Removable compartments for workpiece stocker

• US 8,753,063 B2
• Filed: 06/02/2011
• Issued: 06/17/2014
• Est. Priority Date: 11/15/2006
• Status: Active Grant

• Current Assignee: Dynamic Micro Systems
• Original Assignee: Dynamic Micro Systems Semiconductor Equipment (Azenta, Inc.)
• Inventors: Rebstock, Lutz
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): BERRY JR, WILLIE WENDELL
• Application Number:
  US13/151,287
• Publication Number:
  US 20110236176A1
• Time in Patent Office: 1,111 Days
• Field of Search: None
• US Class Current: 414/416.03
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Claims

1. A method for improving the operation of a workpiece stocker, wherein the workpiece stocker comprises stored workpieces, the method comprising:

installing an enclosure at an emergency access port of the workpiece stocker in the event of a failure of the stocker, wherein the enclosure is linked to the workpiece stocker to enable accessing the workpieces;

opening the emergency access port;

removing the workpieces from the workpiece stocker to the enclosure; and

closing the emergency access port, wherein the workpiece are removed from the workpiece stocker without exposing other workpieces in the workpiece stocker to outside ambient.

2. A method as in claim 1 wherein the enclosure comprises a portable clean room for linking with the workpiece stocker.

3. A method as in claim 1 wherein the enclosure comprises a load lock for the emergency access port.

4. A method as in claim 1 wherein an operator stays outside the enclosure while handling the workpieces.

5. A method as in claim 1 wherein the enclosure comprises a portable glove box for accessing the workpieces.

6. A method as in claim 1 wherein an operator enters the workpiece stocker through the emergency access port to handle the workpieces.

7. A method as in claim 1 wherein the workpieces are stored in carrier boxes in the workpiece stocker.

8. A method as in claim 1 wherein the workpieces are stored bare in the workpiece stocker.

9. A method as in claim 8 further comprising

storing the workpieces in a container box before removing from the workpiece stocker.

10. A method for improving the operation of a workpiece stocker, wherein the workpiece stocker comprises stored workpieces in individual compartments, wherein the individual compartments are removable from the workpiece stocker, the method comprising:

establishing a clean environment at an emergency access port of the workpiece stocker;

accessing the emergency access port of the workpiece stocker in the event of a failure of the stocker to access the individual compartments, wherein the clean environment enables accessing the emergency access port without contaminating the workpieces in the workpiece stocker; and

removing the individual compartments from the workpiece stocker.

11. A method as in claim 10 wherein establishing a clean environment at an emergency access port comprising

installing an enclosure at the emergency access port, wherein the enclosure comprises a portable clean room or a portable glove box.

12. A method as in claim 10 wherein establishing a clean environment at an emergency access port comprising

installing an enclosure for the emergency access port, wherein the enclosure comprises a load lock.

13. A method as in claim 10 wherein an operator stays outside the workpiece stocker while handling the workpieces.

14. A method as in claim 10 wherein an operator enters the workpiece stocker through the emergency access port to handle the workpieces.

15. A method as in claim 10 wherein the workpieces are stored in carrier boxes in the workpiece stocker.

16. A method as in claim 10 wherein the workpieces are stored bare in the workpiece stocker, the method further comprising

storing the workpieces in a container box before removing from the workpiece stocker.