Analysis apparatus
First Claim
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1. An apparatus for time domain spectroscopy comprising:
- a generator for generating a pulsed terahertz wave or an infrared ray;
a trapping unit including first and second trapping films and being capable of placing the first and second trapping films such that the first trapping film is irradiated with the terahertz wave or infrared ray generated by the generator and the second trapping film is irradiated with the terahertz wave or infrared ray transmitted through the first trapping film;
a detector for detecting the terahertz wave or infrared ray which has interacted with a first gas which has been trapped by the first trapping film and a second gas which has been trapped by the second trapping film, wherein the second gas is different from the first gas; and
a processing unit for obtaining a temporal waveform from a detection result of the detector and for obtaining information on types or properties of the first and second gases;
wherein the trapping unit comprises a structure for contact with a site evolving the gas,wherein the structure is provided to hold the trapping films separately from the site, andwherein the processing unit obtains information on the first gas based on a pulse from the first trapping film in the temporal waveform and obtains information on the second gas based on a pulse from the second trapping film in the temporal waveform.
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Abstract
An analysis apparatus for analyzing a gas by a terahertz wave or an infrared ray comprises a generator for generating the terahertz wave or the infrared ray; a trapping unit having a trapping film for trapping a gas and being placed to be capable of causing interaction between the gas trapped by the trapping film and the terahertz wave or infrared ray generated by the generator; and a detector for detecting the interaction of the gas with the terahertz wave or infrared ray; wherein the trapping unit comprises a structure for contact with a site evolving the gas; and the structure holds the trapping film separately from the site.
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7 Claims
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1. An apparatus for time domain spectroscopy comprising:
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a generator for generating a pulsed terahertz wave or an infrared ray; a trapping unit including first and second trapping films and being capable of placing the first and second trapping films such that the first trapping film is irradiated with the terahertz wave or infrared ray generated by the generator and the second trapping film is irradiated with the terahertz wave or infrared ray transmitted through the first trapping film; a detector for detecting the terahertz wave or infrared ray which has interacted with a first gas which has been trapped by the first trapping film and a second gas which has been trapped by the second trapping film, wherein the second gas is different from the first gas; and a processing unit for obtaining a temporal waveform from a detection result of the detector and for obtaining information on types or properties of the first and second gases; wherein the trapping unit comprises a structure for contact with a site evolving the gas, wherein the structure is provided to hold the trapping films separately from the site, and wherein the processing unit obtains information on the first gas based on a pulse from the first trapping film in the temporal waveform and obtains information on the second gas based on a pulse from the second trapping film in the temporal waveform. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification