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Radio frequency power delivery system

  • US 8,710,926 B2
  • Filed: 02/08/2012
  • Issued: 04/29/2014
  • Est. Priority Date: 10/31/2005
  • Status: Active Grant
First Claim
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1. A hybrid system for delivering power to a load, comprising;

  • a power converter system that delivers RF power to a load;

    an outer loop coupled to the power converter system for compensating for nonlinearities in the power converter system, wherein the outer loop receives the delivered RF power as an input; and

    an inner loop coupled to the power converter system to provide a gain-bandwidth and a phase margin for substantially maintaining the stability of the delivered RF power, wherein the inner loop receives an analog current set point output from the outer loop as an input.

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