Surface-emitting laser device and surface-emitting laser array including same

• US 8,699,540 B2
• Filed: 10/26/2012
• Issued: 04/15/2014
• Est. Priority Date: 02/03/2006
• Status: Active Grant

• Current Assignee: Ricoh Company Limited
• Original Assignee: Ricoh Company Limited
• Inventors: Sato, Shunichi
• Primary Examiner(s): Park, Kinam
• Application Number:
  US13/661,661
• Publication Number:
  US 20130044177A1
• Time in Patent Office: 536 Days
• Field of Search: 372/50.124, 372/50.11, 372/50.1, 372/43.01, 372/36
• US Class Current: 372/50.124
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01S 5/02461 Structure or details of the laser chip to manipulate the heat flow, e.g. passive layers in the chip with a low heat conductivity
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: H01S 5/18358 containing spacer layers to adjust the phase of the light wave in the cavity
• CPC Class Codes: H01S 5/3403 having a strained layer structure in which the strain performs a special function, e.g. general strain effects, strain versus polarisation
• CPC Class Codes: H01S 5/3434 with a well layer comprising at least both As and P as V-compounds
• CPC Class Codes: H01S 5/3436 based on InGa(Al)P

Abstract

A surface-emitting laser device is disclosed that includes a substrate connected to a heat sink; a first reflective layer formed of a semiconductor distributed Bragg reflector on the substrate; a first cavity spacer layer formed in contact with the first reflective layer; an active layer formed in contact with the first cavity spacer layer; a second cavity spacer layer formed in contact with the active layer; and a second reflective layer formed of a semiconductor distributed Bragg reflector in contact with the second cavity spacer layer. The first cavity spacer layer includes a semiconductor material having a thermal conductivity greater than the thermal conductivity of a semiconductor material forming the second cavity spacer layer.

Claims

1. A surface-emitting laser device, comprising:

a substrate connected to a heat sink;

a first reflective layer formed of a semiconductor distributed Bragg reflector on the substrate;

a first cavity spacer layer formed in contact with the first reflective layer;

an active layer formed in contact with the first cavity spacer layer;

a second cavity spacer layer formed in contact with the active layer; and

a second reflective layer formed of a semiconductor distributed Bragg reflector in contact with the second cavity spacer layer,

wherein the first cavity spacer layer includes a semiconductor material having a thermal conductivity greater than a thermal conductivity of a semiconductor material forming the second cavity spacer layer, and

wherein a thermal conductivity of a semiconductor material of a low refractive index layer in the first reflective layer closest to the active layer is greater than a thermal conductivity of a semiconductor material of a low refractive index layer in the second reflective layer closest to the active layer.

2. The surface-emitting laser device as claimed in claim 1, wherein the semiconductor material forming the first cavity spacer layer and the semiconductor material forming the second cavity spacer layer are asymmetrical with respect to the active layer.

3. The surface-emitting laser device as claimed in claim 1, wherein the semiconductor material forming the second cavity spacer layer comprises (Al_dGa_1-d)_fIn_1-fP (0<

d≦

1, 0≦

f≦

1).

4. The surface-emitting laser device as claimed in claim 3, wherein the semiconductor material forming the first cavity spacer layer has the thermal conductivity greater than the thermal conductivity of said (Al_dGa_1-d)_fIn_1-fP.

5. The surface-emitting laser device as claimed in claim 4, wherein the first cavity spacer layer comprises (Al_gGa_1-g)_hIn_1-hP (0≦

g≦

1, 0≦

h≦

1) having a band gap smaller than a band gap of said (Al_dGa_1-d)_fIn_1-fP.

6. The surface-emitting laser device as claimed in claim 1, wherein the first cavity spacer layer comprises Al_zGa_1-zAs (0≦

z≦

1).

7. The surface-emitting laser device as claimed in claim 1, wherein the first cavity spacer layer comprises:

a first spacer layer formed in contact with the first reflective layer and having a first thermal conductivity; and

a second spacer layer formed in contact with the first spacer layer and the active layer and having a second thermal conductivity smaller than the first thermal conductivity.

8. The surface-emitting laser device as claimed in claim 1, wherein a thermal conductivity of one of semiconductor materials of the first reflective layer which one is disposed closest to the active layer is greater than a thermal conductivity of one of semiconductor materials of the second reflective layer which one is disposed closest to the active layer.

9. The surface-emitting laser device as claimed in claim 1, wherein:

the first reflective layer comprises at least a layer formed of Al_xGa_1-xAs (0<

x≦

1); and

the second reflective layer comprises a layer formed of (Al_dGa_1-d)_fIn_1-fP (0<

d≦

1, 0≦

f≦

1) and disposed at a symmetric position of the layer formed of said Al_xGa_1-xAs with respect to the active layer.

10. The surface-emitting laser device as claimed in claim 9, wherein said Al_xGa_1-xAs is AlAs.

11. A surface-emitting laser array, comprising:

a plurality of surface-emitting laser devices,

wherein each of the surface-emitting laser devices is formed of the surface-emitting laser device as set forth in claim 1.

12. An image forming apparatus, comprising:

a surface-emitting laser array as a light source for writing, the surface-emitting laser array including a plurality of surface-emitting laser devices,

wherein each of the surface-emitting laser devices is formed of the surface-emitting laser device as set forth in claim 1.

13. An optical communication system, comprising:

the surface-emitting laser device as set forth in claim 1 as a light source.

14. A surface-emitting laser device, comprising:

a substrate connected to a heat sink;

a first reflective layer formed of a semiconductor distributed Bragg reflector on the substrate;

a first cavity spacer layer formed in contact with the first reflective layer;

an active layer formed in contact with the first cavity spacer layer;

a second cavity spacer layer formed in contact with the active layer; and

a second reflective layer formed of a semiconductor distributed Bragg reflector in contact with the second cavity spacer layer,

wherein the active layer includes

a well layer formed of Ga_aIn_1-aP_bAs_1-b (0≦

a≦

1, 0≦

b≦

1); and

a barrier layer formed of (Ga_cIn_1-c)_dP_1-dAs (0≦

c≦

1, 0≦

d≦

1) having a band gap greater than a band gap of the well layer;

the first reflective layer includes

a plurality of low refractive index layers formed of Al_xGa_1-xAs (0<

x≦

1); and

a plurality of high refractive index layers formed of Al_yGa_1-yAs (0<

y≦

x<

1);

a part of the second cavity spacer layer is formed of (Al_eGa_1-e)_fIn_1-fP (0<

e≦

1, 0≦

f≦

1); and

the first cavity spacer layer includes a semiconductor material at a symmetric position of a position at which the second cavity spacer layer includes said (Al_eGa_1-e)_fIn_1-fP with respect to the active layer, the semiconductor material having a thermal conductivity greater than a thermal conductivity of said (Al_eGa_1-e)_fIn_1-fP.

15. The surface-emitting laser device as claimed in claim 14, wherein each of the low refractive index layers included in the first reflective layer comprises AlAs.

16. The surface-emitting laser device as claimed in claim 14, wherein:

the second reflective layer comprises a current confinement part; and

the first reflective layer comprises

a first reflective part formed in contact with the substrate and including one of the low refractive index layers which one is formed of AlAs; and

a second reflective part formed on an active layer side of the first reflective part and including one of the low refractive index layers which one is formed of Al_jGa_1-jAs (0<

j<

1).