Laminated walls for uniform fluid flow

• US 8,707,971 B2
• Filed: 05/16/2008
• Issued: 04/29/2014
• Est. Priority Date: 05/16/2008
• Status: Expired due to Fees

• Current Assignee: Xyratex Corp (Seagate Technology Holdings Plc)
• Original Assignee: Xyratex Corp (Seagate Technology Holdings Plc)
• Inventors: Miller, Kenneth C., Wallis, Mike
• Primary Examiner(s): Perrin, Joseph L
• Assistant Examiner(s): Lee, Kevin G
• Application Number:
  US12/122,571
• Publication Number:
  US 20090283158A1
• Time in Patent Office: 2,174 Days
• Field of Search: 134/111, 134/186, 134/198, 134/100.1, 239/553, 239/590, 137/561.A, 156/345.11, 156/345.33, 422601-603, 422606-607, 422/220
• US Class Current: 134/100.1
• CPC Class Codes: B05D 3/0272 with ovens
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: Y10T 137/85938 Non-valved flow dividers

Abstract

A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.

Claims

1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:

a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels partially extending into the first surface of the first chamber wall, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and

a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially extending into the second surface of the second chamber wall, the second set of channels partially intersecting the first set of channels, the exterior surface including at least one exterior port providing access to the second set of channels, wherein the first surface and the second surface contact each other along regions external to the first set of channels and the second set of channels, each channel of the first set of channels is horizontally oriented in multiple rows and spaced apart from each other, each channel of the second set of channels is vertically oriented in multiple rows and spaced apart from each other, wherein at least one of the vertically oriented channels partially intersects with multiple horizontally oriented channels, and wherein the uniform fluid flow within the chamber is non-horizontal.

2. The fluid distribution network as described in claim 1, wherein a width of each of the first set of channels along successive rows decreases.

3. The fluid distribution network as described in claim 1, wherein a width of each of the second set of channels along successive rows decreases.

4. The fluid distribution network as described in claim 1, wherein a cross-sectional area of the plurality of interior ports is substantially the same as a cross-sectional area of the exterior port.

5. The fluid distribution network as described in claim 3, wherein a cross-sectional area of a row of vertical channels and a cross-sectional area of a row of horizontal channels is equivalent.

6. The fluid distribution network as described in claim 1, wherein a first exterior port is configured to introduce fluid to the interior of the chamber through a first plurality of interior ports and a second exterior port is configured to remove fluid from the interior of the chamber through a second plurality of interior ports.

7. The fluid distribution network as described in claim 1, wherein fluid from the exterior port is distributed between the first and second chamber walls through the first and second set of channels and distributed within the interior of the chamber through the interior ports.

8. The fluid distribution network as described in claim 1, wherein fluid is removed from the interior by drawing fluid from the interior of the chamber via the interior ports, between the first and second chamber walls through the first and second set of channels and through the exterior port.

9. The fluid distribution network as described in claim 1, further comprising:

a third chamber wall and a fourth chamber wall configured to mirror the first and second chamber walls across the chamber, the third chamber wall and fourth chamber wall disposed opposite the first and second chamber walls, the third chamber wall having a second plurality of interior ports and channels and the fourth chamber wall having a second plurality of channels and an exterior port.

10. The fluid distribution network as described in claim 9, wherein the second plurality of interior ports is diagonally opposed to the plurality of interior ports.

15. The fluid distribution network as described in claim 1, wherein the regions external to the first set of channels and the second set of channels of the first surface and the second surface are laminated to each other.

11. A fluid distribution chamber, comprising:

a base having sidewalls extending therefrom, wherein one of the sidewalls includes a first member and a second member affixed to each other, the first member having an inner surface mating with an outer surface of the second member, the inner surface of the first member having a plurality of cavities partially extending into the inner surface of the first member, the plurality of cavities defined in a first pattern of spaced apart rows, the outer surface having a plurality of cavities partially extending into the outer surface of the second member defined in a second pattern of spaced apart rows, wherein a cavity of the first pattern partially intersects with multiple cavities in the second pattern, and wherein the inner surface of the first member and the outer surface of the second member contact each other along regions external to the plurality of cavities, and wherein each cavity of the plurality of cavities of the first pattern is horizontally oriented, each cavity of the plurality of cavities of the second pattern is vertically oriented, and wherein the uniform fluid flow within the chamber is non-horizontal.

12. The fluid distribution chamber as described in claim 11, wherein a sum of cross-sectional areas of the plurality of cavities defined in the first pattern is substantially constant to a sum of cross-sectional areas of the plurality of cavities defined in the second pattern.

13. The fluid distribution chamber as described in claim 11, wherein the cavities of the first pattern of spaced apart rows have an axis of extension that is orthogonal to an axis of extension of the cavities of the second pattern of spaced apart rows.

14. The fluid distribution chamber as described in claim 11 further comprising additional ports, the ports being configured to accommodate accessories.

16. The fluid distribution chamber as described in claim 11 wherein the regions external to the plurality of cavities of the inner surface and the outer surface are laminated to each other.