Chemical sensor with conductive cup-shaped sensor surface
First Claim
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1. A device comprising:
- a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface;
a dielectric layer defining a cavity extending to the upper surface of the floating gate conductor; and
an electrically conductive layer on a sidewall of the cavity and electrically communicating with the floating gate conductor, the electrically conductive layer extending incompletely up the sidewall of the cavity; and
a contiguous passivation layer disposed over the electrically conductive layer, an inner surface of the passivation layer defining a well for the sensor.
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Abstract
A system includes a sensor including a sensor pad and a well wall structure defining a well operatively coupled to the sensor pad. The well is further defined by a lower surface disposed over the sensor pad. The well wall structure defines an upper surface and defines a wall surface extending between the upper surface and the lower surface. The system further includes a conductive layer disposed over the lower surface and the wall surface.
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12 Claims
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1. A device comprising:
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a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; a dielectric layer defining a cavity extending to the upper surface of the floating gate conductor; and an electrically conductive layer on a sidewall of the cavity and electrically communicating with the floating gate conductor, the electrically conductive layer extending incompletely up the sidewall of the cavity; and a contiguous passivation layer disposed over the electrically conductive layer, an inner surface of the passivation layer defining a well for the sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification