Substrate alignment system

• US 8,744,624 B1
• Filed: 05/11/2006
• Issued: 06/03/2014
• Est. Priority Date: 05/11/2006
• Status: Active Grant

• Current Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Aalund, Martin P., Kaveh, Farro
• Primary Examiner(s): Black, Thomas
• Assistant Examiner(s): LOUIE, WAE LENNY
• Application Number:
  US11/382,721
• Time in Patent Office: 2,945 Days
• Field of Search: 700/245, 356/237.1, 356/237.5, 702/153
• US Class Current: 700/245
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

A substrate loading system, having a vision system adapted to view a substrate and provide position signals indicative of substrate position. A controller receives the position signals from the vision system, determines the substrate position, and sends transport signals to a robot arm. The robot arm engages the substrate in a beginning location and a beginning position and transports the substrate to a desired location and a desired position, based at least in part on the transport signals received from the controller.

Claims

1. A substrate loading system, comprising:

a vision system adapted to view a substrate and provide position signals indicative of substrate position,

a controller adapted to receive the position signals from the vision system, determine the substrate position, and send transport signals to a robot arm, and

the robot arm adapted to engage the substrate in a beginning location and a beginning position and transport the substrate to a desired location in a desired position, based at least in part on the transport signals received from the controller.

2. The substrate loading system of claim 1, wherein the beginning location of the substrate is a cassette.

3. The substrate loading system of claim 1, wherein the desired location of the substrate is within a tool.

4. The substrate loading system of claim 1, wherein the beginning position and the desired position have common pitch and yaw components.

5. The substrate loading system of claim 1, further comprising a fiducial that is commonly viewed with the substrate by the vision system to provide referenced position signals.

6. The substrate loading system of claim 5, wherein the fiducial is disposed on the robot arm.

7. The substrate loading system of claim 5, wherein the fiducial is disposed on an element other than the robot arm and the vision system, which other element is in a known location and position relative to the vision system.

8. The substrate loading system of claim 1, wherein the robot arm retains the substrate with gravity alone.

9. The substrate loading system of claim 1, further comprising an intermediate stage on which the robot arm places the substrate, releases the substrate, and re-engages the substrate from a different orientation, in order to position the substrate in the desired location in the desire position.

10. The substrate loading system of claim 1, wherein a flat on the substrate is used to determine the substrate position.

11. The substrate loading system of claim 1, wherein a notch on the substrate is used to determine the substrate position.

12. The substrate loading system of claim 1, wherein circuit elements on the substrate are used to determine the substrate position.

13. A method of transporting a substrate from a beginning location and a beginning position to a desired location and a desired position, the method comprising the steps of:

(a) viewing a substrate with a vision system,

(b) providing position signals indicative of substrate position,

(c) receiving the position signals from the vision system with a controller,

(d) determining the substrate position with the controller,

(e) sending transport signals to a robot arm from the controller,

(f) engaging the substrate with the robot arm in the beginning location and the beginning position, and

(g) transporting the substrate with the robot arm to the desired location and the desired position, based at least in part on the transport signals received from the controller.

14. The method of claim 13, wherein the steps of the method are performed in the listed order.

15. The method of claim 13, wherein step (f) is performed prior to all other steps as listed.

16. The method of claim 13, wherein the beginning location of the substrate is a cassette and the desired location of the substrate is within a tool.

17. The method of claim 13, wherein the beginning position and the desired position have common pitch and yaw components.

18. The method of claim 13, further comprising the step of commonly viewing a fiducial with the substrate by the vision system to provide referenced position signals to the controller.

19. The method of claim 13, further comprising the steps of placing the substrate on an intermediate stage with the robot arm, releasing the substrate, and re-engaging the substrate from a different orientation, in order to transport the substrate to the desired location in the desire position.

20. The method of claim 13, wherein the step of determining the substrate position is accomplished with the use of at least one of a flat on the substrate, a notch on the substrate, and circuit elements on the substrate.