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Apparatus and method for calibrating MEMS inertial sensors

  • US 8,701,459 B2
  • Filed: 10/19/2010
  • Issued: 04/22/2014
  • Est. Priority Date: 10/20/2009
  • Status: Active Grant
First Claim
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1. A method for calibrating a MEMS gyroscope having a resonator and an accelerometer, the resonator including at least one shuttle that resonates in a device plane above an underlying substrate and deflects out-of-plane, the accelerometer configured to sense such out-of-plane motion, the method comprising:

  • measuring a resonance frequency of the resonator;

    measuring a resonance frequency of the accelerometer; and

    producing a transduction scale factor value for the MEMS gyroscope based on the resonance frequency of the resonator and the resonance frequency of the accelerometer without physical movement of the gyroscope to measure electrical outputs produced in response to known movements of the gyroscope.

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