Defect detection system and method
First Claim
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1. A defect detection method for detecting a crystalline silicon product, comprising the steps of:
- (a) enabling, in a non-contact manner, the crystalline silicon product to generate micro-vibration, so as to generate an excitation signal;
(b) acquiring the excitation signal generated from the crystalline silicon product by using an acquisition device; and
(c) performing a time-frequency analysis with respect to the acquired excitation signal, so as to generate an analysis result,wherein step (a) enables the crystalline silicon product to generate more than once micro-vibrations with different directions in a predetermined time by changing direction of the crystalline silicon product, so as to enable the crystalline silicon product to generate the excitation signal in the predetermined time, and step (a) enables the crystalline silicon product to generate the more than once micro-vibrations at a side surface thereof.
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Abstract
A defect detection system and method enable a fastened crystalline silicon product to generate micro-vibration by a micro-vibration excitation device, so as to enable the crystalline silicon product to generate an excitation signal, then to acquire the excitation signal by a acquisition device, so as to analyze the excitation signal acquired by the acquisition device in the time and frequency domain by an analysis detection device with a specific analysis, and to obtain an analysis result, at last, determine a defect state of the crystalline silicon product according to the analysis result.
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18 Claims
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1. A defect detection method for detecting a crystalline silicon product, comprising the steps of:
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(a) enabling, in a non-contact manner, the crystalline silicon product to generate micro-vibration, so as to generate an excitation signal; (b) acquiring the excitation signal generated from the crystalline silicon product by using an acquisition device; and (c) performing a time-frequency analysis with respect to the acquired excitation signal, so as to generate an analysis result, wherein step (a) enables the crystalline silicon product to generate more than once micro-vibrations with different directions in a predetermined time by changing direction of the crystalline silicon product, so as to enable the crystalline silicon product to generate the excitation signal in the predetermined time, and step (a) enables the crystalline silicon product to generate the more than once micro-vibrations at a side surface thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A defect detection system for detecting a crystalline silicon product, comprising:
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a fastening device for fastening the crystalline silicon product; a micro-vibration excitation device for enabling, in a non-contact manner, the fastened crystalline silicon product to generate micro-vibration, so as to enable the crystalline silicon product to generate an excitation signal; an acquisition device for acquiring the excitation signal; an analysis detection device for performing a time-frequency analysis with respect to the acquired excitation signal by a specific analysis, so as to generate an analysis result; and a steering device for performing direction change with respect to the micro-vibration excitation device, wherein the micro-vibration excitation device enables the fastened crystalline silicon product to generate more than once micro-vibrations with different directions by changing direction of the crystalline silicon product using the steering device in a predetermined time, so as to generate the excitation signal, wherein the micro-vibration excitation device enables the fastened crystalline silicon product to generate the more than once micro-vibrations at a side surface thereof. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification