Composite sensor and electronic device

• US 8,733,169 B2
• Filed: 11/28/2012
• Issued: 05/27/2014
• Est. Priority Date: 02/17/2009
• Status: Active Grant

• Current Assignee: 138 East LCD Advancements Limited (Vector Capital Corporation)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Oshio, Masahiro
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/687,575
• Publication Number:
  US 20130081462A1
• Time in Patent Office: 545 Days
• Field of Search: 734/93, 735/10, 735/11, 735/143.2, 735/041.2, 735/041.4, 735/040.4
• US Class Current: 73/493
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 1/00293 maintaining a controlled atmosphere with processes not provided for in B81C1/00285
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation

Abstract

A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.

Claims

1. A composite sensor, comprising:

a package including a first space having a first pressure, the package including a second space having a second pressure lower than the first pressure, and the package including a container and a lid;

an acceleration sensor element disposed in the first space; and

a angular velocity sensor element disposed in the second space,

wherein the first space has a volume smaller than a volume of the second space, the first space and the second space is partitioned by the container and the lid, and

wherein the container has a bottom and a side wall that continuously rises from the bottom toward the lid, a first thickness of an outermost area of the side wall is thicker than a second thickness of an innermost area of the side wall, and the lid is placed on a top surface of the innermost area of the side wall.

2. The composite sensor according to claim 1, wherein at least one of the container and the lid has a protruded section, the acceleration sensor is disposed overlap the protruded section in planar view.

3. The composite sensor according to claim 1, wherein at least one of the container and the lid has a recessed section, the acceleration sensor is disposed within the recessed section.

4. The composite sensor according to claim 1, wherein at least one of a wall forming the first space and a wall forming the second space has a through hole, the through hole is sealed by a sealing member.

5. The composite sensor according to claim 1, wherein a height of a bottom surface forming the first space and a height of a bottom surface forming the second space are different from each other.

6. The composite sensor according to claim 1, wherein at least one of the container and the lid has a layered structure.

7. An electronic device comprising the composite sensor according to claim 1.