Controlling defects in thin wafer handling

• US 8,722,540 B2
• Filed: 07/22/2010
• Issued: 05/13/2014
• Est. Priority Date: 07/22/2010
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Lin, Yu-Liang, Wu, Weng-Jin, Lin, Jing-Cheng
• Primary Examiner(s): Deo, Duy
• Assistant Examiner(s): BERGNER, ERIN FLANAGAN
• Application Number:
  US12/841,874
• Publication Number:
  US 20120021604A1
• Time in Patent Office: 1,391 Days
• Field of Search: 134/140, 156/85, 257/737, 428/354, 428/107, 428/108, 428/113, 428/458, 428/460, 428/692, 445/24
• US Class Current: 438/692
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2221/68327 used during dicing or grinding
• CPC Class Codes: H01L 2221/6834 used to protect an active side of a device or wafer

Abstract

A method includes bonding a wafer on a carrier through an adhesive, and performing a thinning process on the wafer. After the step of performing the thinning process, a portion of the adhesive not covered by the wafer is removed, while the portion of the adhesive covered by the wafer is not removed.

Claims

1. A method comprising:

bonding a wafer on a carrier through an adhesive;

after the step of bonding the wafer, performing a thinning process on the wafer; and

after the step of performing the thinning process, removing a portion of the adhesive not covered by the wafer, wherein a portion of the adhesive covered by the wafer is not removed, wherein any plasma processes performed after the step of performing the thinning process is also performed after the removing the portion of the adhesive, and wherein the removing the portion of the adhesive comprises rotating the wafer.

2. The method of claim 1, wherein the step of removing the portion of the adhesive comprising spraying a chemical to the portion of the adhesive not covered by the wafer, and wherein the chemical is configured to dissolve the adhesive.

3. The method of claim 2 further comprising, at a time the step of spraying the chemical is performed, simultaneously rotating the wafer, wherein a nozzle for spraying the chemical is at a fixed position.

4. The method of claim 2, wherein the chemical is selected from the group consisting essentially of a solvent, alcohol, a thinner, and combinations thereof.

5. The method of claim 1 further comprising, after the step of removing the portion of the adhesive, performing a process step to the wafer, with plasma used in the process step, wherein the wafer is bonded to the carrier through the adhesive during the process step, and wherein the process step is selected from the group consisting essentially of a deposition and a dry etch.

6. The method of claim 1, wherein at a time the step of removing the portion of the adhesive is started, the adhesive comprises a top surface level with a top surface of the wafer, and wherein after the step of removing the portion of the adhesive, the top surface of the adhesive is at least reduced in size.

7. The method of claim 6, wherein after the step of removing the portion of the adhesive, the top surface of the adhesive is substantially eliminated.

8. The method of claim 1, wherein after the step of removing the portion of the adhesive, a remaining portion of the adhesive comprises a slanted sidewall having a tilt angle between about 40 degrees and about 80 degrees, with the tilt angle being measured as between the slanted sidewall and a line perpendicular to a major surface of the carrier.

9. The method of claim 1, wherein after the step of removing the portion of the adhesive, no undercut is formed in the adhesive and extending directly under the wafer.

10. A method comprising:

bonding a wafer on a carrier, with the wafer and the carrier being bonded on opposite sides of an adhesive;

after the step of bonding the wafer, performing a thinning process to the wafer; and

after the step of performing the thinning and prior to any plasma processes performed after the step of performing the thinning, dissolving portions of the adhesive not covered by the wafer by;

rotating the wafer; and

at a time the wafer is rotated, spraying a chemical to the portions of the adhesive not covered by the wafer, wherein the chemical is configured to dissolve the adhesive, and wherein a portion of the adhesive covered by the wafer is not removed during the step of spraying the chemical.

11. The method of claim 10, wherein during the step of performing the thinning process, a portion of the adhesive is removed, with a remaining portion of the adhesive having a flat top surface level with a top surface of a remaining portion of the wafer, and wherein during the step of spraying the chemical, the flat top surface of the adhesive is substantially removed.

12. The method of claim 10, wherein after the step of spraying the chemical, a remaining portion of the adhesive comprises a slanted sidewall having a tilt angle between about 40 degrees and about 80 degrees, with the tilt angle being between the slanted sidewall and a line perpendicular to a major surface of the carrier.

13. The method of claim 10, wherein after the step of spraying the chemical, no undercut is formed in the adhesive and extending directly under the wafer.

14. The method of claim 10, wherein the chemical is selected from the group consisting essentially of a solvent, alcohol, a thinner, and combinations thereof.

15. A method comprising:

bonding a wafer on a carrier through an adhesive;

after the step of bonding the wafer, performing a thinning process to the wafer, wherein during the step of performing the thinning process, a portion of the adhesive is removed, with a remaining portion of the adhesive having a top surface level with a top surface of the wafer;

after the step of performing the thinning and prior to any plasma processes performed after the step of performing the thinning, removing portions of the adhesive not covered by the wafer by;

rotating the wafer;

pointing a nozzle to the top surface of the adhesive; and

at a time the wafer is rotated, spraying a chemical using the nozzle to the top surface of the adhesive to remove the portions of the adhesive not covered by the wafer, wherein a portion of the adhesive covered by the wafer is not removed; and

after the step of spraying the chemical, performing a process step to the wafer, with plasma used in the process step, wherein the wafer is bonded to the carrier through the adhesive during the process step.

16. The method of claim 15, wherein during the step of spraying the chemical, the nozzle for spraying the chemical is at a fixed position with a fixed tilt angle.

17. The method of claim 16, wherein the fixed tilt angle is between about 15 degrees and about 70 degrees.

18. The method of claim 17, wherein after the step of spraying the chemical, a remaining portion of the adhesive not removed during the step of spraying the chemical comprises a sidewall having a tilt angle between about 40 degrees and about 80 degrees.

19. The method of claim 17, wherein after the step of spraying the chemical, no undercut is formed in the adhesive and extending directly under the wafer.