Microelectronic workpiece processing systems and associated methods of color correction

• US 8,716,038 B2
• Filed: 03/02/2010
• Issued: 05/06/2014
• Est. Priority Date: 03/02/2010
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Tetz, Kevin, Watkins, Charles M.
• Primary Examiner(s): Rizkallah, Kimberly
• Assistant Examiner(s): Ligai, Maria
• Application Number:
  US12/715,820
• Publication Number:
  US 20110217794A1
• Time in Patent Office: 1,526 Days
• Field of Search: 438/14, 438/16, 257/E21.521, 257/E21.525, 257/E21.527, 257/E21.529, 257/E21.53, 257/E21.531
• US Class Current: 438/16
• CPC Class Codes: B05C 11/00 Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00 means for manipulating or holding work B05C13/00; enclosures for apparatus, booths B05C15/00; spray booths B05B16/00
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 33/005 Processes
• CPC Class Codes: H01L 33/504 Elements with two or more wavelength conversion materials

Abstract

Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing.

Claims

1. A method for producing a light emitting diode (LED), comprising:

forming an LED on a substrate;

measuring a base emission characteristic of the formed LED;

developing a compensation scheme by selecting a group of candidate phosphors based on the base emission characteristic of the formed LED, wherein the group of the candidate phosphors is selected based on a distribution area in chromaticity plot;

selecting a plurality of phosphors, from the group of the candidate phosphors, based on the measured base emission characteristic of the formed LED such that a combined emission from the LED is closer to white light than the base emission characteristic; and

introducing the selected phosphors onto the LED.

2. The method of claim 1 wherein:

forming the LED on the substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring the base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity;

selecting the plurality of phosphors includes;

plotting the measured emission wavelength on a spectral locus of the chromaticity plot;

determining an emission point on a black body curve defined by the following;

3. The method of claim 1 wherein:

forming the LED on the substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring the base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity;

selecting the plurality of phosphors includes;

plotting the measured emission point of the LED on a spectral locus of the chromaticity plot;

determining an emission point on a black body curve defined by the following;

4. The method of claim 1 wherein:

forming the LED on the substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring the base emission characteristic of the formed LED includes measuring at least one of an emission wavelength, an emission intensity, and an emission frequency;

selecting the plurality of phosphors includes selecting at least one of a composition, a concentration, and a quantity of the phosphors containing Cerium(III)-doped Yttrium Aluminum Garnet based on the measured emission characteristic of the formed LED and an operating temperature of the LED; and

introducing the selected phosphors includes introducing the selected phosphors onto the LED via inkjet printing.

5. The method of claim 1 wherein:

measuring the base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity; and

selecting the plurality of phosphors includes empirically determining a ratio of at least two phosphors based on the combinations of the candidate phosphors stored in a database and the measured emission characteristic of the formed LED such that a combined emission from the LED and the phosphors at least approximates a white light.

6. The method of claim 1 wherein:

measuring the base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity; and

selecting the plurality of phosphors includes selecting a combination of at least two phosphors from the combinations of the candidate phosphors stored in a database based on the measured emission characteristic of the formed LED such that a combined emission from the LED and the phosphors at least approximates a white light.

7. The method of claim 1 wherein:

the LED is one of a plurality of LEDs on the substrate; and

the method further includes for each of the LEDs;

measuring the base emission characteristic of the LED on the substrate;

selecting the plurality of phosphors based on the measured emission characteristic of the LED such that a combined emission from the LED and the phosphors at least approximates a white light; and

introducing the selected phosphors onto the LED.

8. The method of claim 1 wherein:

the LED is one of a plurality of LEDs on the substrate;

the method further includes for each of the LEDs;

measuring the base emission characteristic of the LED on the substrate;

selecting the plurality of phosphors based on the measured emission characteristic of the LED such that a combined emission from the LED and the phosphors at least approximates a white light; and

introducing the selected phosphors onto the LED;

inspecting emission characteristics of the plurality of LEDs with the introduced phosphors; and

repeating the measuring, selecting, and introducing operations until a variance in the emission characteristics of the plurality of LEDs is below a threshold.

9. A method of color correction of light emitting diodes (LEDs), comprising:

measuring a base emission characteristic of individual LEDs on a substrate;

developing an emission map of the LEDs on the substrate based on the measured base emission characteristics;

developing a compensation scheme by selecting a group of candidate phosphors based on the measured base emission characteristic, wherein the group of the candidate converter materials is selected at least based on a distribution area in a chromaticity plot;

selecting a plurality of converter materials from the group of the candidate converter materials based on the measured base emission characteristic;

for the individual LEDs, determining at least one of a composition and a concentration of the converter materials based on the emission map of the LEDs; and

introducing the selected converter materials onto the individual LEDs on the substrate.

10. The method of claim 9 wherein determining at least one of the composition and the concentration of the converter materials includes determining at least one of the composition and the concentration of the plurality of phosphors such that a combined emission from the individual LEDs and the phosphors at least approximates a white light.

11. The method of claim 9 wherein measuring the base emission characteristic of individual LEDs on the substrate includes measuring an emission wavelength of each of the LEDs on the substrate.

12. The method of claim 9 wherein measuring the base emission characteristic of individual LEDs on the substrate includes measuring an emission wavelength of the LEDs on the substrate.

13. The method of claim 9 wherein developing the emission map includes organizing the measured emission characteristic of the individual LEDs as individual records in accordance with the corresponding combinations of the candidate converter materials in the database.

14. The method of claim 9 wherein determining at least one of the composition and the concentration of the converter materials includes determining a ratio of a first phosphor and a second phosphor.

15. The method of claim 9 wherein determining at least one of the composition and the concentration of the converter materials includes looking up the database based on the emission map, the set of empirical information of the database containing empirical records indicating at least one of the composition and the concentration of the phosphors based on the corresponding emission characteristic in the emission map.

16. The method of claim 9 wherein:

measuring the base emission characteristic of individual LEDs includes measuring an emission wavelength of the individual LEDs with a peak intensity; and

determining at least one of the composition and the concentration of the converter material includes looking up a recipe database based on the emission wavelength with the peak intensity for the individual LEDs, the database containing records indicating at least one of the composition and the concentration of the phosphors based on the corresponding emission wavelength of the individual LEDs.

17. The method of claim 9 wherein:

measuring the base emission characteristic of individual LEDs includes measuring an emission wavelength of the individual LEDs with a peak intensity; and

determining at least one of the composition and the concentration of the converter materials includes looking up a recipe database based on the emission wavelength with the peak intensity for the individual LEDs, the database containing records indicating (1) at least one of a composition and a concentration of first and second phosphors based on the corresponding emission wavelength of the individual LEDs; and

(2) a ratio of the first and second phosphors.