Top port surface mount silicon condenser microphone package

• US 8,704,360 B1
• Filed: 12/31/2012
• Issued: 04/22/2014
• Est. Priority Date: 11/28/2000
• Status: Expired due to Fees

• Current Assignee: Knowles Electronics Llc (Knowles Corporation)
• Original Assignee: Knowles Electronics Llc (Knowles Corporation)
• Inventors: Minervini, Anthony D.
• Primary Examiner(s): Chambliss, Alonzo
• Application Number:
  US13/732,179
• Time in Patent Office: 477 Days
• Field of Search: None
• US Class Current: 257/704
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2207/092 Buried interconnects in the substrate or in the lid
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81B 7/0038 using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
• CPC Class Codes: B81B 7/0058 for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
• CPC Class Codes: B81B 7/0061 suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
• CPC Class Codes: B81B 7/0064 for protecting against electromagnetic or electrostatic interferences
• CPC Class Codes: B81B 7/007 Interconnections between the MEMS and external electrical signals
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: B81C 1/00301 Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
• CPC Class Codes: B81C 3/00 Assembling of devices or systems from individually processed components
• CPC Class Codes: H01L 21/78 with subsequent division of the substrate into plural individual devices cutting to change the surface-physical characteristics or shape of semiconductor bodies H01L21/304
• CPC Class Codes: H01L 23/10 characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
• CPC Class Codes: H01L 23/15 Ceramic or glass substrates H01L23/142, H01L23/145, H01L23/147 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/1461 MEMS
• CPC Class Codes: H04R 1/04 Structural association of microphone with electric circuitry therefor in deaf-aid sets H04R25/00
• CPC Class Codes: H04R 1/222 for microphones H04R1/24, H04R1/26 take precedence
• CPC Class Codes: H04R 1/2892 Mountings or supports for transducers
• CPC Class Codes: H04R 19/005 : using semiconductor materials
• CPC Class Codes: H04R 19/016 : for microphones
• CPC Class Codes: H04R 19/04 : Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2201/003 : Mems transducers or their use
• CPC Class Codes: H04R 2225/49 : Reducing the effects of electromagnetic noise on the functioning of hearing aids, by, e.g. shielding, signal processing adaptation, selective (de)activation of electronic parts in hearing aid
• CPC Class Codes: H04R 23/00 : Transducers other than those covered by groups H04R9/00 - H04R21/00 diaphragms for transducers of the distributed-mode type H04R7/045
• CPC Class Codes: H04R 2410/03 : Reduction of intrinsic noise in microphones
• CPC Class Codes: H04R 3/00 : Circuits for transducers , loudspeakers or microphones
• CPC Class Codes: H04R 31/006 : Interconnection of transducer parts of diaphragm and outer suspension by moulding H04R31/003
• CPC Class Codes: Y10T 29/49005 : Acoustic transducer
• CPC Class Codes: Y10T 29/4908 : Acoustic transducer
• CPC Class Codes: Y10T 29/49798 : Dividing sequentially from leading end, e.g., by cutting or breaking

Abstract

The present invention relates to a surface mount package for a silicon condenser microphone and methods for manufacturing the surface mount package. The surface mount package uses a limited number of components which simplifies manufacturing and lowers costs, and features a substrate that performs functions for which multiple components were traditionally required, including providing an interior surface on which the silicon condenser die is mechanically attached, providing an interior surface for making electrical connections between the silicon condenser die and the package, and providing an exterior surface for surface mounting the package to a device'"'"'s printed circuit board and for making electrical connections between package and the device'"'"'s printed circuit board.

Claims

1. A solder reflow surface mount microelectromechanical system (MEMS) microphone device comprising:

a substrate having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, each substrate further comprising;

a first plurality of metal pads formed on the upper surface of the substrate;

a second plurality of metal pads formed on the lower surface of the substrate and arranged within a perimeter of the lower surface of the substrate, wherein the second plurality of metal pads are configured to mechanically attach and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and

one or more electrical pathways formed completely within the substrate, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the substrate to one or more of the second plurality of metal pads on the lower surface of the substrate;

a MEMS microphone die mounted to the upper surface of the substrate and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the substrate; and

a single-piece cover that has a top region with an acoustic port that passes completely through the cover, and a sidewall region, the sidewall region adjoining the top region at a substantially perpendicular angle and having a predetermined height, an exterior surface, an interior surface, and a bottom surface,

wherein the bottom surface of the sidewall region is aligned with and attached to the peripheral region of the upper surface of the substrate, thereby forming a protective enclosure for the MEMS microphone die that reduces electromagnetic interference, and

wherein the predetermined height and interior surface of the sidewall region and interior surface of the top region, in cooperation with the interior region of the upper surface of the substrate, defines an acoustic chamber for the MEMS microphone die.

2. A surface mount MEMS microphone device according to claim 1, wherein the one or more electrical pathways are plated through-holes electrically coupling one or more of the first plurality of metal pads to one or more of the second plurality of metal pads.

3. A surface mount MEMS microphone device according to claim 1, further comprising a metal pad formed on the upper surface of the substrate, wherein the MEMS microphone die is mounted to the metal pad.

4. A surface mount MEMS microphone device according to claim 1, wherein the substrate comprises FR-4 material.

5. A surface mount MEMS microphone device according to claim 1, further comprising at least one passive electrical device formed within the substrate.

6. A surface mount MEMS microphone device according to claim 1, wherein the enclosure protects the MEMS microphone die from at least one of light and physical damage.

7. A surface mount MEMS microphone device according to claim 6, wherein the enclosure further comprises acoustic material that substantially blocks environmental contaminants from entering the chamber through the acoustic port.

8. A surface mount MEMS microphone device according to claim 1, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume in the acoustic chamber, and the acoustic port formed in the cover is acoustically coupled to the front volume.

9. A surface mount microelectromechanical system (MEMS) microphone device comprising:

a printed circuit board comprising multiple layers of non-conductive material and having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the printed circuit board comprising;

a first plurality of metal pads formed on the upper surface of the printed circuit board;

a second plurality of metal pads formed on the lower surface of the printed circuit board and arranged within a perimeter of the lower surface of the printed circuit board, wherein the second plurality of metal pads are configured to mechanically attach and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and

one or more electrical pathways formed completely within the printed circuit board, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the printed circuit board to one or more of the second plurality of metal pads on the lower surface of the printed circuit board;

a MEMS microphone die mounted to the upper surface of the printed circuit board and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the printed circuit board; and

a single-piece cover that has a top region with an acoustic port that passes completely through the cover, and a sidewall region, the sidewall region adjoining the top region at a substantially perpendicular angle and having a predetermined height, an exterior surface, an interior surface, and a bottom surface,

wherein the bottom surface of the sidewall region is aligned with and mechanically attached to the peripheral region of the upper surface of the printed circuit board, thereby forming a protective enclosure for the MEMS microphone die that reduces electromagnetic interference, and

wherein the predetermined height and interior surface of the sidewall region, in cooperation with the interior surface of the top region, defines an acoustic chamber for the MEMS microphone die;

wherein the cover has a first length and a first width, and the printed circuit board has a second length and a second width; and

wherein the first length of the cover and second length of the printed circuit board are substantially equal, and the first width of the cover and second width of the printed circuit board are substantially equal.

10. A surface mount MEMS microphone device according to claim 9, wherein the one or more electrical pathways are plated through-holes electrically coupling one or more of the first plurality of metal pads to one or more of the second plurality of metal pads.

11. A surface mount MEMS microphone device according to claim 9, further comprising a metal pad formed on the upper surface of the printed circuit board, wherein the MEMS microphone die is mounted to the metal pad.

12. A surface mount MEMS microphone device according to claim 9, wherein the printed circuit board comprises FR-4 material.

13. A surface mount MEMS microphone device according to claim 9, further comprising at least one passive electrical device formed within the printed circuit board.

14. A surface mount MEMS microphone device according to claim 9, wherein the enclosure protects the MEMS microphone die from at least one of light and physical damage.

15. A surface mount MEMS microphone device according to claim 9, wherein the enclosure further comprises acoustic material that substantially blocks environmental contaminants from entering the acoustic chamber through the acoustic port.

16. A surface mount MEMS microphone device according to claim 9, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume in the acoustic chamber, and the acoustic port formed in the cover is acoustically coupled to the front volume.

17. A surface mount microelectromechanical system (MEMS) microphone device comprising:

a substrate comprising multiple layers of non-conductive material and having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the substrate further comprising;

a first plurality of metal pads formed on the upper surface of the substrate;

a second plurality of metal pads formed on the lower surface of the substrate and arranged within a perimeter of the lower surface of the substrate, wherein the second plurality of metal pads are configured to mechanically couple and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and

one or more electrical pathways formed completely within the substrate, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the substrate to one or more of the second plurality of metal pads on the lower surface of the substrate;

a MEMS microphone die physically coupled to the upper surface of the substrate and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the substrate; and

a single-piece cover that has a top region with an acoustic port that passes completely through the cover, and a sidewall region, the sidewall region adjoining the top region at a substantially perpendicular angle and having a predetermined height, an exterior surface, an interior surface, and a bottom surface,

wherein the bottom surface of the sidewall region is aligned with and physically coupled to the peripheral region of the upper surface of the substrate, thereby forming a protective enclosure for the MEMS microphone die that reduces electromagnetic interference, and

wherein the interior of the protective enclosure is an acoustic chamber having a volume defined by the predetermined height of sidewall region, and the width and length of the top region of the cover.

18. A surface mount MEMS microphone device according to claim 17, wherein the one or more electrical pathways are plated through-holes electrically coupling one or more of the first plurality of metal pads to one or more of the second plurality of metal pads.

19. A surface mount MEMS microphone device according to claim 17, further comprising a metal pad formed on the upper surface of the substrate, wherein the MEMS microphone die is physically coupled to the metal pad.

20. A surface mount MEMS microphone device according to claim 17, wherein the substrate comprises FR-4 material.

21. A surface mount MEMS microphone device according to claim 17, further comprising at least one passive electrical device formed within the substrate.

22. A surface mount MEMS microphone device according to claim 17, wherein the enclosure protects the MEMS microphone die from at least one of light and physical damage.

23. A surface mount MEMS microphone device according to claim 17, wherein the enclosure further comprises acoustic material that substantially blocks environmental contaminants from entering the acoustic chamber through the acoustic port.

24. A surface mount MEMS microphone device according to claim 17, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume in the acoustic chamber, and the acoustic port formed in the cover is acoustically coupled to the front volume.

25. A surface mount MEMS microphone device according to claim 17, wherein the enclosure protects the MEMS microphone die from at least one of light and physical damage.

26. A surface mount MEMS microphone device according to claim 17, wherein the enclosure further comprises acoustic material that substantially blocks environmental contaminants from entering the acoustic chamber through the acoustic port.

27. A surface mount MEMS microphone device according to claim 17, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume in the acoustic chamber, and the port formed in the cover is acoustically coupled to the front volume.

28. A surface mount microelectromechanical system (MEMS) microphone device comprising:

a printed circuit board having a multi-layer core of conductive and non-conductive materials, wherein the printed circuit board has a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the printed circuit board further comprising;

a first metal layer formed on the upper surface of the printed circuit board and patterned into a first plurality of metal pads, wherein at least one pad of the first plurality of metal pads is formed in the peripheral region of the upper surface of the printed circuit board;

a second metal layer formed on the lower surface of the printed circuit board and patterned into a second plurality of metal pads, the second plurality of metal pads arranged within a perimeter of the lower surface of the printed circuit board, wherein the second plurality of metal pads are configured to mechanically couple and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and

one or more electrical pathways formed completely within the printed circuit board, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the printed circuit board to one or more of the second plurality of metal pads on the lower surface of the printed circuit board;

a MEMS microphone die physically coupled to the upper surface of the multi-layer printed circuit board and electrically coupled to at least one of the first plurality of patterned metal pads; and

a single-piece cover that has a top region with an acoustic port that passes completely through the cover, and a sidewall region, the sidewall region adjoining the top region at a substantially perpendicular angle and having a predetermined height, an exterior sidewall surface, an interior sidewall surface, and a bottom surface,

wherein the bottom surface of the sidewall region is aligned with and physically coupled to the peripheral region of the upper surface of the printed circuit board, thereby forming a protective enclosure for the MEMS microphone die that reduces electromagnetic interference, and

wherein the interior of the protective enclosure is an acoustic chamber having a volume defined by the predetermined height of sidewall region, and the width and length of the top region of the cover.

29. A surface mount MEMS microphone device according to claim 28, further comprising a metal pad formed on the upper surface of the printed circuit board, wherein the MEMS microphone die is physically coupled to the metal pad.

30. A surface mount MEMS microphone device according to claim 28, further comprising at least one passive electrical device formed within the printed circuit board.