Anti-reflection structures for CMOS image sensors
First Claim
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1. A semiconductor structure comprising:
- a photodiode located in a semiconductor layer;
a transistor located on said semiconductor layer, wherein a source of said transistor is of integral construction with said photodiode; and
a dielectric layer located overlying said photodiode, laterally surrounding and overlying a gate electrode of said transistor, and comprising a protuberance-containing dielectric portion which overlies said photodiode and includes an array of protuberances, wherein a pitch of said array of protuberances is less than 270 nm.
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Abstract
Optical structures having an array of protuberances between two layers having different refractive indices are provided. The array of protuberances has vertical and lateral dimensions less than the wavelength range of lights detectable by a photodiode of a CMOS image sensor. The array of protuberances provides high transmission of light with little reflection. The array of protuberances may be provided over a photodiode, in a back-end-of-line interconnect structure, over a lens for a photodiode, on a backside of a photodiode, or on a window of a chip package.
108 Citations
17 Claims
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1. A semiconductor structure comprising:
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a photodiode located in a semiconductor layer; a transistor located on said semiconductor layer, wherein a source of said transistor is of integral construction with said photodiode; and a dielectric layer located overlying said photodiode, laterally surrounding and overlying a gate electrode of said transistor, and comprising a protuberance-containing dielectric portion which overlies said photodiode and includes an array of protuberances, wherein a pitch of said array of protuberances is less than 270 nm. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor structure comprising:
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a photodiode located in a semiconductor layer; a transistor located on said semiconductor layer, wherein a source of said transistor is of integral construction with said photodiode; and a dielectric layer located overlaying said photodiode, laterally surrounding and overlying a gate electrode of said transistor, and comprising a protuberance-containing dielectric portion which overlies said photodiode and includes an array of protuberances, wherein said dielectric layer further comprises a flat dielectric portion located over said gate electrode and a drain region of said transistor and having a same composition as said protuberance-containing dielectric portion, and wherein said flat dielectric portion has a first thickness, and wherein each of said protuberances has a height from a base to an apex, and wherein said protuberance-containing dielectric portion comprises a constant thickness portion abutting each base of said protuberances and having a second thickness, wherein said first thickness is substantially equal to a sum of said second thickness and said height. - View Dependent Claims (7, 8, 9, 10)
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11. A semiconductor structure comprising:
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a photodiode located in a semiconductor layer; a dielectric material layer containing a lens and located over said photodiode, wherein said lens is located in an optical path of said photodiode; and a protuberance-containing dielectric portion located directly on said dielectric material layer, wherein said protuberance-containing dielectric portion comprises an array of protuberances. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification