Apparatus and method for calibrating MEMS inertial sensors
First Claim
1. A method for calibrating a MEMS gyroscope having a resonator and an accelerometer, the resonator including at least one shuttle that resonates in a device plane above an underlying substrate and deflects out-of-plane, the accelerometer configured to sense such out-of-plane motion, the method comprising:
- measuring a resonance frequency of the resonator;
measuring a resonance frequency of the accelerometer; and
producing a transduction scale factor value for the MEMS gyroscope based on the resonance frequency of the resonator and the resonance frequency of the accelerometer without physical movement of the gyroscope to measure electrical outputs produced in response to known movements of the gyroscope.
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Abstract
The transduction scale factor for a MEMS gyroscope is calibrated without moving the MEMS device based on measurements of the resonator resonance frequency and the accelerometer resonance frequency as well as a distance value that may be a fixed distance value or a measured distance value. The measured distance value may be obtained by measuring the quality factor of the resonator or accelerometer and deriving the measured distance value from the quality factor measurement.
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Citations
20 Claims
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1. A method for calibrating a MEMS gyroscope having a resonator and an accelerometer, the resonator including at least one shuttle that resonates in a device plane above an underlying substrate and deflects out-of-plane, the accelerometer configured to sense such out-of-plane motion, the method comprising:
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measuring a resonance frequency of the resonator; measuring a resonance frequency of the accelerometer; and producing a transduction scale factor value for the MEMS gyroscope based on the resonance frequency of the resonator and the resonance frequency of the accelerometer without physical movement of the gyroscope to measure electrical outputs produced in response to known movements of the gyroscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A calibration device for calibrating a MEMS gyroscope having a resonator and an accelerometer, the resonator including at least one shuttle that resonates in a device plane above an underlying substrate and deflects out-of-plane, the accelerometer configured to sense such out-of-plane motion, the calibration device comprising:
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a first frequency measurement subsystem configured to measure a resonance frequency of the resonator; a second frequency measurement subsystem configured to measure a resonance frequency of the accelerometer; and a transduction scale factor generator configured to produce a transduction scale factor value for the MEMS gyroscope based on the resonance frequency of the resonator and the resonance frequency of the accelerometer without physical movement of the gyroscope to measure electrical outputs produced in response to known movements of the gyroscope. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification