Method of packaging a sensor
First Claim
1. A method of packaging a sensor, the method comprising:
- affixing a tuning fork to a platform, the tuning fork having tines comprising one or more surfaces, each tine further comprising an electrode and a piezoelectric material, and wherein the electrodes of the tines are positioned to apply electric fields to the piezoelectric materials in the respective tines to move the tines relative to the platform to displace a fluid in contact with the tines;
affixing an application specific integrated circuit (ASIC) to the platform;
providing electrical communication between the ASIC and the electrode of each tine for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork; and
applying a protective layer covering the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
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Abstract
An improved method of packaging a sensor is provided. The method includes the step of affixing a tuning fork to a platform. The tuning fork includes tines comprising one or more surfaces, with each tine further comprising an electrode and a piezoelectric material. An application specific integrated circuit (ASIC) is affixed to the platform. Electrical communication between the ASIC and the electrode of each tine is established for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork. A protective layer is applied to cover the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
230 Citations
17 Claims
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1. A method of packaging a sensor, the method comprising:
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affixing a tuning fork to a platform, the tuning fork having tines comprising one or more surfaces, each tine further comprising an electrode and a piezoelectric material, and wherein the electrodes of the tines are positioned to apply electric fields to the piezoelectric materials in the respective tines to move the tines relative to the platform to displace a fluid in contact with the tines; affixing an application specific integrated circuit (ASIC) to the platform; providing electrical communication between the ASIC and the electrode of each tine for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork; and applying a protective layer covering the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of assembling a fluid sensor, the method comprising:
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disposing a flexure resonator on a base, the flexure resonator comprising at least two prongs each having an electrode; disposing a control circuit on the base; applying a protective layer covering the base and the flexure resonator; blocking a portion of the flexure resonator with a removable protective barrier prior to applying the protective layer; and operatively connecting the control circuit to the electrodes for at least one of transmitting a signal to and receiving a signal from the flexure resonator. - View Dependent Claims (15, 16, 17)
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Specification