Laminated walls for uniform fluid flow
First Claim
1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:
- a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels partially extending into the first surface of the first chamber wall, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and
a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially extending into the second surface of the second chamber wall, the second set of channels partially intersecting the first set of channels, the exterior surface including at least one exterior port providing access to the second set of channels, wherein the first surface and the second surface contact each other along regions external to the first set of channels and the second set of channels, each channel of the first set of channels is horizontally oriented in multiple rows and spaced apart from each other, each channel of the second set of channels is vertically oriented in multiple rows and spaced apart from each other, wherein at least one of the vertically oriented channels partially intersects with multiple horizontally oriented channels, and wherein the uniform fluid flow within the chamber is non-horizontal.
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Accused Products
Abstract
A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.
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Citations
16 Claims
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1. A chamber including a fluid distribution network for uniform fluid flow within the chamber, comprising:
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a first chamber wall having a first surface and an opposing interior surface, the first surface formed with a first set of channels partially extending into the first surface of the first chamber wall, the interior surface exposed to the interior of the chamber and including a plurality of interior ports connected to a plurality of the first set of channels; and a second chamber wall having a second surface and an opposing exterior surface, the second surface having a second set of channels, the second set of channels partially extending into the second surface of the second chamber wall, the second set of channels partially intersecting the first set of channels, the exterior surface including at least one exterior port providing access to the second set of channels, wherein the first surface and the second surface contact each other along regions external to the first set of channels and the second set of channels, each channel of the first set of channels is horizontally oriented in multiple rows and spaced apart from each other, each channel of the second set of channels is vertically oriented in multiple rows and spaced apart from each other, wherein at least one of the vertically oriented channels partially intersects with multiple horizontally oriented channels, and wherein the uniform fluid flow within the chamber is non-horizontal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 15)
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11. A fluid distribution chamber, comprising:
a base having sidewalls extending therefrom, wherein one of the sidewalls includes a first member and a second member affixed to each other, the first member having an inner surface mating with an outer surface of the second member, the inner surface of the first member having a plurality of cavities partially extending into the inner surface of the first member, the plurality of cavities defined in a first pattern of spaced apart rows, the outer surface having a plurality of cavities partially extending into the outer surface of the second member defined in a second pattern of spaced apart rows, wherein a cavity of the first pattern partially intersects with multiple cavities in the second pattern, and wherein the inner surface of the first member and the outer surface of the second member contact each other along regions external to the plurality of cavities, and wherein each cavity of the plurality of cavities of the first pattern is horizontally oriented, each cavity of the plurality of cavities of the second pattern is vertically oriented, and wherein the uniform fluid flow within the chamber is non-horizontal. - View Dependent Claims (12, 13, 14, 16)
Specification