Optical scanner and image forming apparatus

• US 8,699,112 B2
• Filed: 02/22/2011
• Issued: 04/15/2014
• Est. Priority Date: 02/23/2010
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Mizoguchi, Yasushi
• Primary Examiner(s): Doak, Jennifer L.
• Application Number:
  US13/031,677
• Publication Number:
  US 20110205608A1
• Time in Patent Office: 1,148 Days
• Field of Search: 3591981-1994, 3592006-2008, 359/202.1, 359/221.2, 3592231-2251, 359/226.2, 359/904, 359290-295, 359/838, 359/846, 359/871, 359/872, 250/204, 250/559.06, 250/559.29, 250/230, 250/234, 347255-260, 353/39, 353 98- 99, 385 15- 18, 385/22, 398/12, 398/19, 398/45, 3031981-1994, 3032006-2008, 303/202.1, 303/221.2, 3032231-2251, 303/226.2, 303/904, 303290-295, 303/838, 303/846, 303/871, 303/872
• US Class Current: 359/224.1
• CPC Class Codes: B41J 2/47 using the combination of scanning and modulation of light
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.

Claims

1. An optical scanner comprising:

a light reflecting section;

a movable plate provided to the light reflecting section;

four link sections connected to the movable plate; and

a supporting section supporting the four link sections,

wherein each link section includes;

a movable plate-side shaft section connected to the movable plate;

a stress alleviating section connected to the movable plate-side shaft section, the stress alleviating section having a pair of deformation sections and a non-deformable section provided between the pair of the deformation sections;

a drive section-side shaft section connected to the stress alleviating section;

a drive section connected to the drive section-side shaft section, and

a pair of shaft sections connected to the drive section and the supporting section,

wherein the non-deformable sections, the drive section-side shaft section, the pairs of the shaft sections and the drive sections are each formed of a first Si layer, a SiO₂ layer, and a second Si layer, and

wherein the movable plate-side shaft sections, the pairs of the deformation sections, and the pairs of the shaft sections are each formed of the second Si layer.

2. The optical scanner according to claim 1, wherein the four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in an X-Y plane view.

3. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 2.

4. The optical scanner according to claim 1, wherein, in each of the link sections, the non-deformable section extends in a direction parallel to an extending direction of the deformation sections, and is torsionally non-deformable when the movable plate is driven.

5. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 4.

6. The optical scanner according to claim 1, further comprising:

a permanent magnet provided to each of the drive sections, and

four coils, each of the four coils producing a magnetic field that acts on each of the permanent magnets.

7. The optical scanner according to claim 6, wherein the permanent magnets are each provided such that two poles face each other in a thickness direction of the movable plate, and each of the coils are provided so as to produce a magnetic field in a direction perpendicular to the thickness direction of the movable plate.

8. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 7.

9. The optical scanner according to claim 6, wherein each of the permanent magnets penetrates each of the drive sections.

10. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 9.

11. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 6.

12. The optical scanner according to claim 1, wherein the non-deformable sections, the drive section-side shaft sections, and the drive sections are thicker than the movable plate-side shaft sections, the pairs of the deformation sections, and the pairs of the shaft sections.

13. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 12.

14. The optical scanner according to claim 1, wherein each the drive sections is rectangular in an X-Y plane view.

15. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 14.

16. The optical scanner according to claim 1, wherein each of the drive sections has first outer sides and second outer sides that are longer than the first outer sides in an X-Y plane view, and

in each of the link sections, the drive section-side shaft section is connected to one of the second sides and the pair of shaft sections is connected to the first sides.

17. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 16.

18. The optical scanner according to claim 1, wherein each of the non-deformable sections is positioned at a height greater than a height of each of the deformation sections in a thickness direction of the non-deformable sections.

19. An image forming apparatus comprising:

a light source; and

an optical scanner according to claim 18.