Method for manufacturing semiconductor device

• US 8,704,219 B2
• Filed: 03/25/2011
• Issued: 04/22/2014
• Est. Priority Date: 03/26/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Godo, Hiromichi
• Primary Examiner(s): Coleman, William D
• Assistant Examiner(s): ENAD, CHRISTINE A
• Application Number:
  US13/071,845
• Publication Number:
  US 20110233542A1
• Time in Patent Office: 1,124 Days
• Field of Search: 257/43, 257/E29.273, 257/E21.411, 438/104
• US Class Current: 257/43
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

In a transistor including an oxide semiconductor film, a metal oxide film which has a function of preventing electrification and covers a source electrode and a drain electrode is formed in contact with the oxide semiconductor film, and then, heat treatment is performed. Through the heat treatment, impurities such as hydrogen, moisture, a hydroxyl group, or hydride are intentionally removed from the oxide semiconductor film, whereby the oxide semiconductor film is highly purified. By providing the metal oxide film, generation of a parasitic channel on the back channel side of the oxide semiconductor film in the transistor can be prevented.

Claims

1. A semiconductor device comprising:

a gate electrode;

a gate insulating film which covers the gate electrode;

a semiconductor film comprising an oxide semiconductor, wherein a region of the semiconductor film overlaps with the gate electrode;

a source electrode and a drain electrode which are in contact with the semiconductor film;

a metal oxide film which is in contact with the semiconductor film and covers the source electrode and the drain electrode;

an insulating film which covers the metal oxide film;

a conductive film over the insulating film, wherein the conductive film overlaps with the region of the semiconductor film;

a liquid crystal element comprising a pixel electrode, wherein the pixel electrode is electrically connected to one of the source electrode and the drain electrode; and

a storage capacitor,

wherein a hydrogen concentration of the semiconductor film is less than or equal to 5×

10¹⁸ atoms/cm³, and

wherein a thickness of the metal oxide film is larger than a thickness of the semiconductor film, and

wherein a capacitance of the storage capacitor is equal to or less than one third of a capacitance of the liquid crystal element.

2. The semiconductor device according to claim 1, wherein the metal oxide film comprises gallium oxide.

3. The semiconductor device according to claim 1, wherein the metal oxide film comprises one of indium and zinc at 0.01 at. % to 5 at. %.

4. The semiconductor device according to claim 1, wherein the oxide semiconductor comprises indium and gallium.

5. The semiconductor device according to claim 1, wherein the source electrode and the drain electrode comprise a conductive material whose work function is 3.9 eV or more.

6. The semiconductor device according to claim 1, wherein the source electrode and the drain electrode comprise one of tungsten nitride and titanium nitride.

7. A semiconductor device comprising:

a gate electrode;

a gate insulating film over the gate electrode;

a semiconductor film comprising an oxide semiconductor, wherein a region of the semiconductor film overlaps with the gate electrode;

a source electrode and a drain electrode which are in contact with the semiconductor film;

a metal oxide film which is in contact with the semiconductor film and overlaps with the source electrode and the drain electrode;

an insulating film over and in contact with the metal oxide film;

a conductive film over the insulating film, wherein the conductive film overlaps with the region of the semiconductor film;

a liquid crystal element comprising a pixel electrode, wherein the pixel electrode is electrically connected to one of the source electrode and the drain electrode; and

a storage capacitor,

wherein a hydrogen concentration of the semiconductor film is less than or equal to 5×

10¹⁸ atoms/cm³, and

wherein a thickness of the metal oxide film is larger than a thickness of the semiconductor film, and

wherein a capacitance of the storage capacitor is equal to or less than one third of a capacitance of the liquid crystal element.

8. The semiconductor device according to claim 7, wherein the metal oxide film comprises gallium oxide.

9. The semiconductor device according to claim 7, wherein the metal oxide film comprises one of indium and zinc at 0.01 at. % to 5 at. %.

10. The semiconductor device according to claim 7, wherein the oxide semiconductor comprises indium and gallium.

11. The semiconductor device according to claim 7, wherein the source electrode and the drain electrode comprise a conductive material whose work function is 3.9 eV or more.

12. The semiconductor device according to claim 7, wherein the source electrode and the drain electrode comprise one of tungsten nitride and titanium nitride.

13. The semiconductor device, according to claim 7, wherein the thickness of the metal oxide film is larger than 10 nm.

14. The semiconductor device, according to claim 7,

wherein the metal oxide film extends from a first position to a second position with the source electrode interposed between the metal oxide film and the gate insulating film, wherein the metal oxide film is in contact with the gate insulating film in the first position and is in contact with the semiconductor film in the second position, and

wherein the metal oxide film extends from the second position to a third position with the drain electrode interposed between the metal oxide film and the gate insulating film, wherein the metal oxide film is in contact with the gate insulating film in the third position.

20. The semiconductor device, according to claim 7, wherein the insulating film comprises silicon oxide.

15. A method for manufacturing a semiconductor device comprising a liquid crystal element and a storage capacitor, comprising the steps of:

forming a gate electrode over a substrate;

forming a gate insulating film which covers the gate electrode;

forming a semiconductor film comprising an oxide semiconductor over the gate electrode with the gate insulating film interposed therebetween, wherein a region of the semiconductor film overlaps with the gate electrode;

forming a source electrode and a drain electrode over the semiconductor film;

forming a metal oxide film which covers the semiconductor film, the source electrode, and the drain electrode;

forming an insulating film which covers the metal oxide film;

forming a conductive film over the insulating film, wherein a region of the semiconductor film; and

performing heat treatment on the semiconductor film,

wherein a hydrogen concentration of the semiconductor film is less than or equal to 5×

10¹⁸ atoms/cm³, and

wherein a thickness of the metal oxide film is larger than a thickness of the semiconductor film, and

wherein a capacitance of the storage capacitor is equal to or less than one third of a capacitance of the liquid crystal element.

16. The method for manufacturing a semiconductor device, according to claim 15, wherein the metal oxide film comprises gallium oxide.

17. The method for manufacturing a semiconductor device, according to claim 15, wherein the oxide semiconductor comprises indium and gallium.

18. The method for manufacturing a semiconductor device, according to claim 15, wherein the metal oxide film comprises one of indium and zinc at 0.01 at. % to 5 at. %.

19. The method for manufacturing a semiconductor device, according to claim 15, wherein the heat treatment is performed at 450°

C. to 600°

C. inclusive.