Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method
First Claim
1. An electron microscope provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope comprising:
- a first storage means for tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit;
a rotation means for correcting misregistration of the object under observation by a rotation step-angle to thereby rotate the object under observation up to a set rotation angle;
a second storage means for tilting the object under observation rotated by the rotation means, at angle-steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and
an operation means for creating third, and fourth reconstruction images, obtained by correcting misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other.
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Accused Products
Abstract
There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in contrast, contamination of a sample, and restrictions imposed on a sample for use, occurring due to use of markings.
A plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; are acquired, misregistration is corrected by a rotation step-angle, a rotated object under observation is tilted in angle-steps, differing from each other, to pick up images thereof, two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups are created, and one reconstruction image is created by superimposing one of the two reconstruction images on the other.
12 Citations
22 Claims
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1. An electron microscope provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope comprising:
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a first storage means for tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit; a rotation means for correcting misregistration of the object under observation by a rotation step-angle to thereby rotate the object under observation up to a set rotation angle; a second storage means for tilting the object under observation rotated by the rotation means, at angle-steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and an operation means for creating third, and fourth reconstruction images, obtained by correcting misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electron-microscope image-reconstruction system using a measuring device provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope image-reconstruction system comprising:
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a first storage means for tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit; a rotation means for correcting misregistration of the object under observation by a rotation step-angle to rotate the object under observation up to a set rotation angle; a second storage means for tilting the object under observation rotated by the rotation means, at angle steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and an operation means for creating third, and fourth reconstruction images, obtained by correcting respective misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An electron-microscope image-reconstruction method using a measuring device provided with an irradiation unit for irradiating an object under observation with an electron beam, first and second image detection units for detecting a response from the object under observation, respectively, a transfer unit for holding and transferring the object under observation, a tilting unit capable of optionally setting a tilt-angle of the object under observation, a rotation unit capable of optionally setting a rotation-angle of the object under observation, and an operation unit for executing various operations, the electron microscope image-reconstruction method comprising the steps of:
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tilting the object under observation at angle steps differing from each other, and storing a first tilted-image group acquired by a photographing unit; correcting misregistration of the object under observation by a rotation step-angle to rotate the object under observation up to a set rotation angle; tilting the object under observation rotated at angle steps differing from each other, and storing a second tilted-image group acquired by a photographing unit; and creating third, and fourth reconstruction images, obtained by correcting respective misregistrations of first and second reconstruction images, respectively, the first and second reconstruction images, being created from the first and second tilted-image groups, respectively, and creating a fifth reconstruction image by superimposing the third, and fourth reconstruction images one on the other. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. An electron-microscope image-reconstruction method comprising the steps of:
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acquiring a plurality of tilt-images photographed by tilting a sample at sample-tilt axes, differing from each other; correcting misregistration by a rotation step-angle; tilting a rotated object under observation in angle-steps, differing from each other, to pick up images thereof; creating two reconstruction images obtained by correcting respective misregistrations of two reconstruction images created from respective tilt-image groups, and creating one reconstruction image by superimposing one of the two reconstruction images on the other.
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Specification