Enhanced diffusion barrier for interconnect structures
First Claim
1. An interconnect structure comprising:
- an interconnect dielectric material comprising at least one opening located therein, wherein said interconnect dielectric material has nitrogen enriched dielectric surfaces within said at least one opening and spanning an entirety of an uppermost horizontal surface of said interconnect dielectric material; and
a conductive material located within the at least one opening, said conductive material is separated from the interconnect dielectric material by a diffusion barrier comprising at least an in-situ formed metal nitride liner and an overlying metal diffusion barrier liner, wherein an uppermost surface of said conductive material, uppermost surfaces of said in-situ formed metal nitride liner and uppermost surfaces of said metal diffusion barrier liner are coplanar with an uppermost surface of said nitrogen enriched dielectric surface spanning the entirety of the uppermost horizontal surface of said interconnect dielectric material.
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Abstract
Alternative methods of fabricating an interconnect structure in which an enhanced diffusion barrier including an in-situ formed metal nitride liner formed between an interconnect dielectric material and an overlying metal diffusion barrier liner are provided. In one embodiment, at least one opening is formed into an interconnect dielectric material. A nitrogen enriched dielectric surface layer is formed within exposed surfaces of the interconnect dielectric material utilizing thermal nitridation. A metal diffusion barrier liner is the formed. During and/or after the formation of the metal diffusion barrier liner, a metal nitride liner forms in-situ in a lower region of the metal diffusion barrier liner. A conductive material is then formed on the metal diffusion barrier liner. The conductive material, the metal diffusion barrier liner and the metal nitride liner that are located outside of the at least one opening are removed to provide a planarized structure.
74 Citations
19 Claims
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1. An interconnect structure comprising:
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an interconnect dielectric material comprising at least one opening located therein, wherein said interconnect dielectric material has nitrogen enriched dielectric surfaces within said at least one opening and spanning an entirety of an uppermost horizontal surface of said interconnect dielectric material; and a conductive material located within the at least one opening, said conductive material is separated from the interconnect dielectric material by a diffusion barrier comprising at least an in-situ formed metal nitride liner and an overlying metal diffusion barrier liner, wherein an uppermost surface of said conductive material, uppermost surfaces of said in-situ formed metal nitride liner and uppermost surfaces of said metal diffusion barrier liner are coplanar with an uppermost surface of said nitrogen enriched dielectric surface spanning the entirety of the uppermost horizontal surface of said interconnect dielectric material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An interconnect structure comprising:
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an interconnect dielectric material comprising at least one opening located therein, wherein said at least one opening has vertical sidewalls and a bottom wall and said interconnect dielectric material has nitrogen enriched dielectric surfaces present entirely at said vertical sidewalls and said bottom wall of said at least one opening; and a conductive material located within the at least one opening, said conductive material is separated from the interconnect dielectric material by a diffusion barrier comprising, from bottom to top, an in-situ formed metal nitride liner, another metal nitride and a metal diffusion barrier liner. - View Dependent Claims (17, 18, 19)
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Specification