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Chemical sensor with conductive cup-shaped sensor surface

  • US 8,747,748 B2
  • Filed: 01/19/2012
  • Issued: 06/10/2014
  • Est. Priority Date: 01/19/2012
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface;

    a dielectric layer defining a cavity extending to the upper surface of the floating gate conductor; and

    an electrically conductive layer on a sidewall of the cavity and electrically communicating with the floating gate conductor, the electrically conductive layer extending incompletely up the sidewall of the cavity; and

    a contiguous passivation layer disposed over the electrically conductive layer, an inner surface of the passivation layer defining a well for the sensor.

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