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Manufacturing method of magneto-resistive element

  • US 8,728,830 B2
  • Filed: 06/12/2012
  • Issued: 05/20/2014
  • Est. Priority Date: 12/28/2009
  • Status: Active Grant
First Claim
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1. A manufacturing method of a magneto-resistive element, comprising:

  • a step of fabricating a tunnel barrier layer on a first ferromagnetic layer formed on a substrate; and

    a step of forming a second ferromagnetic layer on the tunnel barrier layer,wherein the step of fabricating the tunnel barrier layer includes;

    a step of depositing a first metal layer on the first ferromagnetic layer;

    a step of oxidizing the first metal layer;

    a step of depositing a second metal layer on the oxidized first metal layer; and

    a step of performing heating treatment on the oxidized first metal layer and the second metal layer prior to the step of forming a second ferromagnetic layer, andwherein the first metal layer and the second metal layer comprise magnesium.

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