Method for determining illumination source with optimized depth of focus
First Claim
1. A method for determining an illumination source with optimized depth of focus, comprising:
- providing a plurality of illumination sources;
providing a simulated optimal correlation and a simulated defocus correlation of each of said illumination sources, wherein said simulated optimal correlation expresses an optimal intensity as a function of a position of a given illumination source and said simulated defocus correlation expresses a defocus intensity as a function of a position of said given illumination source, wherein said defocus intensity is an intensity of each of said illumination source at defocus;
determining an optimal peak of said simulated optimal correlation and a defocus peak of said simulated defocus correlation;
calculating a peak variation of said optimal peak and said defocus peak, wherein said peak variation is calculated from the following formula;
said peak variation=(said optimal peak−
said defocus peak)/(said optimal peak); and
determining an illumination source of a lowest peak variation among a plurality of said illumination sources to be an illumination source with optimized depth of focus.
1 Assignment
0 Petitions
Accused Products
Abstract
A method for determining an illumination source with optimized depth of focus includes the following steps. First, a simulated optimal correlation and a simulated defocus correlation of each illumination source are provided. Second, an optimal peak is determined, a defocus peak is determined, and an optimal correlation slope and a defocus correlation slope are determined. An optimal correlation ratio and a peak variation are calculated. A correlation variation is calculated from the optimal correlation ratio and the defocus correlation ratio. Next, a weighted variation is determined from the peak variation and the correlation variation. An illumination source of a lowest weighted variation among a plurality of the illumination sources is determined to be an illumination source with optimized depth of focus.
-
Citations
23 Claims
-
1. A method for determining an illumination source with optimized depth of focus, comprising:
-
providing a plurality of illumination sources; providing a simulated optimal correlation and a simulated defocus correlation of each of said illumination sources, wherein said simulated optimal correlation expresses an optimal intensity as a function of a position of a given illumination source and said simulated defocus correlation expresses a defocus intensity as a function of a position of said given illumination source, wherein said defocus intensity is an intensity of each of said illumination source at defocus; determining an optimal peak of said simulated optimal correlation and a defocus peak of said simulated defocus correlation; calculating a peak variation of said optimal peak and said defocus peak, wherein said peak variation is calculated from the following formula;
said peak variation=(said optimal peak−
said defocus peak)/(said optimal peak); anddetermining an illumination source of a lowest peak variation among a plurality of said illumination sources to be an illumination source with optimized depth of focus. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A method for determining an illumination source with optimized depth of focus, comprising:
-
providing a plurality of illumination sources, providing a simulated optimal correlation and a simulated defocus correlation of each of said illumination sources, wherein said simulated optimal correlation expresses an optimal intensity as a function of a position of a given illumination source and said simulated defocus correlation expresses a defocus intensity as a function of a position of said given illumination source, wherein said defocus intensity is an intensity of each of said illumination sources at defocus; determining an optimal correlation slope and a defocus correlation slope of said given illumination source, wherein said optimal correlation slope represents the slope of said simulated optimal correlation at a given dimension, and said defocus correlation slope represents the slope of said simulated defocus correlation at a given dimension; calculating an optimal correlation ratio from said optimal correlation slope and a defocus correlation ratio from said defocus correlation slope; calculating a correlation variation of said optimal correlation ratio and said defocus correlation ratio; and determining an illumination source of a lowest correlation variation among a plurality of said illumination sources to be an illumination source with optimized depth of focus. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
-
-
15. A method for determining an illumination source with an optimized depth of focus, comprising:
-
providing a plurality of illumination sources; providing a simulated optimal correlation and a simulated defocus correlation of each of said illumination sources, wherein said simulated optimal correlation expresses an optimal intensity as a function of a position of a given illumination source and said simulated defocus correlation expresses a defocus intensity as a function of a position of said given illumination source, wherein said defocus intensity is an intensity of each of said illumination source at defocus; determining an optimal peak of said simulated optimal correlation, a defocus peak of said simulated defocus correlation, an optimal correlation slope of said given illumination source, and a defocus correlation slope of said given illumination source, wherein said optimal correlation slope represents the slope of said simulated optimal correlation at a given dimension, and said defocus correlation slope represents the slope of said simulated defocus correlation at a given dimension; calculating an optimal correlation ratio from said optimal correlation slope and a defocus correlation ratio from said defocus correlation slope; calculating a peak variation of said optimal peak and said defocus peak, a correlation variation of said optimal correlation ratio and said defocus correlation ratio; determining a weight variation from said peak variation and said correlation variation; and determining an illumination source of a lowest weighted variation among a plurality of said illumination sources to be an illumination source with optimized depth of focus. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
-
Specification