Optical image stabilizer and method of manufacturing the same

• US 8,736,139 B2
• Filed: 12/01/2010
• Issued: 05/27/2014
• Est. Priority Date: 06/04/2010
• Status: Active Grant

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Lee, Seung Seoup
• Primary Examiner(s): Kim, John K
• Application Number:
  US12/926,648
• Publication Number:
  US 20110299842A1
• Time in Patent Office: 1,273 Days
• Field of Search: 310/309, 216/13, 374/1, 374/179, 396/55
• US Class Current: 310/309
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: B81C 1/00166 Electrodes
• CPC Class Codes: B81C 1/00476 removing a sacrificial layer B81C1/00912 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G03B 2205/0038 by displacing the image plane with respect to the optical axis in case of an electronic image sensor H04N23/68
• CPC Class Codes: H01L 27/1469 Assemblies, i.e. hybrid integration
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H04N 1/00307 with a mobile telephone apparatus constructional features of portable telephone sets H04M1/0202; mobile radio systems H04W84/00
• CPC Class Codes: H04N 23/54 Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
• CPC Class Codes: H04N 23/687 by shifting the lens or sensor position

Abstract

Disclosed herein is an optical image stabilizer, including: a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate; cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table; anchors fixing one ends of the cantilever arms onto the substrate; and electrodes applying voltage for moving the cantilever arm.

Claims

1. An optical image stabilizer, comprising:

a substrate;

a table disposed above the substrate, while levitating, to be movable above the substrate and having an image sensor mounted on the table;

one or more cantilever arms disposed above the substrate, while levitating, and connected to the table to horizontally move the table;

one or more anchors fixing one ends of the one or more cantilever arms to the substrate; and

one or more electrodes applying voltage to the respective one or more cantilever arms for horizontally moving the respective one or more cantilever arms without being in contact with the respective one or more cantilever arms and the table, wherein each electrode has a continuously curved surface facing a respective cantilever arm such that a distance between the electrode and the respective cantilever arm is larger at an end of the respective cantilever arm other than the one end fixed to the anchor.

2. The optical image stabilizer according to claim 1, wherein the one or more electrodes include at least one pair of first and second electrodes corresponding to one side surface of the table and having a bilaterally symmetrical structure.

3. The optical image stabilizer according to claim 1, wherein the cantilever arms are each disposed on two side surfaces based on an edge of the table.

4. The optical image stabilizer according to claim 3, wherein the one ends of the cantilever arms each disposed on two side surfaces of the table are connected to one anchor disposed on the substrate corresponding to the edge of the table.

5. The optical image stabilizer according to claim 1, wherein the one or more cantilever arms are formed to be integral with the table.

6. The optical image stabilizer according to claim 1, wherein the one or more cantilever arms are made of silicon.

7. The optical image stabilizer according to claim 1, wherein the table is made of silicon.

8. The optical image stabilizer according to claim 1, wherein an insulator pattern is further provided between the one or more anchors and the substrate.

9. The optical image stabilizer according to claim 1, further comprising stoppers disposed over the substrate corresponding to each edge of the table and limiting the movable region of the table.

10. The optical image stabilizer according to claim 9, wherein an insulator pattern is further provided between the stoppers and the substrate.