Surface texture measuring instrument
First Claim
1. A surface texture measuring instrument comprising:
- a measurement arm that is supported by a body movably in a circular movement around a rotary shaft;
a stylus provided at an end of the measurement arm;
a displacement detector that detects a circular movement amount of the measurement arm;
a detector having a casing that houses the body;
a stage on which an object to be measured is mounted; and
a relative movement mechanism that moves the detector and the stage relatively to each other, the surface texture measuring instrument being configured to detect the circular movement amount of the measurement arm by the displacement detector while moving the detector and the stage relatively to each other by the relative movement mechanism with the stylus being in contact with a surface of the object and to measure a surface texture of the object based on the circular movement amount, whereinthe measurement arm comprises;
a first measurement arm that is supported by the body swingably around the support shaft in the casing; and
a second measurement arm that is provided with the stylus at an end thereof and is detachably provided to an end of the first measurement arm via an attachment-detachment mechanism, the attachment-detachment mechanism being arranged in the casing,the displacement detector comprises;
a scale that is provided to one of the body and the measurement arm; and
a detection head that is provided to the other of the body and the measurement arm to face the scale, anda detecting surface of the scale is on an axis of the measurement arm and on a plane of the circular movement of the measurement arm.
1 Assignment
0 Petitions
Accused Products
Abstract
In a surface texture measuring instrument, a measurement arm includes: a first measurement arm that is supported by a bracket around a support shaft movably in a circular movement in a casing; and a second measurement arm having styluses that are attachably and detachably provided to an end of the first measurement arm via an attachment-detachment mechanism, the attachment-detachment mechanism being arranged in the casing. A displacement detector includes: a scale provided to the measurement arm; and a detection head provided to the bracket to face the scale. A detecting surface of the scale is on an axis of the measurement arm and on a plane of the circular movement of the measurement arm.
27 Citations
10 Claims
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1. A surface texture measuring instrument comprising:
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a measurement arm that is supported by a body movably in a circular movement around a rotary shaft; a stylus provided at an end of the measurement arm; a displacement detector that detects a circular movement amount of the measurement arm; a detector having a casing that houses the body; a stage on which an object to be measured is mounted; and a relative movement mechanism that moves the detector and the stage relatively to each other, the surface texture measuring instrument being configured to detect the circular movement amount of the measurement arm by the displacement detector while moving the detector and the stage relatively to each other by the relative movement mechanism with the stylus being in contact with a surface of the object and to measure a surface texture of the object based on the circular movement amount, wherein the measurement arm comprises;
a first measurement arm that is supported by the body swingably around the support shaft in the casing; and
a second measurement arm that is provided with the stylus at an end thereof and is detachably provided to an end of the first measurement arm via an attachment-detachment mechanism, the attachment-detachment mechanism being arranged in the casing,the displacement detector comprises;
a scale that is provided to one of the body and the measurement arm; and
a detection head that is provided to the other of the body and the measurement arm to face the scale, anda detecting surface of the scale is on an axis of the measurement arm and on a plane of the circular movement of the measurement arm. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A surface texture measuring instrument comprising:
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a measurement arm that is supported by a body movably in a circular movement around a rotary shaft; a stylus provided at an end of the measurement arm; a displacement detector that detects a circular movement amount of the measurement arm; a detector having a measurement force applier that applies a measurement force to the stylus by biasing the measurement arm in circular movement directions; a stage on which an object to be measured is mounted; and a relative movement mechanism that moves the detector and the stage relatively to each other, the surface texture measuring instrument being configured to detect the circular movement amount of the measurement arm by the displacement detector while moving the detector and the stage relatively to each other by the relative movement mechanism with the stylus being in contact with a surface of the object and to measure a surface texture of the object based on the circular movement amount, wherein the measurement arm comprises;
a first measurement arm that is supported by the body movably in the circular movement around the support shaft; and
a second measurement arm that is provided with the stylus at an end thereof and is detachably provided to an end of the first measurement arm via an attachment-detachment mechanism,the measurement force applier comprises a voice coil that biases the measurement arm in the circular movement directions around the support shaft, and a balance adjuster that adjusts electric current passing through the voice coil to adjust balance of the measurement arm, after the second measurement arm is exchanged. - View Dependent Claims (8, 9, 10)
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Specification