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Micromechanical sensor having a bandpass characteristic

  • US 8,746,064 B2
  • Filed: 08/25/2011
  • Issued: 06/10/2014
  • Est. Priority Date: 08/26/2010
  • Status: Active Grant
First Claim
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1. A micromechanical sensor having at least two spring-mass-damper oscillators which can be excited by a common external oscillation, with the micromechanical sensor having a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency, wherein the first and the second spring-mass-damper oscillating systems are designed such that they oscillate in-phase in a frequency range below the second resonant frequency;

  • wherein the first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators;

    wherein the first and the second spring-mass-damper oscillating systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage, with the electrode deflections influencing the electrode separation and/or the electrode coverage and thus influencing the magnitude of the capacitance, and with the influences of the first and second spring-mass-damper oscillating systems on the magnitude of the capacitance being compensated for in the case of an in-phase oscillation.

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