Charge storage device for detecting alpha particles

• US 8,748,800 B2
• Filed: 03/05/2013
• Issued: 06/10/2014
• Est. Priority Date: 06/09/2008
• Status: Active Grant

• Current Assignee: Infineon Technologies Batam PT (Infineon Technologies AG)
• Original Assignee: Spansion LLC (Infineon Technologies AG)
• Inventors: Hossain, Timothy Z., Clopton, Patrick Mark, Foster, Christopher, Lyons, Christopher F., Fulwood, Clayton, Goodwin, Greg Alan, Posey, Dan E.
• Primary Examiner(s): Legasse, Jr., Francis M
• Application Number:
  US13/786,216
• Publication Number:
  US 20130193537A1
• Time in Patent Office: 462 Days
• Field of Search: 250/208.1, 250/214.1, 250/214.R, 250/238, 250/239, 250/207, 250/214.VT, 25037009-37014, 2503381-3384, 378/98.11, 378/98.12, 257/431, 257/432
• US Class Current: 250/214.1
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/1462 Coatings
• CPC Class Codes: H01L 27/14676 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 31/118 of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors

Abstract

Systems and methods are described herein for detecting particles emitted by nuclear material. The systems comprise one or more semiconductor devices for detecting particles emitted from nuclear material. The semiconductor devices can comprise a charge storage element comprising several layers. A non-conductive charge storage layer enveloped on top and bottom by dielectric layers is mounted on a substrate. At least one top semiconductor layer can be placed on top of the top dielectric layer. A reactive material that reacts to particles, such as neutrons emitted from nuclear material, can be incorporated into the top semiconductor layer. When the reactive material reacts to a particle emitted from nuclear material, ions are generated that can alter the charge storage layer and enable detection of the particle.

Claims

1. A device for detecting an alpha particle, the device comprising:

a charge storage structure, the charge storage structure comprising;

a first layer comprising silicon;

a second layer located below the first layer, the second layer comprising a non-conductive material;

a third layer located below the second layer, the third layer comprising;

a non-conductive material, and

a plurality of electrons giving the third layer a net negative charge, wherein the net negative charge changes in response to a presence of the alpha particle;

a fourth layer located below the third layer, the fourth layer comprising a non-conductive material; and

a fifth layer located below the fourth layer, the fifth layer comprising silicon.

2. The device of claim 1, wherein the plurality of electrons in the third layer are stored as a first group on a first side of the third layer, and as a second group on a second side of the third layer.

3. The device of claim 1, wherein a first electric field is present between the first layer and the third layer.

4. The device of claim 1, wherein a second electric field is present between the third layer and the fifth layer.