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MEMS resonator

  • US 8,698,569 B2
  • Filed: 01/31/2012
  • Issued: 04/15/2014
  • Est. Priority Date: 02/21/2011
  • Status: Active Grant
First Claim
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1. An MEMS resonator comprising:

  • a vibrator adapted to mechanically vibrate by being subjected to an electrostatic force;

    a supporting portion adapted to support the vibrator so as to allow the vibrator to vibrate; and

    at least a single electrode having a surface which faces the vibrator with a gap interposed therebetween;

    one of the supporting portion and the electrode being an input electrode, and the other one of the supporting portion and the electrode being an output electrode,the vibrator being adapted to be excited by an electrostatic force induced by an AC signal applied to the input electrode through an input terminal connected to the input electrode, so that an electric current induced by the vibration of the vibrator is outputted from the output electrode through an output terminal connected to the output electrode,wherein there is formed a junction interface having at least one of a pn junction, a pp junction, an nn junction, a metal-n junction, and a metal-p junction, in an electric-current path between the input terminal and the input electrode or in an electric-current path between the output electrode and the output terminal, andthere is provided a DC bias circuit for continuously flowing a DC current through the junction interface.

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