Microfabricated neural probes and methods of making same

• US 8,750,957 B2
• Filed: 06/01/2005
• Issued: 06/10/2014
• Est. Priority Date: 06/01/2004
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Tang, Hongxing, Roukes, Michael L., Renaud, Richard
• Primary Examiner(s): Dvorak, Linda
• Assistant Examiner(s): ANTISKAY, BRIAN MICHAEL
• Application Number:
  US11/628,003
• Publication Number:
  US 20080255439A1
• Time in Patent Office: 3,296 Days
• Field of Search: 600372-374, 600/378, 600544-547, 607/116
• US Class Current: 600/378
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61B 5/685 Microneedles
• CPC Class Codes: A61N 1/05 for implantation or insertion into the body, e.g. heart electrode A61N1/06 takes precedence
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Abstract

An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

Claims

1. A neural probe comprising:

a polymer handle portion made of a first polymer material;

metal contact pads exposed in the polymer handle portion and presenting an external flat surface;

a flexible polymer cantilever made from a second polymer material extending from the polymer handle portion;

a plurality of metal recording pads exposed in the flexible polymer cantilever and presenting a flat external surface, wherein the recording pads are electrically connected to the contact pads via metal conductive interconnections buried in the polymer of the flexible polymer cantilever;

a polymer layer made of a third polymer material and presenting a flat external surface, wherein the polymer layer is between the recording pads and the contact pads and the metal conductive interconnections are behind the polymer layer away from the flat external surface of the polymer layer;

wherein the contact pad flat surfaces, the recording pad flat surfaces, and the polymer layer flat external surface are flush with each other; and

a plurality of elongated metal recording electrodes extending normally from the exposed flat surfaces of the recording pads and separated by a distance, wherein the recording electrodes have a width of 1 micron or less and a height of six microns or less, and wherein a distance between adjacent recording electrodes is 10 microns or less.

2. The probe of claim 1, wherein the distance between adjacent recording electrodes is 1 to 4 microns.

3. The probe of claim 1, wherein the height of the electrodes is in a range of 2 to 5 microns.

4. The probe of claim 1, wherein the width of the electrodes is about 0.1 to about 0.8 microns.

5. The probe of claim 1, wherein the width of the electrodes is about 0.3 to about 0.5 microns.

6. The probe of claim 1, wherein the probe has a probe electrode density of 1/10 nm squared to about 1/50 nm squared.

7. The probe of claim 1, wherein the electrodes have a round cross section.

8. The probe of claim 1, wherein the electrodes comprise sharpened tips.

9. The probe of claim 1, wherein an insulation layer is formed over the electrodes and then the insulation layer is etched back at the electrode tip.

10. The probe of claim 1, wherein the polymer of the flexible polymer cantilever comprises SU-8.

11. The probe of claim 1, wherein the polymer of the flexible polymer cantilever comprises parylene.

12. The probe of claim 1, wherein the polymer handle portion is 75 microns to 500 microns thick.

13. The probe of claim 1, wherein the flexible polymer cantilever is five to 100 microns thick.

14. The probe of claim 1, wherein:

a circuit board is electrically connected to the probe;

a voltage or current measurement device which is adapted to measure a change in voltage or current due to neuron action potentials detected by the probe is electrically connected to the circuit board; and

a voltage or current source adapted to provide a voltage or current to the electrodes to stimulate neuron activity in a living organism is electrically connected to the circuit board.

15. A method of stimulating neuron firing activity comprising providing the probe of claim 14 into a living organism and providing a voltage or current to the electrodes to stimulate the neuron firing activity.

16. A method of detecting neuron action potentials comprising providing the probe of claim 14 extracellularly into a living organism and detecting the neuron action potentials.