Mapping variations of a surface

• US 8,724,882 B2
• Filed: 07/22/2009
• Issued: 05/13/2014
• Est. Priority Date: 07/29/2008
• Status: Active Grant

• Current Assignee: Applied Materials Israel Limited (Applied Materials Incorporated)
• Original Assignee: Applied Materials Israel Limited (Applied Materials Incorporated)
• Inventors: Meshulach, Doron, Dolev, Ido
• Primary Examiner(s): Bali, Vikkram
• Assistant Examiner(s): CHEN, XUEMEI G
• Application Number:
  US13/056,627
• Publication Number:
  US 20110158502A1
• Time in Patent Office: 1,756 Days
• Field of Search: 355/67, 356/237.1, 356/237.2, 356/369, 356/445, 356/601, 356/625, 359/489, 369/112.16
• US Class Current: 382/145
• CPC Class Codes: G01N 2021/8825 Separate detection of dark field and bright field
• CPC Class Codes: G01N 2021/8848 Polarisation of light
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

A method for characterizing a surface, consisting of dividing the surface into pixels which are characterized by a parameter variation and defining blocks of the surface as respective groups of the pixels. The pixels are irradiated in multiple scans over the surface with radiation having different first polarization states. At least part of the radiation returning from the pixels is analyzed using second polarization states, to generate processed returning radiation. For each scan, block signatures of the blocks are constructed using the processed returning radiation from the group of pixels in each block. Also for each scan, a block signature variation is determined using the respective block signatures of the blocks, and, in response to the block signature variation, one of the first polarization states and at least one of the second polarization states are selected for use in subsequent examination of a test object.

Claims

1. A method comprising:

dividing a surface of a sample object into pixels which are characterized by a parameter variation;

defining blocks of the surface as respective groups of the pixels;

irradiating the pixels in multiple scans over the surface and applying differently oriented, respective first polarization states to an incident radiation;

receiving returning radiation from the pixels in response to each of the scans;

analyzing at least part of the returning radiation of the scans and applying respective second polarization states to said returning radiation to generate processed returning radiation from the returning radiation;

detecting the processed returning radiation;

for each of the scans, (i) constructing respective block signatures of the blocks in response to the processed returning radiation from the group of pixels in each block; and

(ii) determining a block signature variation using the respective block signatures of the blocks; and

in response to a correlation between the block signature variation and the parameter variation, selecting one of the first polarization states and at least one of the second polarization states for use in subsequent examination of a test object such that the combination of the at least two polarization states provides an optimal sensitivity of the block signature variation.

2. The method according to claim 1, wherein the returning radiation comprises a first portion and a second portion, and wherein analyzing the at least part of the returning radiation comprises analyzing only the first portion.

3. The method according to claim 2, wherein the second polarization states correspond to the first polarization states.

4. The method according to claim 2, wherein the second polarization states are different from the first polarization states.

5. The method according to claim 4, wherein the first polarization states comprise first linear polarizations, and wherein the second polarization states comprise second linear polarizations orthogonal to the first linear polarizations.

6. The method according to claim 2, wherein a first group of the second polarization states corresponds to the first polarization states and a second group of the second polarization states is different from the first polarization states.

7. The method according to claim 1, wherein the at least part of the returning radiation comprises all the returning radiation.

8. The method according to claim 7, wherein the second polarization states correspond to the first polarization states.

9. The method according to claim 7, wherein the second polarization states are different from the first polarization states.

10. The method according to claim 9, wherein the first polarization states comprise first linear polarizations, and wherein the second polarization states comprise second linear polarizations orthogonal to the first linear polarizations.

11. The method according to claim 7, wherein a first group of the second polarization states corresponds to the first polarization states and a second group of the second polarization states is different from the first polarization states.

12. The method according to claim 1, wherein constructing the respective block signatures comprises defining a block signature function of respective intensities of the returning radiation from the pixels in a given block, and evaluating the block signature function for the blocks.

13. A method comprising:

dividing a surface of a sample object into pixels which are characterized by a parameter variation;

defining blocks of the surface as respective groups of the pixels;

irradiating the pixels in multiple scans over the surface and applying differently oriented, respective first polarization states to an incident radiation;

receiving returning radiation from the pixels in response to each of the scans;

analyzing at least part of the returning radiation and applying respective second polarization states to said returning radiation to generate processed returning radiation from the returning radiation;

detecting the processed returning radiation;

constructing respective composite block signatures of the blocks in response to the processed returning radiation from the group of pixels in each block;

determining a composite block signature variation using the composite block signatures of the blocks; and

in response to a correlation between the composite block signature variation and the parameter variation, selecting two or more of the first polarization states and at least one of the second polarization states for use in subsequent examination of a test object.

14. The method according to claim 13, wherein constructing the respective composite block signatures comprises defining a composite block signature function of intensities of the returning radiation from at least two of the multiple scans and from the pixels in a given block, and evaluating the composite block signature function for the blocks.

15. An apparatus comprising:

a processor configured to;

divide a surface of a sample object into pixels which are characterized by a parameter variation, and

define blocks of the surface as respective groups of the pixels; and

a radiation scanner configured to;

irradiate the pixels in multiple scans over the surface with radiation having different, respective first polarization states,

receive returning radiation from the pixels in response to each of the scans,

analyze at least part of the returning radiation of the scans using respective second polarization states to generate processed returning radiation from the returning radiation, and

detect the processed returning radiation, and

wherein the processor is further configured to;

for each of the scans, (i) construct respective block signatures of the blocks in response to the processed returning radiation from the group of pixels in each block, and (ii) determine a block signature variation using the block signatures of the blocks, and

in response to a correlation between the block signature variation and the parameter variation, select one of the first polarization states and at least one of the second polarization states for use in subsequent examination of a test object.

16. An apparatus comprising:

a processor configured to;

divide a surface of a sample object into pixels which are characterized by a parameter variation, and

define blocks of the surface as respective groups of the pixels; and

a radiation scanner configured to;

irradiate the pixels in multiple scans over the surface with radiation having different, respective first polarization states,

receive returning radiation from the pixels in response to each of the scans,

analyze at least part of the returning radiation using respective second polarization states to generate processed returning radiation from the returning radiation, and

detect the processed returning radiation;

wherein the processor is further configured to;

construct respective composite block signatures of the blocks in response to the returning radiation from the group of pixels in each block,

determine a composite block signature variation using the composite block signatures of the blocks, and

in response to a correlation between the composite block signature variation and the parameter variation, select two or more of the first polarization states and at least one of the second polarization states for use in subsequent examination of a test object.

17. The apparatus according to claim 16, wherein the radiation scanner comprises at least one detector configured to receive the returning radiation from the pixels in response to each of the scans.

18. The apparatus according to claim 16, wherein the radiation scanner comprises at least one polarizing analyzer positioned in front of at least one detector and configured to apply one or more polarization states to the returning radiation.

19. A method comprising:

simulating a surface of a sample object as a simulated surface, and defining simulated characteristics of the simulated surface;

dividing the simulated surface into pixels which are characterized by a parameter variation;

defining blocks of the simulated surface as respective groups of the pixels;

simulating irradiation of the pixels in multiple scans over the simulated surface with radiation having different, respective first polarization states;

simulating receiving returning radiation from the pixels in response to each of the scans;

simulating analysis of at least part of the returning radiation from the scans using respective second polarization states to generate processed returning radiation from the returning radiation;

simulating detection of the processed returning radiation;

for each of the scans, (i) constructing respective block signatures of the blocks in response to the processed returning radiation from the group of pixels in each block; and

(ii) determining a block signature variation using the block signatures of the blocks; and

in response to a correlation between the block signature variation and the parameter variation, selecting one of the first polarization states and at least one of the second polarization states for use in subsequent physical examination of a test object.

20. The method according to claim 19, wherein determining the block signature variation comprises determining a highest block signature variation, and wherein selecting one of the first polarization states and at least one of the second polarization states comprises selecting the first and second polarization states for the scan having the highest block signature variation.

21. A method comprising:

simulating a surface of a sample object as a simulated surface, and defining simulated characteristics of the simulated surface;

dividing the simulated surface into pixels which are characterized by a parameter variation;

defining blocks of the simulated surface as respective groups of the pixels;

simulating irradiation of the pixels in multiple scans over the simulated surface with radiation having different, respective first polarization states;

simulating receiving returning radiation from the pixels in response to each of the scans;

simulating analysis of at least part of the returning radiation from the scans using respective second polarization states to generate processed returning radiation from the returning radiation;

simulating detection of the processed returning radiation;

constructing respective composite block signatures of the blocks in response to the processed returning radiation from the group of pixels in each block;

determining a composite block signature variation using the composite block signatures of the blocks; and

in response to a correlation between the composite block signature variation and the parameter variation, selecting two or more of the first polarization states and at least one of the second polarization states for use in subsequent physical examination of a test object.

22. The method according to claim 21, wherein determining the composite block signature variation comprises determining a highest composite block signature variation, and wherein selecting the two or more of the first polarization states and at least one of the second polarization states comprises selecting the first and second polarization states corresponding to the scans forming the highest composite block signature variation.

23. A method comprising:

providing a sample object having a variation of a parameter;

dividing the surface into pixels;

defining blocks of the surface as respective groups of the pixels;

irradiating the pixels in multiple scans over the surface with radiation having different, respective first polarization states;

for each of the scans;

detecting returning radiation from the pixels by one or more detectors, wherein for at least one of the detectors, at least part of the returning radiation is passed through a polarization element configured to pass radiation having a second polarization state different from the respective first polarization states;

constructing respective block signatures of the blocks in response to the returning radiation;

determining a block signature variation using the respective block signatures of the blocks, thereby generating a collection of block signature variations; and

selecting at least one block signature variation from among said collection to thereby provide the respective one of the first polarization states and at least one of the second polarization states for use in subsequent characterization of a surface of a target object.