Semiconductor device and manufacturing method thereof
First Claim
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1. A semiconductor device comprising:
- an oxide semiconductor layer;
a source electrode and a drain electrode connected to the oxide semiconductor layer;
a gate insulating film; and
a gate electrode adjacent to the oxide semiconductor layer with the gate insulating film therebetween,wherein the oxide semiconductor layer includes a nanocrystal with a size greater than or equal to 1 nm and smaller than or equal to 20 nm, andwherein a hydrogen concentration of the oxide semiconductor layer is smaller than or equal to 5×
1019/cm3.
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Abstract
A semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode electrically connected to the oxide semiconductor layer, a gate insulating layer covering the oxide semiconductor layer, the source electrode, and the drain electrode, and a gate electrode over the gate insulating layer. The source electrode and the drain electrode include an oxide region formed by oxidizing a side surface thereof. Note that the oxide region of the source electrode and the drain electrode is preferably formed by plasma treatment with a high frequency power of 300 MHz to 300 GHz and a mixed gas of oxygen and argon.
156 Citations
16 Claims
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1. A semiconductor device comprising:
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an oxide semiconductor layer; a source electrode and a drain electrode connected to the oxide semiconductor layer; a gate insulating film; and a gate electrode adjacent to the oxide semiconductor layer with the gate insulating film therebetween, wherein the oxide semiconductor layer includes a nanocrystal with a size greater than or equal to 1 nm and smaller than or equal to 20 nm, and wherein a hydrogen concentration of the oxide semiconductor layer is smaller than or equal to 5×
1019/cm3. - View Dependent Claims (2, 3)
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4. A semiconductor device comprising:
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an oxide semiconductor layer; a source electrode and a drain electrode connected to the oxide semiconductor layer; a gate insulating film; and a gate electrode adjacent to the oxide semiconductor layer with the gate insulating film therebetween, wherein the oxide semiconductor layer includes a nanocrystal with a size greater than or equal to 1 nm and smaller than or equal to 20 nm, and wherein a carrier concentration of the oxide semiconductor layer is smaller than or equal to 1×
1012 cm3. - View Dependent Claims (5, 6)
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7. A semiconductor device comprising:
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an oxide semiconductor layer; a source electrode and a drain electrode connected to the oxide semiconductor layer; a gate insulating film; and a gate electrode adjacent to the oxide semiconductor layer with the gate insulating film therebetween, wherein the oxide semiconductor layer includes a nanocrystal, and wherein a c-axis of the nanocrystal is substantially perpendicular to a surface of the oxide semiconductor layer, and wherein a hydrogen concentration of the oxide semiconductor layer is smaller than or equal to 5×
1019/cm3. - View Dependent Claims (8, 9)
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10. A semiconductor device comprising:
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an oxide semiconductor layer; a source electrode and a drain electrode connected to the oxide semiconductor layer; a gate insulating film; and a gate electrode adjacent to the oxide semiconductor layer with the gate insulating film therebetween, wherein the oxide semiconductor layer includes a nanocrystal, wherein a c-axis of the nanocrystal is substantially perpendicular to a surface of the oxide semiconductor layer, and wherein a carrier concentration of the oxide semiconductor layer is smaller than or equal to 1×
1012 cm3. - View Dependent Claims (11, 12)
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13. A semiconductor device comprising:
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an oxide semiconductor layer; a source electrode and a drain electrode connected to the oxide semiconductor layer; an oxide region on a side surface of each of the source electrode and the drain electrode; a gate insulating layer; and a gate electrode adjacent to the oxide semiconductor layer with the gate insulating layer therebetween, wherein the source electrode and the drain electrode comprise a conductive material, and wherein the oxide region includes the conductive material. - View Dependent Claims (14, 15, 16)
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Specification