Methods and apparatus for pressure compensation in a mass flow controller
First Claim
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1. A method performed by a mass flow controller for correcting a flow sensor output signal indicative of a sensed fluid flow through the flow path, the method comprising acts of:
- measuring, using at least one thermal sensor, a mass flow rate of fluid flowing in a flow path of the flow controller;
generating the flow sensor output signal based on the measurement of the mass flow rate using the at least one thermal sensor;
measuring, using a pressure sensor located upstream of the at least one thermal sensor, at least one pressure of the flow path;
constructing a false flow signal indicating a pressure transient in the flow path based on the at least one pressure;
subtracting the false flow signal from the flow sensor output signal to generate a corrected flow signal indicative of the of the true flow flowing through the flow path of the flow controller; and
providing the corrected flow signal to a controller of the flow controller.
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Abstract
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
98 Citations
15 Claims
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1. A method performed by a mass flow controller for correcting a flow sensor output signal indicative of a sensed fluid flow through the flow path, the method comprising acts of:
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measuring, using at least one thermal sensor, a mass flow rate of fluid flowing in a flow path of the flow controller; generating the flow sensor output signal based on the measurement of the mass flow rate using the at least one thermal sensor; measuring, using a pressure sensor located upstream of the at least one thermal sensor, at least one pressure of the flow path; constructing a false flow signal indicating a pressure transient in the flow path based on the at least one pressure; subtracting the false flow signal from the flow sensor output signal to generate a corrected flow signal indicative of the of the true flow flowing through the flow path of the flow controller; and providing the corrected flow signal to a controller of the flow controller. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A flow meter comprising:
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a flow sensor adapted to measure fluid flow in a flow path using at least one thermal sensor, the flow sensor providing a sensor output signal in response to sensed fluid flow in the flow path; at least one pressure transducer located upstream of the a flow sensor to measure at least one pressure in the flow path, the at least one pressure transducer providing at least one pressure signal related to the respective at least one measured pressure; a compensation filter to receive the at least one pressure signal, the compensation filter adapted to construct a false flow signal approximating a response of the flow sensor to pressure transients in the flow path, the false flow signal indicating an erroneous flow pressure not indicative of a true flow flowing through the flow path of the flow controller; and a subtractor to receive the sensor output signal and the false flow signal and to provide a corrected flow signal by removing the false flow signal from the sensor output signal. - View Dependent Claims (8, 9, 10)
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11. A method performed by a mass flow controller coupled to a flow path, the mass flow controller having a control loop including a flow meter, a controller, a valve actuator and a valve, a method comprising acts of:
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measuring, using at least one thermal sensor, a mass flow rate of fluid flowing in the flow path of the mass flow controller; generating a flow sensor output signal based on the measurement of the mass flow rate using the at least one thermal sensor; measuring at least one pressure in a fluid path environment upstream of the at least one thermal sensor; providing at least one pressure signal indicating at least one pressure measurement; determining at least one compensation signal based on at least one pressure measurement, wherein the act of determining at least one compensation signal includes constructing a false flow signal to recreate false flow information resulting from a response of the flow meter to pressure transients in the flow path environment, wherein the false flow information causes the flow sensor output signal to be not indicative of a true flow flowing through the fluid path of the mass flow controller; generating a corrected sensor output signal indicative of the of the true flow flowing through the flow path of the flow controller by subtracting the at least one compensation signal from the sensor output signal; and providing the corrected sensor output signal to the control loop of the mass flow controller. - View Dependent Claims (12, 13)
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14. A system for controlling a fluid flow along a flow path, the system comprising:
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a mass flow controller including a flow meter adapted to sense fluid flow in a fluid flow path using at least one thermal sensor and provide a flow signal indicative of a mass flow rate in the flow path; a valve actuator adapted to receive a drive signal from a controller; a valve for controlling the flow rate in the fluid path, the valve coupled to the fluid flow path and adapted to be controlled by the valve actuator; at least one pressure transducer located upstream of the flow meter to measure at least one pressure in a mass flow controller environment, and to provide at least one pressure signal indicative of measurement of the at least one pressure;
the controller coupled to the flow meter and adapted to provide the drive signal based at least in part on the flow signal; and
at least one compensation means to receive at least one pressure signal, and to provide at least one displacement compensation signal, wherein providing at least one compensation signal includes constructing a false flow signal to recreate false flow information resulting from a response of the flow meter to pressure transients in the flow path environment, wherein the false flow information causes an erroneous flow signal that is not indicative of a true flow flowing through the fluid flow path of the mass flow controller, the false flow signal subtracted from the flow signal of the flow meter to generate a corrected flow signal indicative of the of the true flow flowing through the fluid flow path of the flow controller.
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15. A mass flow controller comprising:
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a flow sensor adapted to measure fluid flow in a flow path using at least one thermal sensor, the flow sensor providing a sensor output signal in response to sensed fluid flow in the flow path; at least one pressure transducer located upstream of the flow sensor to measure at least one pressure in the flow path, the at least one pressure transducer providing at least one pressure signal related to the respective at least one measured pressure; at least one processor configured to receive the at least one pressure signal and construct a false flow signal approximating a response of the flow sensor to pressure transients in the flow path, the false flow signal indicating an erroneous flow pressure not indicative of a true flow flowing through the flow path of the flow controller and remove the false flow signal from the sensor output signal.
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Specification