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Semiconductor light emitting element and method for manufacturing semiconductor light emitting element

  • US 8,748,903 B2
  • Filed: 10/27/2010
  • Issued: 06/10/2014
  • Est. Priority Date: 11/05/2009
  • Status: Active Grant
First Claim
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1. A semiconductor light emitting element comprising:

  • a first semiconductor layer that has a first conductivity type;

    a light emitting layer that is laminated on one surface of the first semiconductor layer so that a part of the one surface is exposed;

    a second semiconductor layer that has a second conductivity type different from the first conductivity type and is laminated on the light emitting layer;

    a transparent electrode that includes oxide of indium, has transparency to light output from the light emitting layer, and is laminated on the second semiconductor layer;

    a first joining layer that includes Pt and nitride of at least one kind of metal selected from among Ta, Nb, Ti, W and Mo, and is laminated on the first semiconductor layer;

    a first connecting electrode that is laminated on the first joining layer, and is used for electric connection with an outside;

    a second joining layer that is composed of the same material as the first joining layer, and is laminated on the transparent electrode; and

    a second connecting electrode that is composed of the same material as the first connecting electrode, is laminated on the second joining layer, and is used for electric connection with an outside,whereinthe first connecting electrode includes a first diffusion barrier layer that is composed of Pt, and is laminated on the first joining layer, and a first connecting electrode layer that is composed of Au or an alloy including Au, is laminated on the first diffusion barrier layer, and is used for the electric connection with the outside, andthe second connecting electrode includes a second diffusion barrier layer that is composed of the same Pt as the first diffusion barrier layer, and is laminated on the second joining layer, and a second connecting electrode layer that is composed of the same Au or alloy including Au as the first connecting electrode layer, is laminated on the second diffusion barrier layer, and is used for the electric connection with the outside.

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