Three axis magnetic sensor device and method
First Claim
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1. A device for sensing magnetic fields, the device comprising:
- a substrate member having a surface region;
an integrated circuit (IC) layer spatially disposed overlying at least a portion of the surface region;
a first magnetic field sensor element including at least a first material and configured to detect at least in a first direction, the first magnetic field sensor element being operably coupled to the IC layer;
a second magnetic field sensor element including at least the first material and configured to detect at least in a second direction, the second magnetic field sensing element being operably coupled to the IC layer;
a third magnetic field sensor element including at least the first material and configured to detect at least in a third direction, the third magnetic sensing element being operably coupled to the IC layer; and
at least one magnetic field concentrator spatially formed overlying at least one portion of the surface region;
wherein all of the first, second and third directions are configured in a mutually orthogonal manner.
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Abstract
A method and structure for a three-axis magnetic field sensing device is provided. The device includes a substrate, an IC layer, and preferably three magnetic field sensors coupled to the IC layer. A nickel-iron magnetic field concentrator is also provided.
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Citations
20 Claims
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1. A device for sensing magnetic fields, the device comprising:
- a substrate member having a surface region;
an integrated circuit (IC) layer spatially disposed overlying at least a portion of the surface region;
a first magnetic field sensor element including at least a first material and configured to detect at least in a first direction, the first magnetic field sensor element being operably coupled to the IC layer;
a second magnetic field sensor element including at least the first material and configured to detect at least in a second direction, the second magnetic field sensing element being operably coupled to the IC layer;
a third magnetic field sensor element including at least the first material and configured to detect at least in a third direction, the third magnetic sensing element being operably coupled to the IC layer; and
at least one magnetic field concentrator spatially formed overlying at least one portion of the surface region;
wherein all of the first, second and third directions are configured in a mutually orthogonal manner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
- a substrate member having a surface region;
Specification