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Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool

  • US 8,744,607 B2
  • Filed: 02/11/2013
  • Issued: 06/03/2014
  • Est. Priority Date: 03/08/2008
  • Status: Active Grant
First Claim
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1. A system, comprising:

  • a processor, coupled to a memory, comprising computer-executable components, comprising;

    a drift component that modifies a manufacturing recipe processed by a manufacturing tool that produces an asset based at least in part on a set of driving variables and a defined probability distribution function to generate a modified manufacturing recipe for the asset, wherein the set of driving variables determine a sequence in which to modify a set of recipe parameters associated with the manufacturing recipe, and wherein a magnitude of change between the manufacturing recipe and the modified manufacturing recipe is determined based at least in part on the defined probability distribution function.

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