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Noise reduction method with chopping for a merged MEMS accelerometer sensor

  • US 8,742,964 B2
  • Filed: 01/16/2013
  • Issued: 06/03/2014
  • Est. Priority Date: 04/04/2012
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a capacitance-to-voltage converter circuit configured to be electrically coupled to a micro-electromechanical system (MEMS) sensor circuit, the capacitance-to-voltage converter circuit including;

    a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path; and

    a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor.

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