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Tunable ultrasound transducers

  • US 8,723,399 B2
  • Filed: 12/27/2011
  • Issued: 05/13/2014
  • Est. Priority Date: 12/27/2011
  • Status: Expired due to Fees
First Claim
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1. A micromachined device comprising:

  • an ultrasonic transducer;

    a tunable structure coupled to the ultrasonic transducer, the ultrasonic transducer and the tunable structure forming a resonator having a resonant frequency; and

    a piezoelectric material within the tunable structure that changes shape according to an applied direct current, wherein the piezoelectric material is responsive to a change in the applied direct current to vary the resonant frequency of the resonator, and wherein the piezoelectric material forms an annular ring between an inside perimeter of a first substrate for the tunable structure and an outside perimeter of a second substrate for the ultrasonic transducer.

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