MEMS resonator
First Claim
Patent Images
1. An MEMS resonator comprising:
- a vibrator adapted to mechanically vibrate by being subjected to an electrostatic force;
a supporting portion adapted to support the vibrator so as to allow the vibrator to vibrate; and
at least a single electrode having a surface which faces the vibrator with a gap interposed therebetween;
one of the supporting portion and the electrode being an input electrode, and the other one of the supporting portion and the electrode being an output electrode,the vibrator being adapted to be excited by an electrostatic force induced by an AC signal applied to the input electrode through an input terminal connected to the input electrode, so that an electric current induced by the vibration of the vibrator is outputted from the output electrode through an output terminal connected to the output electrode,wherein there is formed a junction interface having at least one of a pn junction, a pp junction, an nn junction, a metal-n junction, and a metal-p junction, in an electric-current path between the input terminal and the input electrode or in an electric-current path between the output electrode and the output terminal, andthere is provided a DC bias circuit for continuously flowing a DC current through the junction interface.
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Abstract
In order to provide a MEMS resonator having a higher Q factor, by suppressing losses in high-frequency signals due to barriers of thin-film lamination portions, in cases where there exist junction interfaces (barriers), such as pn junctions, in AC-current input/output lines for a vibrator (1) and electrodes (2, 3), the MEMS resonator is structured such that a DC current is flowed therethrough along with an AC current at the same time, in order to reduce resistance losses applied to the AC current, wherein there are provided DC bias circuits (22, 23, 24) for continuously flowing DC currents through the junction interfaces, in an input-electrode side and/or output-electrode side.
7 Citations
20 Claims
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1. An MEMS resonator comprising:
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a vibrator adapted to mechanically vibrate by being subjected to an electrostatic force; a supporting portion adapted to support the vibrator so as to allow the vibrator to vibrate; and at least a single electrode having a surface which faces the vibrator with a gap interposed therebetween; one of the supporting portion and the electrode being an input electrode, and the other one of the supporting portion and the electrode being an output electrode, the vibrator being adapted to be excited by an electrostatic force induced by an AC signal applied to the input electrode through an input terminal connected to the input electrode, so that an electric current induced by the vibration of the vibrator is outputted from the output electrode through an output terminal connected to the output electrode, wherein there is formed a junction interface having at least one of a pn junction, a pp junction, an nn junction, a metal-n junction, and a metal-p junction, in an electric-current path between the input terminal and the input electrode or in an electric-current path between the output electrode and the output terminal, and there is provided a DC bias circuit for continuously flowing a DC current through the junction interface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An MEMS resonator comprising:
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a vibrator adapted to mechanically vibrate by being subjected to an electrostatic force; a supporting portion adapted to support the vibrator in such a way as to allow the vibrator to vibrate; and at least two electrodes having a surface which faces the vibrator with a gap interposed therebetween; one of the at least two electrodes being an input electrode, and the other one of the at least two electrodes being an output electrode, the vibrator being adapted to be excited by an electrostatic force induced by an AC signal applied to the input electrode through an input terminal connected to the input electrode, so that an electric current induced by the vibration of the vibrator is outputted from the output electrode through an output terminal connected to the output electrode, wherein a bias terminal is connected to the supporting portion which is formed integrally with the vibrator, there is formed a junction interface having at least one of a pn junction, a pp junction, an nn junction, a metal-n junction, and a metal-p junction, in an electric-current path between the bias terminal and the supporting portion, and there is provided a DC bias circuit for continuously flowing a DC current through the junction interface. - View Dependent Claims (17, 18, 19, 20)
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Specification