Noise reduction method with chopping for a merged MEMS accelerometer sensor

• US 8,742,964 B2
• Filed: 01/16/2013
• Issued: 06/03/2014
• Est. Priority Date: 04/04/2012
• Status: Active Grant

• Current Assignee: Semiconductor Components Industries LLC (ON Semiconductor Corporation)
• Original Assignee: Fairchild Semiconductor Corporation (ON Semiconductor Corporation)
• Inventors: Kleks, Jonathan Adam, Opris, Ion, Seng, Justin
• Primary Examiner(s): Mai, Lam T
• Application Number:
  US13/742,942
• Publication Number:
  US 20130265183A1
• Time in Patent Office: 503 Days
• Field of Search: 341143-155, 327/261, 327/553, 327/209.554, 327/65, 327/100, 327/124, 375/247, 333/186, 333/197, 333/199
• US Class Current: 341/143
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 7/008 MEMS characterised by an electronic circuit specially adapted for controlling or driving the same B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00
• CPC Class Codes: H03M 3/34 by chopping
• CPC Class Codes: H03M 3/494 Sampling or signal conditioning arrangements specially adapted for delta-sigma type analogue/digital conversion systems

Abstract

An apparatus includes a capacitance-to-voltage converter circuit configured to be electrically coupled to a micro-electromechanical system (MEMS) sensor circuit. The capacitance-to-voltage converter circuit includes a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path, and a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor.

Claims

1. An apparatus comprising:

a capacitance-to-voltage converter circuit configured to be electrically coupled to a micro-electromechanical system (MEMS) sensor circuit, the capacitance-to-voltage converter circuit including;

a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path; and

a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor.

2. The apparatus of claim 1,

wherein the differential sigma-delta ADC circuit includes a comparator circuit, and

wherein the apparatus includes a pseudo-random noise generator circuit electrically coupled to the comparator circuit and configured to apply dither noise to an input of the comparator circuit.

3. The apparatus of claim 1, including a chopping clock circuit configured to clock the differential chopping circuit path with a pseudo-random clock signal.

4. The apparatus of claim 1,

wherein the differential sigma-delta ADC circuit includes an operational amplifier (opamp) circuit, and wherein the apparatus includes:

a first chopping switch matrix circuit configured to invert the polarity of the differential chopping circuit path at an input of the opamp circuit; and

a second chopping switch matrix circuit configured to invert the polarity of the differential chopping circuit path at an output of the opamp circuit.

5. The apparatus of claim 4, including:

a third chopping switch matrix circuit configured to switch a polarity of a differential feedback circuit path of the differential sigma-delta ADC circuit, and

wherein the differential feedback circuit path extends from an output of the second chopping switch matrix circuit to an input of the third chopping switch matrix circuit.

6. The apparatus of claim 4, including a differential feedback circuit path extending from an output of the second chopping switch matrix circuit to an input of the first chopping switch matrix circuit.

7. The apparatus of claim 4, including:

a phase clock circuit configured to generate a first operational clock phase and a second operational clock phase,

wherein, during the first operational clock phase, the first chopping switch matrix circuit is configured to electrically isolate the MEMS sensor circuit from the differential sigma-delta ADC circuit, and

wherein, during the second operational clock phase, the first and second chopping switch matrix circuits are configured to invert the polarity of the differential chopping circuit path.

8. The apparatus of claim 7, including:

a driver circuit electrically coupled to the MEMS sensor,

wherein the driver circuit is configured to apply a square wave excitation signal to a drive input of the MEMS sensor, and

wherein the first and second operational clock phases have the same frequency and duty cycle as the square wave excitation signal.

9. The apparatus of claim 1, including the MEMS sensor circuit, wherein the MEMS sensor circuit is configured to change capacitance in response to linear acceleration in a first direction.

10. An apparatus comprising:

a capacitance-to-voltage converter circuit configured to be electrically coupled to a MEMS sensor circuit, the capacitance-to-voltage converter circuit including;

a differential circuit path configured to receive a differential MEMS sensor output signal;

a differential sigma-delta ADC circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor, wherein the differential sigma-delta ADC circuit includes a comparator circuit; and

a pseudo-random noise generator circuit electrically coupled to the comparator circuit and configured to apply dither noise to an input of the comparator circuit.

11. The apparatus of claim 10, including the MEMS sensor circuit, wherein the MEMS sensor circuit is configured to change capacitance in response to linear acceleration in a first direction.

12. The apparatus of claim 11, including:

a switch circuit electrically coupled to the MEMS sensor;

a driver circuit electrically coupled to the MEMS sensor and configured to apply a square wave excitation signal to a drive input of the MEMS sensor;

a phase clock circuit electrically coupled to the switch circuit and configured to generate a first operational clock phase and a second operational clock phase, wherein the first and second operational clock phases have the same frequency and duty cycle as the square wave excitation signal, and

wherein, during the first operational clock phase, the switch circuit is configured to electrically isolate the MEMS sensor circuit from the differential sigma-delta ADC circuit and the MEMS sensor circuit is configured to sample the linear acceleration.

13. The apparatus of claim 11,

wherein the MEMS sensor circuit is configured to change a first capacitance in response to linear acceleration in a first direction, and change a second capacitance in response to linear acceleration in a second direction, and

wherein the apparatus includes a first capacitance-to-voltage converter circuit to generate a first digital signal representative of a change in the first capacitance and a second capacitance-to-voltage converter circuit to generate a second digital signal representative of a change in the second capacitance.

14. A method comprising:

sensing an output of a micro-electromechanical system (MEMS) sensor to create a differential sensor output signal;

applying the output of the MEMS sensor to a differential chopping circuit path, wherein a polarity of the differential chopping circuit path is inverted at timed intervals; and

sampling the chopped MEMS sensor output signal with a differential sigma-delta analog to digital converter (ADC) circuit to generate a digital signal representative of a change in capacitance of the MEMS sensor.

15. The method of claim 14, including applying dither noise to the differential sigma-delta ADC circuit.

16. The method of claim 14, including clocking the differential chopping circuit path with a pseudo-random clock signal.

17. The method of claim 14, wherein applying the output of the MEMS sensor to a differential chopping circuit path includes:

inverting the polarity of the differential chopping circuit path at an input of an opamp circuit of the differential sigma-delta ADC circuit; and

inverting the polarity of the differential chopping circuit path at an output of the opamp circuit.

18. The method of claim 14, wherein applying the output of the MEMS sensor to a differential chopping circuit path includes:

feeding back a differential output of the opamp circuit to a differential input of the opamp circuit to form a differential feedback circuit path; and

inverting a polarity of the differential feedback circuit path at timed intervals.

19. The method of claim 14, wherein applying the output of the MEMS sensor to a differential chopping circuit path includes:

electrically isolating the MEMS sensor circuit from the differential sigma-delta ADC circuit during a first operational clock phase; and

inverting the polarity of the differential chopping circuit path during a second operational clock phase.

20. The method of claim 19, including:

applying a square wave excitation signal to a drive input of the MEMS sensor, wherein the first and second operational clock phases have the same frequency and duty cycle as the square wave excitation signal; and

sampling the linear acceleration using the MEMS sensor during the first operational clock phase

21. The method of claim 14, wherein sensing an output of the MEMS sensor includes sensing a change in capacitance of the MEMS sensor in response to linear acceleration in a first direction.

22. The method of claim 14, wherein sensing an output of the MEMS sensor includes:

sensing a first output of the MEMS sensor to sense a change in capacitance of the MEMS sensor in response to linear acceleration in a first direction; and

sensing a second output of the MEMS sensor to sense a change in capacitance of the MEMS sensor in response to linear acceleration in a second direction, wherein the second direction is orthogonal to the first direction.