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Moving structure and micro-mirror device using the same

  • US 8,711,460 B2
  • Filed: 06/24/2009
  • Issued: 04/29/2014
  • Est. Priority Date: 06/25/2008
  • Status: Active Grant
First Claim
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1. A moving structure, comprising:

  • a moving plate;

    beam shaped hinge units which pivot the moving plate swingably; and

    a frame unit which supports the hinge units, whereineach of the hinge units has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods,the twin supporting rods which are bridged by the crosspieces are not disposed in parallel with each other in a planar view, andan outer side and an inner side of each of the twin supporting rods are parallel with each other.

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