Semiconductor radio frequency switch with body contact
First Claim
1. A semiconductor die comprising:
- an insulating layer;
a thin-film semiconductor device layer over the insulating layer;
a first body-contacted radio frequency (RF) switch having one of an ON state and an OFF state, and a non-operating state and comprising a first plurality of body-contacted field effect transistor (FET) elements coupled in series, such that each body-contacted FET element comprises a source, a drain, and a body formed in at least a part of the thin-film semiconductor device layer, wherein each one of the first plurality of body-contacted FET elements are separated from one another in the thin-film semiconductor device layer by an insulating material; and
control circuitry coupled to each one of the first plurality of body-contacted FET elements, wherein during the OFF state of the first body-contacted RF switch, the control circuitry provides each body a body bias signal, such that each body and each corresponding source are reverse biased and each body and each corresponding drain are reverse biased to provide reverse body biasing of each corresponding body-contacted FET element.
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Accused Products
Abstract
The present disclosure relates to a radio frequency (RF) switch that includes multiple body-contacted field effect transistor (FET) elements coupled in series. The FET elements may be formed using a thin-film semiconductor device layer, which is part of a thin-film semiconductor die. Conduction paths between the FET elements through the thin-film semiconductor device layer and through a substrate of the thin-film semiconductor die may be substantially eliminated by using insulating materials. Elimination of the conduction paths allows an RF signal across the RF switch to be divided across the series coupled FET elements, such that each FET element is subjected to only a portion of the RF signal. Further, each FET element is body-contacted and may receive reverse body biasing when the RF switch is in an OFF state, thereby reducing an OFF state drain-to-source capacitance of each FET element.
314 Citations
25 Claims
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1. A semiconductor die comprising:
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an insulating layer; a thin-film semiconductor device layer over the insulating layer; a first body-contacted radio frequency (RF) switch having one of an ON state and an OFF state, and a non-operating state and comprising a first plurality of body-contacted field effect transistor (FET) elements coupled in series, such that each body-contacted FET element comprises a source, a drain, and a body formed in at least a part of the thin-film semiconductor device layer, wherein each one of the first plurality of body-contacted FET elements are separated from one another in the thin-film semiconductor device layer by an insulating material; and control circuitry coupled to each one of the first plurality of body-contacted FET elements, wherein during the OFF state of the first body-contacted RF switch, the control circuitry provides each body a body bias signal, such that each body and each corresponding source are reverse biased and each body and each corresponding drain are reverse biased to provide reverse body biasing of each corresponding body-contacted FET element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification