Lateral motion micro-electro-mechanical system contact switch

• US 8,704,116 B2
• Filed: 01/20/2011
• Issued: 04/22/2014
• Est. Priority Date: 02/01/2010
• Status: Expired due to Fees

• Current Assignee: Sony Semiconductor Solutions Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Akiba, Akira, Ikeda, Koichi
• Primary Examiner(s): GIRARDI, VANESSA MARY
• Application Number:
  US12/929,382
• Publication Number:
  US 20110186407A1
• Time in Patent Office: 1,188 Days
• Field of Search: 200/181, 307/125
• US Class Current: 200/181
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 1/20 Bridging contacts for circuit breakers H01H73/045
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2059/0072 with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

There is provided a contact switch including: a plurality of first contact points arranged in parallel on a substrate; a movable member including a plurality of beams facing the plurality of first contact points, and formed to be slidable along an alignment direction of the first contact points within a face of the substrate; and a plurality of second contact points provided on faces of the beams, opposing the first contact points, respectively.

Claims

1. A lateral motion micro-electro-mechanical system contact switch comprising:

a plurality of first contact points arranged in parallel on a substrate;

a movable member including a plurality of beams facing the plurality of first contact points, and formed to be slidable along an alignment direction of the first contact points within a face of the substrate; and

a plurality of second contact points provided on faces of the plurality of beams, opposing the first contact points, respectively,

wherein each first contact point includes a plurality of fixed contact electrodes, and a movable contact electrode as the second contact point is provided to each fixed contact electrode in each one of the plurality of beams of the movable member,

wherein the substrate includes a step between the plurality of fixed contact electrodes, and a space between the fixed contact electrode and the movable contact electrode on a base side of one of the plurality of beams is wider than that between the fixed contact electrode and the movable contact electrode on an end side of the one of the plurality of beams.

2. The lateral motion micro-electro-mechanical system contact switch according to claim 1,

wherein the movable contact electrode is fabricated from a titanium film layer and a gold film layer stacked onto each other with the titanium film layer having a titanium film layer thickness of approximately 0.1 μ

m and the gold film layer having a gold film layer thickness of approximately 0.2 μ

m.

3. A lateral motion micro-electro-mechanical system contact switch comprising:

a plurality of first contact points disposed apart from one another and arranged in parallel on a substrate, wherein each first contact point includes a plurality of fixed contact electrodes and a movable contact electrode;

a movable member including a support body extending along an alignment direction of the plurality of first contact points and a plurality of beams projecting from the support body along a direction orthogonal to the alignment direction, the plurality of beams facing the plurality of first contact points, and formed to be slidable along the alignment direction of the first plurality of contact points within a face of the substrate,

wherein the substrate includes a step between the plurality of fixed contact electrodes, and a space between the plurality of fixed contact electrodes and the movable contact electrode on a base side of one of the plurality of beams is wider than that between the plurality of fixed contact electrodes and the movable contact electrode on an end side of the one of the plurality of beams; and

a plurality of second contact points provided on faces of the plurality of beams, opposing the plurality of first contact points, respectively,

wherein an elastic modulus of the plurality of beams is smaller than that of the support body in the movable member such that when the movable member urges respective ones of the plurality of first and second contact points together, a contact pressure is imparted therebetween and each one of the plurality of beams is operative to flex as a result of a bending moment force being imparted to each one of the plurality of beams by the support body.

4. The lateral motion micro-electro-mechanical system contact switch according to claim 3,

wherein

the movable contact electrode as a second contact point is provided to each fixed contact electrode and

the plurality of fixed contact electrodes, the movable contact electrode, and the each one of the plurality of beams are line-symmetrically arranged with an operation axis of the support body, serving as a symmetric axis.

5. The lateral motion micro-electro-mechanical system contact switch according to claim 3,

wherein

the movable contact electrode is provided to the plurality of fixed contact electrodes in each one of the plurality of beams of the movable member.

6. The lateral motion micro-electro-mechanical system contact switch according to claim 3,

wherein the movable contact electrode is fabricated from a titanium film layer and a gold film layer stacked onto each other with the titanium film layer having a titanium film layer thickness of approximately 0.1 μ

m and the gold film layer having a gold film layer thickness of approximately 0.2 μ

m.

7. The lateral motion micro-electro-mechanical system contact switch according to claim 3, further comprising:

on the substrate;

a signal line electrically connected to each of the plurality of first contact points to transmit a signal; and

a ground line arranged between the signal line.

8. The lateral motion micro-electro-mechanical system contact switch according to claim 3,

wherein

the movable contact electrode is provided to each fixed contact electrode in each one of the plurality of beams of the movable member.

9. The lateral motion micro-electro-mechanical system contact switch according to claim 3, further comprising:

a drive section switching the plurality of first contact points and the plurality of second contact points to either a contact state or a non-contact state by driving the movable member,

wherein the drive section includes a Micro Electro Mechanical System (MEMS) actuator.

10. The lateral motion micro-electro-mechanical system contact switch according to claim 9,

wherein the MEMS actuator is configured as an electrostatic MEMS actuator by a lateral drive.

11. A lateral motion micro-electro-mechanical system contact switch, comprising:

a substrate;

a first substrate electrode and a second substrate electrode fixedly connected to the substrate and projecting therefrom;

an actuator connected to the substrate;

a movable member operably connected to the actuator and including a rigid support member extending along an operative axis, a first beam integrally connected to the support member at a first distance from the actuator and extending perpendicularly to the operative axis and a second beam integrally connected to the support member at a second distance from the actuator and extending perpendicularly from the operative axis, the first distance being larger than the second distance, the first and second beams being stiff yet pliable; and

a first movable electrode fixedly connected to and projecting from the first beam along an operative axis direction, disposed apart from the support member and facially opposing the first substrate electrode and a second movable electrode fixedly connected to and projecting from the second beam along the operative axis direction, disposed apart from the support member and facially opposing the second substrate electrode,

wherein, the lateral motion micro-electro-mechanical system contact switch moves to and between an OFF state and an ON state, such that, in the OFF state, the support member is retracted along the operative axis by the actuator causing respective ones of the first and second movable electrodes to move away from respective ones of the first and second substrate electrodes and,

in the ON state, the support member is extended along the operative axis by the actuator causing the respective ones of the first and second movable electrodes to facially contact the respective ones of the first and second substrate electrodes at applied contact pressures while imparting bending forces on respective ones of the first and second beams.

12. A lateral motion micro-electro-mechanical system contact switch according to claim 11,

wherein, in the ON state, respective ones of the first and second beams are disposed apart from the substrate forming a gap therebetween.

13. A lateral motion micro-electro-mechanical system contact switch according to claim 11,

wherein the first beam and the second beam are elastic bodies.

14. A lateral motion micro-electro-mechanical system contact switch according to claim 11,

wherein at least the first beam has a beam elastic modulus and the support member has a support member elastic modulus being greater than the beam elastic modulus.