Device for homogenizing laser radiation
First Claim
1. A device for homogenizing laser radiation, the device comprising:
- a multiplicity of mirror elements disposed offset with respect to one another and on which the laser radiation to be homogenized can be reflected so that the laser radiation is divided into a multiplicity of sub-beams, corresponding to a number of said mirror elements, and each sub-beam have a path difference with respect to one another as a result of a reflection; and
a multiplicity of lens elements, one of said lens elements in each case assigned to one of said mirror elements so that one of the sub-beams can respectively pass through one of said lens elements, and that a distance between each of said mirror elements and said lens elements assigned thereto is equal to a focal length of said lens element in said multiplicity of lens element.
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Accused Products
Abstract
A device for homogenizing laser radiation contains a plurality of mirror elements which are arranged offset with respect to one another and at which the laser radiation to be homogenized can be reflected in such a way that it is split into a plurality of partial beams corresponding to the number of mirror elements. The partial beams have a path difference with respect to one another as a result of the reflection. The device further has a plurality of lens elements, each of which is respectively assigned to one of the mirror elements in such a way that a respective one of the partial beams can pass through one of the lens elements. A distance between each of the mirror elements and the lens elements assigned thereto is equal to the focal length of the respective lens element.
8 Citations
15 Claims
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1. A device for homogenizing laser radiation, the device comprising:
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a multiplicity of mirror elements disposed offset with respect to one another and on which the laser radiation to be homogenized can be reflected so that the laser radiation is divided into a multiplicity of sub-beams, corresponding to a number of said mirror elements, and each sub-beam have a path difference with respect to one another as a result of a reflection; and a multiplicity of lens elements, one of said lens elements in each case assigned to one of said mirror elements so that one of the sub-beams can respectively pass through one of said lens elements, and that a distance between each of said mirror elements and said lens elements assigned thereto is equal to a focal length of said lens element in said multiplicity of lens element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification