abrading platen in a radial direction relative to the floating abrading platen cylindrical-rotation axis where the floating abrading platen cylindrical-rotation axis is nominally concentric with and perpendicular to the machine base spindle-circle where the floating abrading platen spherical-action rotation device has a spherical center of rotation that is coincident with the floating abrading platen cylindrical-rotation axis where the floating abrading platen has a center of mass that is coincident with the floating abrading platen cylindrical-rotation axis;

g) providing that the floating abrading platen spherical-action rotation device allows spherical motion of the floating abrading platen about the floating abrading platen spherical-action rotation device spherical center of rotation where the flat annular abrading surface of the floating abrading platen that is supported by the floating abrading platen spherical-action rotation device is nominally horizontal; and

h) providing a pivot frame that has a pivot frame pivot center, a pivot frame floating abrading platen end and a pivot frame floating abrading platen drive motor end where the pivot frame can rotate about a pivot frame rotation axis that intersects the pivot frame pivot center where the pivot frame rotation axis is perpendicular to the length of the pivot frame that extends from the pivot frame floating abrading platen end to the pivot frame floating abrading platen drive motor end where the pivot frame has one or more low friction pivot frame rotation bearings that are concentric with the pivot frame rotation axis;

i) providing a platen drive motor that is attached to the pivot frame on the pivot frame floating abrading platen drive motor end and providing a counterbalance weight that is attached to the pivot frame on the pivot frame floating abrading platen drive motor end and providing a right-angle gearbox having a hollow output platen drive shaft where the right-angle gearbox is attached to the pivot frame on the pivot frame floating abrading platen end and where the floating abrading platen is attached to the pivot frame on the pivot frame floating abrading platen end and where the floating abrading platen spherical-action rotation device is attached to the pivot frame on the pivot frame floating abrading platen end;

j) providing that the floating abrading platen drive motor is connected to and rotates a platen drive motor drive shaft that is attached to and rotates a right-angle gearbox input drive shaft where the right-angle gearbox hollow output platen drive shaft is attached to a provided universal joint that is attached to a floating abrading platen rotary drive shaft that rotates the floating abrading platen;

k) positioning the floating abrading platen drive motor and the counterbalance weight on the pivot frame floating abrading platen drive motor end to act as a counterbalance to the right-angle gearbox, the rotatable floating abrading platen and the floating abrading platen spherical-action rotation device that are positioned on the pivot frame floating abrading platen end wherein the pivot frame is nominally balanced about the pivot frame pivot rotation axis;

l) providing flexible abrasive disk articles having annular bands of abrasive coated surfaces where a selected flexible abrasive disk is attached in flat conformal contact with the floating abrading platen flat annular abrading surface such that the attached abrasive disk is concentric with the floating abrading platen flat annular abrading surface;

m) providing equal-thickness workpieces having parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces that are attached to the respective at least three spindle-tops where the flat workpiece bottom surfaces are in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops;

n) providing an elevation frame that supports the pivot frame at the pivot frame pivot center where the elevation frame is attached to a linear slide device that is attached to the abrading machine base wherein the elevation frame can be raised and lowered by an elevation frame lift device;

o) moving the floating abrading platen vertically by activating the lift frame lift device to position the abrasive surface of the flexible abrasive disk that is attached to the floating abrading platen flat annular abrading surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the floating abrading platen and wherein the floating abrading platen spherical-action rotation device allows spherical motion of the floating abrading platen about the floating abrading platen spherical-action rotation device spherical center of rotation to provide uniform abrading contact of the abrasive surface of the flexible abrasive disk with all of the workpieces;

p) providing a pivot frame locking device that is attached to both the pivot frame and the pivot frame lift frame where the pivot frame locking device can be activated to lock the pivot frame that is rotated about the pivot frame rotation axis at that pivot frame rotated position;

q) providing an abrading contact force device that is attached to both the pivot frame and the pivot frame lift frame where the abrading contact force device can apply an abrading contact force to the pivot frame wherein the pivot frame tends to be rotated about the pivot frame pivot rotation axis where the abrading contact force device applies an abrading contact force to the pivot frame and the pivot frame applies the abrading contact force to the floating abrading platen spherical-action rotation device that is attached to the pivot frame wherein the applied abrading contact force is applied to the floating abrading platen by the floating abrading platen spherical-action rotation device and the applied abrading contact force is applied to the workpieces by the floating abrading platen;

r) providing that the total floating abrading platen abrading contact force applied to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the floating abrading platen flat annular abrading surface with the top surfaces of the workpieces is controlled through the floating abrading platen spherical-action floating abrading platen rotation device to allow the total floating abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops; and

s) rotating the at least three spindle-tops having the attached equal-thickness workpieces about the respective spindle-tops'"'"' rotation axes and rotating the floating abrading platen having the attached flexible abrasive disk about the floating abrading platen cylindrical-rotation axis to single-side abrade the workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving floating abrading platen flat annular abrading surface is in force-controlled abrading contact with the top surfaces of the workpieces that are attached to the respective at least three spindle-tops.