Manufacturing method of magneto-resistive element

• US 8,728,830 B2
• Filed: 06/12/2012
• Issued: 05/20/2014
• Est. Priority Date: 12/28/2009
• Status: Active Grant

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Corporation (Canon Inc.)
• Inventors: Nishimura, Kazumasa
• Primary Examiner(s): Garber, Charles
• Assistant Examiner(s): STEVENSON, ANDRE C
• Application Number:
  US13/494,797
• Publication Number:
  US 20120288963A1
• Time in Patent Office: 707 Days
• Field of Search: None
• US Class Current: 438/3
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: C08K 2201/01 Magnetic additives
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
• CPC Class Codes: G11B 5/3906 Details related to the use of magnetic thin film layers or to their effects
• CPC Class Codes: G11B 5/3909 Arrangements using a magnetic tunnel junction
• CPC Class Codes: H10N 50/01 Manufacture or treatment

Abstract

The present invention provides a manufacturing method of a magneto-resistive element capable of obtaining a higher MR ratio, in a method of forming a metal oxide layer (e.g., MgO layer) by oxidation treatment of a metal layer (e.g., Mg layer). An embodiment of the present invention includes the steps of; providing a substrate having a first ferromagnetic layer; fabricating a tunnel barrier layer on the first ferromagnetic layer; and forming a second ferromagnetic layer on the tunnel barrier layer. The step of fabricating the tunnel barrier layer includes; the steps of; depositing a first metal layer on the first ferromagnetic layer; oxidizing the first metal layer; depositing a second metal layer on the oxidized first metal layer; and performing heating treatment on the oxidized first metal layer and the second metal layer at a temperature at which the second metal layer boils.

Claims

1. A manufacturing method of a magneto-resistive element, comprising:

a step of fabricating a tunnel barrier layer on a first ferromagnetic layer formed on a substrate; and

a step of forming a second ferromagnetic layer on the tunnel barrier layer,

wherein the step of fabricating the tunnel barrier layer includes;

a step of depositing a first metal layer on the first ferromagnetic layer;

a step of oxidizing the first metal layer;

a step of depositing a second metal layer on the oxidized first metal layer; and

a step of performing heating treatment on the oxidized first metal layer and the second metal layer prior to the step of forming a second ferromagnetic layer, and

wherein the first metal layer and the second metal layer comprise magnesium.

2. The manufacturing method of a magneto-resistive element according to claim 1, wherein the step of depositing the first metal layer forms the first metal layer so as to cause the first metal layer to contain oxygen therein.

3. The manufacturing method of a magneto-resistive element according to claim 1, wherein the step of performing heating treatment binds oxygen remaining on a surface of the first metal layer oxidized in the step of oxidation to the second metal layer by the heating treatment.

4. The manufacturing method of a magneto-resistive element according to claim 1, wherein the substrate which has been subjected to the heating treatment is cooled after the step of performing heating treatment.

6. The manufacturing method of a magneto-resistive element according to claim 1, wherein the heating treatment is performed at a temperature at which the second metal layer boils.

7. The manufacturing method of a magneto-resistive element according to claim 1, wherein each of the steps is performed consistently in a vacuum.

8. The manufacturing method of a magneto-resistive element according to claim 1, wherein the manufacturing method of the magneto-resistive element is performed by a treatment apparatus comprising a load-lock chamber and a deposition chamber.

9. The manufacturing method of a magneto-resistive element according to claim 8, wherein the treatment apparatus is a cluster-type treatment apparatus comprising a transfer chamber.

5. A manufacturing method of a magneto-resistive element, comprising:

a step of fabricating a tunnel barrier layer on a first ferromagnetic layer formed on a substrate; and

a step of forming a second ferromagnetic layer on the tunnel barrier layer,

wherein the step of fabricating the tunnel barrier layer includes;

a step of depositing a first metal layer on the first ferromagnetic layer;

a step of oxidizing the first metal layer;

a step of depositing a second metal layer on the oxidized first metal layer; and

a step of performing heating treatment on the oxidized first metal layer and the second metal layer at a temperature at which the second metal layer boils prior to the step of forming a second ferromagnetic layer, and

wherein the first metal layer and the second metal layer comprise magnesium.