Substrate transport apparatus

• US 8,747,050 B2
• Filed: 09/14/2012
• Issued: 06/10/2014
• Est. Priority Date: 05/08/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Hofmeister, Christopher, Caveney, Robert T.
• Primary Examiner(s): Lowe, Scott
• Application Number:
  US13/617,171
• Publication Number:
  US 20130071217A1
• Time in Patent Office: 634 Days
• Field of Search: 414/217, 414/744.5, 414/941, 318/568.21, 744/900.3, 901/15, 901/23
• US Class Current: 414/744.5
• CPC Class Codes: B25J 11/0095 Manipulators transporting wafers
• CPC Class Codes: B25J 18/00 Arms
• CPC Class Codes: B25J 9/106 with articulated links
• CPC Class Codes: B25J 9/126 Rotary actuators
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer
• CPC Class Codes: Y10S 901/15 Jointed arm
• CPC Class Codes: Y10S 901/21 Flaccid drive element
• CPC Class Codes: Y10S 901/23 Electric motor
• CPC Class Codes: Y10S 901/27 Arm part
• CPC Class Codes: Y10T 74/20305 Robotic arm
• CPC Class Codes: Y10T 74/20317 including electric motor
• CPC Class Codes: Y10T 74/20329 Joint between elements

Abstract

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Claims

1. A substrate transport apparatus comprising:

a chamber having a frame and sealable ports configured to allow passage of substrates to and from the chamber;

at least one transfer arm disposed within the chamber and configured to transport substrates through the ports, the at least one transfer arm having at least one substantially rigid upper arm link, at least one substantially rigid forearm link rotatably coupled to a respective one of the at least one substantially rigid upper arm and at least one substrate support rotatably coupled to the at least one substantially rigid forearm; and

a first shaftless rotary motor including a stator connected to the frame where one of the at least one substantially rigid upper arm link is configured as a rotor of the first shaftless rotary motor.

2. The substrate transport apparatus of claim 1, further comprising a second shaftless rotary motor having a stator connected to the frame where another of the at least one substantially rigid forearm link is configured as a rotor of the second shaftless rotary motor.

3. The substrate transport apparatus of claim 1, wherein the at least one transfer arm comprises a SCARA arm.

4. The substrate transport apparatus of claim 1, further comprising:

a second shaftless rotary motor having a stator connected to the frame;

wherein the at least one substantially rigid upper arm link comprises two upper arm links each rotatable about a common axis of rotation, a first one of the upper arm links forming the rotor of the first shaftless rotary motor and a second one of the upper arm links forming a rotor of the second shaftless rotary motor; and

wherein the at least one substantially rigid forearm link comprises two forearm links each rotatably coupled to a respective upper arm link where the at least one end effector is rotatably coupled to both forearm links.

5. The substrate transport apparatus of claim 1, further comprising a second chamber coupled to the chamber at one of the ports where the at least one transport arm is configured to transfer substrates between the chamber and the second chamber.

6. The substrate transport apparatus of claim 1, further comprising a second chamber coupled to the chamber, the second chamber having a second transfer arm, wherein the at least one transfer arm and the second transfer arm are configured to transfer substrates between the chamber and the second chamber.

7. A substrate transport apparatus comprising:

a housing;

a first stator linearly distributed substantially along peripheral walls of the housing;

a second stator linearly distributed substantially along the peripheral walls of the housing;

a first substrate transport arm having a center of rotation located within the housing, the first substrate transport arm having

an upper arm rotatable about the center of rotation and forming a first rotor,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation, and

a first substrate support rotatably coupled to a second opposite end of the forearm;

wherein the first stator and first rotor form a first motor, and the upper arm, forearm and first substrate support are inside the first stator and a motor output of the first motor at a connection point between the first motor and the first rotor is a resultant force disposed peripheral to the upper arm.

8. The substrate transport apparatus of claim 7, wherein the forearm forms a second rotor and the second stator and second rotor form a second motor where the upper arm, forearm and first substrate support are inside the second stator, a motor output of the second motor at a connection point between the second motor and second rotor being a resultant force disposed peripheral to the forearm.

9. The substrate transport apparatus of claim 8, wherein the forearm includes a first forearm member rotatable about the eccentric location and a second forearm member rotatable about the center of rotation, the first forearm member being drivingly coupled to the second forearm member where the resultant force is applied to the second forearm member for effecting rotation of the first forearm member.

10. The substrate transport apparatus of claim 8, further comprising:

a third stator linearly distributed substantially along peripheral walls of the housing;

a fourth stator linearly distributed substantially along the peripheral walls of the housing;

a second substrate transport arm having a center of rotation located within the housing, the second substrate transport arm having

an upper arm rotatable about the center of rotation and forming a third rotor,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation, the forearm forming a fourth rotor, and

a second substrate support rotatably coupled to a second opposite end of the forearm;

wherein the third stator and third rotor form a third motor and the fourth stator and fourth rotor form a fourth motor, and the upper arm, forearm and second substrate support of the second substrate transport arm are inside the third and fourth stators and a motor output of the third and fourth motors at a connection point between the third and fourth motors and a respective one of the upper arm and forearm is a resultant force disposed peripheral to the respective one of the upper arm and forearm.

11. The substrate transport apparatus of claim 7, further comprising:

a second rotor rotatably coupled about the center of rotation, and the forearm is drivingly coupled to the second rotor;

wherein the second stator and second rotor form a second motor and the second stator is configured so that a motor output at a connection between the second motor and the second rotor is a resultant force disposed peripheral to the upper arm.

12. The substrate transport apparatus of claim 11, further comprising:

a third stator linearly distributed substantially along peripheral walls of the housing;

a fourth stator linearly distributed substantially along the peripheral walls of the housing;

a second substrate transport arm rotatable about the center of rotation, the second substrate transport arm having

an upper arm rotatable about the center of rotation and forming a third rotor,

a fourth rotor rotatably coupled about the center of rotation,

a forearm rotatably coupled at a first end to the upper arm at a location eccentric to the center of rotation and being drivingly coupled to the fourth rotor, and

a second substrate support rotatably coupled to a second opposite end of the forearm;

wherein the third stator and third rotor form a third motor and the fourth stator and fourth rotor form a fourth motor and the third stator and fourth stator are configured so that a motor output at a connection between the third and fourth motors and a respective one of the third and fourth rotors is a resultant force disposed peripheral to the upper arm of the second substrate transport arm.

13. The substrate transport apparatus of claim 11, wherein the upper arm comprises a substantial ring shape and forms a self bearing motor with the first stator.

14. The substrate transport apparatus of claim 11, wherein the upper arm comprises an elongated link member rotatably supported by a shaft located at the center of rotation.

15. A substrate transport apparatus comprising:

a frame;

a first stator linearly distributed substantially about a periphery of the frame;

a second stator linearly distributed substantially about the periphery of the frame; and

a first substrate transport arm having,

a first and second rotors rotatable about a center of rotation located within the frame, each of the first and second rotors having a distal end,

a first and second arm links each being rotatably coupled at a first end to a respective distal end of the first and second rotors, and

a first substrate support being rotatably coupled to a respective second end of the first and second arm links;

wherein the first and second stators are configured to apply an resultant force to the first and second rotors where the resultant force is peripheral to the first and second arm links.

16. The substrate transport apparatus of claim 15, further comprising:

a third stator linearly distributed substantially about a periphery of the frame;

a fourth stator linearly distributed substantially about the periphery of the frame;

a second substrate transport arm having,

a third and fourth rotors rotatable about the center of rotation, each of the third and fourth rotors having a distal end,

a third and fourth arm links each being rotatably coupled at a first end to a respective distal end of the third and fourth rotors, and

a second substrate support being rotatably coupled to a respective second end of the third and fourth arm links;

wherein the third and fourth stators are configured to apply an resultant force to the third and fourth rotors where the resultant force is peripheral to the third and fourth arm links.