Semiconductor device including a voltage controlled termination structure and method for fabricating same

• US 8,698,232 B2
• Filed: 01/04/2010
• Issued: 04/15/2014
• Est. Priority Date: 01/04/2010
• Status: Active Grant

• Current Assignee: Infineon Technologies Americas Corp. (Infineon Technologies AG)
• Original Assignee: International Rectifier Corporation (Infineon Technologies AG)
• Inventors: Arzumanyan, Aram, Henson, Timothy D., Ma, Ling
• Primary Examiner(s): AHMED, SELIM U
• Application Number:
  US12/655,668
• Publication Number:
  US 20110163373A1
• Time in Patent Office: 1,562 Days
• Field of Search: 257/302, 257/330, 257/E21.41, 257/E29.262, 257/E27.091, 257/E29.201, 257/E29.257, 257/E29.26, 257/E21.585, 438/259, 438/270
• US Class Current: 257/330
• CPC Class Codes: H01L 29/407 Recessed field plates, e.g. trench field plates, buried field plates
• CPC Class Codes: H01L 29/66734 with a step of recessing the gate electrode, e.g. to form a trench gate electrode
• CPC Class Codes: H01L 29/7811 with an edge termination structure guard regions per se H01L29/0619; field plates per se H01L29/402
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236

Abstract

According to one embodiment, a semiconductor device including a voltage controlled termination structure comprises an active area including a base region of a first conductivity type formed in a semiconductor body of a second conductivity type formed over a first major surface of a substrate of the second conductivity type, a termination region formed in the semiconductor body adjacent the active area and including the voltage controlled termination structure. The voltage controlled termination structure includes an electrode electrically connected to a terminal of the semiconductor device. In one embodiment, the electrode of the voltage controlled termination structure is electrically connected to a gate terminal of the semiconductor device. In one embodiment, the electrode of the voltage controlled termination structure is electrically connected to a source terminal of the semiconductor device.

Claims

1. A semiconductor device including a voltage controlled termination structure, said semiconductor device comprising:

an active area including a base region of a first conductivity type formed in a semiconductor body of a second conductivity type formed over a first major surface of a substrate of said second conductivity type;

a termination region formed adjacent said active area and including said voltage controlled termination structure and at least one termination trench having a conductive trench filler disposed therein, said voltage controlled termination structure extending through said base region into said semiconductor body of said second conductivity type;

said voltage controlled termination structure comprising an electrode electrically connected to one of a gate electrode and a source region of said semiconductor device;

said at least one termination trench being floating.

2. The semiconductor device of claim 1, further comprising a parasitic layer of said second conductivity type situated over said base region and adjacent said voltage controlled termination structure.

3. The semiconductor device of claim 1, further comprising a drain contact formed over a second major surface of said substrate, opposite said first major surface.

4. The semiconductor device of claim 1, wherein said semiconductor device comprises a trench metal-oxide-semiconductor field-effect transistor (MOSFET).

5. The semiconductor device of claim 1, wherein said semiconductor device is implemented as a low gate-to-source voltage (low Vgs) device.

6. The semiconductor device of claim 1, wherein said semiconductor body comprises an epitaxial silicon body.

7. The semiconductor device of claim 1, wherein said electrode of said voltage controlled termination structure is electrically connected to said gate electrode of said semiconductor device.

8. The semiconductor device of claim 1, wherein said electrode of said voltage controlled termination structure is electrically connected to said source region of said semiconductor device.

9. A trench metal-oxide-semiconductor field-effect transistor (MOSFET) including a voltage controlled termination structure, said trench MOSFET comprising:

an active area including an insulated gate trench and a highly doped source region, formed in a base region of a first conductivity type formed over a drift body of a second conductivity type;

a termination region adjacent said active area and including said voltage controlled termination structure and at least one termination trench having a conductive trench filler disposed therein;

said voltage controlled termination structure extending through said base region into said drift body and comprising an electrode electrically connected to one of a gate electrode and said highly doped source region of said trench MOSFET;

said at least one termination trench being floating.

10. The trench MOSFET of claim 9, wherein said trench MOSFET is implemented as a low gate-to-source voltage (low Vgs) device.

11. The trench MOSFET of claim 9, wherein said electrode of said voltage controlled termination structure is electrically connected to said gate electrode of said trench MOSFET.

12. The trench MOSFET of claim 9, wherein said electrode of said voltage controlled termination structure is electrically connected to said highly doped source region of said trench MOSFET.

13. A method for fabricating a semiconductor device including a voltage controlled termination structure, said method comprising:

forming an active area including a base region of a first conductivity type in a semiconductor body of a second conductivity type formed over a first major surface of a substrate of said second conductivity type;

establishing a termination region including said voltage controlled termination structure and at least one termination trench having a conductive trench filler disposed therein in said semiconductor body adjacent said active area, said voltage controlled termination structure extending through said base region into said semiconductor body of said second conductivity type;

electrically connecting an electrode of said voltage controlled termination structure to a terminal of said semiconductor device;

said at least one termination trench being floating.

14. The method of claim 13, wherein forming said active area including said base region results in formation of a parasitic layer of said second conductivity type situated over said base region and adjacent said voltage controlled termination structure.

15. The method of claim 13, further comprising forming a drain contact on a second major surface of said substrate opposite said first major surface.

16. The method of claim 13, wherein said semiconductor body comprises an epitaxial silicon body.

17. The method of claim 13, wherein said semiconductor device comprises a trench metal-oxide-semiconductor field-effect transistor (MOSFET).

18. The method of claim 13, wherein said semiconductor device is a low gate-to-source voltage (low Vgs) device.

19. The method of claim 13, wherein electrically connecting said electrode of said voltage controlled termination structure to said terminal of said semiconductor device comprises connecting said electrode to a gate terminal of said semiconductor device.

20. The method of claim 13, wherein electrically connecting said electrode of said voltage controlled termination structure to said terminal of said semiconductor device comprises connecting said electrode to a source terminal of said semiconductor device.