Micromechanical sensor having a bandpass characteristic
First Claim
1. A micromechanical sensor having at least two spring-mass-damper oscillators which can be excited by a common external oscillation, with the micromechanical sensor having a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency, wherein the first and the second spring-mass-damper oscillating systems are designed such that they oscillate in-phase in a frequency range below the second resonant frequency;
- wherein the first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators;
wherein the first and the second spring-mass-damper oscillating systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage, with the electrode deflections influencing the electrode separation and/or the electrode coverage and thus influencing the magnitude of the capacitance, and with the influences of the first and second spring-mass-damper oscillating systems on the magnitude of the capacitance being compensated for in the case of an in-phase oscillation.
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Accused Products
Abstract
The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage.
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Citations
15 Claims
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1. A micromechanical sensor having at least two spring-mass-damper oscillators which can be excited by a common external oscillation, with the micromechanical sensor having a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency, wherein the first and the second spring-mass-damper oscillating systems are designed such that they oscillate in-phase in a frequency range below the second resonant frequency;
- wherein the first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators;
wherein the first and the second spring-mass-damper oscillating systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage, with the electrode deflections influencing the electrode separation and/or the electrode coverage and thus influencing the magnitude of the capacitance, and with the influences of the first and second spring-mass-damper oscillating systems on the magnitude of the capacitance being compensated for in the case of an in-phase oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- wherein the first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators;
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10. A method for detection and/or measurement of oscillations by means of a micromechanical sensor with at least two spring-mass-damper oscillators which are excited by a common external oscillation, with the micromechanical sensor having a first damped spring-mass-damper oscillating system with a first resonant frequency and a second damped spring-mass-damper oscillating system with a second resonant frequency, which is lower than the first resonant frequency, the method comprising:
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oscillating the first and the second spring-mass-damper oscillating systems in-phase in a frequency range below the second resonant frequency; oscillating electrodes of the first and the second spring-mass-damper oscillating systems in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators; coupling the first and the second spring-mass-damper oscillating systems to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance governed by at least one electrode area, by at least one electrode coverage and/or by at least one electrode separation, with the electrode deflections influencing the electrode separation and/or the electrode coverage and thus influencing a magnitude of the capacitance, and compensating the influence of the first spring-mass-damper oscillating system on the magnitude of the capacitance by the second spring-mass-damper oscillating system in the case of a synchronous oscillation, and using the magnitude of the capacitance as a sensor output variable. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification