Ultra-flat, high throughput wafer lapping process

• US 8,734,207 B1
• Filed: 06/06/2013
• Issued: 05/27/2014
• Est. Priority Date: 06/19/2007
• Status: Expired due to Fees

• Current Assignee: Rubicon Technology, Inc.
• Original Assignee: Rubicon Technology, Inc.
• Inventors: Ko, Donggeun
• Primary Examiner(s): RACHUBA, MAURINA T
• Application Number:
  US13/911,828
• Time in Patent Office: 355 Days
• Field of Search: 451/41, 451/56, 451/270, 451/271, 451285-290
• US Class Current: 451/287
• CPC Class Codes: B24B 37/042 operating processes therefor
• CPC Class Codes: B24B 37/107 in a rotary movement only, about an axis being stationary during lapping
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces

Abstract

The present invention comprises of a process for lapping a high-throughput of ultra-flat wafers by utilizing a lapping apparatus containing a rotary flat, grooved polishing platen, at least two rotating pressurized heads each having a polishing wafer carrier that is adapted to receive a plurality of mounted wafers, and a plurality of concentric conditioning rings surrounding each pressurized head. The rotating pressurized heads are counterbalanced throughout the inventive process, and the lapping platen is continuously conditioned by simultaneously rotating the concentric conditioning rings over the lapping platen. This process allows continuous and controllable planarization thus allowing for a high throughput of wafers, while at the same time it prevents distortions in the lapping platen which reduces maintenance by providing continuous conditioning of the lapping platen. Further this inventive process allows substantially the entire surface of each wafer carrier to be utilized while maintaining a high quality planarized wafer product, highly desired in the semiconductor industry.

Claims

1. An apparatus for polishing substantially thin, rigid materials, comprising:

a rotatable flat, lapping platen;

a plurality of wafer carriers each adapted to receive at least one wafer; and

a plurality of rotatable pressurized heads configured to rotate in counterbalanced pairs and configured to apply pressure against the plurality of wafer carriers and the lapping platen.

2. The apparatus of claim 1, wherein the plurality of rotatable pressurized heads are each independently programmable with at least one of:

a force setting and a rotational speed.

3. The apparatus of claim 2, wherein the force setting is selectable from a range of about 50 g/cm² to about 650 g/cm².

4. The apparatus of claim 2, wherein the rotational speed is selectable from about 20 to about 60 revolutions per minute.

5. The apparatus of claim 1, wherein each of the plurality of wafer carriers is adapted to receive a plurality of wafers.

6. The apparatus of claim 1, wherein the lapping platen is configured in a geometric pattern.

7. The apparatus of claim 6, wherein the geometric pattern is spiral.

8. The apparatus of claim 1, wherein the plurality of wafer carriers are each adapted to receive a plurality of mounted wafers.

9. The apparatus of claim 1, further comprising a mechanism for providing slurry at a desired flow rate.

10. The apparatus of claim 9, wherein the desired flow rate is selectable from a rate substantially between 1 ml/min to 200 ml/min.

11. The apparatus of claim 1, further comprising a plurality of concentric conditioning rings configured around a respective one of the plurality of rotatable pressurized heads.

12. The apparatus of claim 1, wherein the plurality of rotatable pressurized heads are configured to rotate in both clockwise and counterclockwise directions.