Laser diodes with scribe structures
First Claim
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1. An optical device comprising:
- a substrate having a front side and a back side, the substrate including gallium material;
an active region including at least one quantum well overlying the front side of the substrate;
a cavity overlying the active region, the cavity having a length and a width; and
a plurality of trenches provided on the back side of the substrate, at least a portion of each of the plurality of trenches extending under the cavity, the portion under the cavity extending non-parallel to the length of the cavity.
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Abstract
A method and device for emitting electromagnetic radiation using semipolar or nonpolar gallium containing substrates is described where the backside of the substrate includes multiple scribes that reduce stray light leaking.
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Citations
19 Claims
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1. An optical device comprising:
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a substrate having a front side and a back side, the substrate including gallium material; an active region including at least one quantum well overlying the front side of the substrate; a cavity overlying the active region, the cavity having a length and a width; and a plurality of trenches provided on the back side of the substrate, at least a portion of each of the plurality of trenches extending under the cavity, the portion under the cavity extending non-parallel to the length of the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An optical device comprising:
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a gallium and nitrogen containing substrate, the substrate including a front side and a back side, the back side including a plurality of trench structures each having at least a portion that extends substantially straight, the plurality of trench structures being characterized by a first direction, the plurality of trench structures being configured to reduce a leakage light from the front surface of the substrate; a laser stripe region formed overlying a portion of the substrate, the laser stripe region being characterized by a cavity orientation non-parallel to the first direction, the laser stripe region having a first end and a second end; a first facet provided on the first end of the laser stripe region; and a second facet provided on the second end of the laser stripe region.
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Specification