Thin film transistor panel having an etch stopper on semiconductor
First Claim
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1. A panel comprising a thin film transistor, the panel comprising:
- a substrate;
a first electrode on the substrate;
a first insulating layer on the first electrode;
an oxide semiconductor pattern on the first insulating layer, the oxide semiconductor pattern comprising a channel region;
an etch stopper on the oxide semiconductor pattern; and
a conductive layer on the substrate, the conductive layer comprising a signal line, a second electrode, and a third electrode,wherein the second electrode and the third electrode are disposed on the etch stopper and directly on the oxide semiconductor pattern,wherein except for the channel region of the oxide semiconductor pattern, sidewalls of the oxide semiconductor pattern substantially coincide with sidewalls of the signal line, the second electrode, and the third electrode, andwherein a work function of the second electrode and the third electrode is lower than a work function of the oxide semiconductor pattern.
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Abstract
A thin film transistor panel includes an insulating substrate, a gate insulating layer disposed on the insulating substrate, an oxide semiconductor layer disposed on the gate insulating layer, an etch stopper disposed on the oxide semiconductor layer, and a source electrode and a drain electrode disposed on the etch stopper.
14 Citations
12 Claims
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1. A panel comprising a thin film transistor, the panel comprising:
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a substrate; a first electrode on the substrate; a first insulating layer on the first electrode; an oxide semiconductor pattern on the first insulating layer, the oxide semiconductor pattern comprising a channel region; an etch stopper on the oxide semiconductor pattern; and a conductive layer on the substrate, the conductive layer comprising a signal line, a second electrode, and a third electrode, wherein the second electrode and the third electrode are disposed on the etch stopper and directly on the oxide semiconductor pattern, wherein except for the channel region of the oxide semiconductor pattern, sidewalls of the oxide semiconductor pattern substantially coincide with sidewalls of the signal line, the second electrode, and the third electrode, and wherein a work function of the second electrode and the third electrode is lower than a work function of the oxide semiconductor pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification