Pumping system and method of operation

• US 8,753,095 B2
• Filed: 04/13/2006
• Issued: 06/17/2014
• Est. Priority Date: 04/29/2005
• Status: Active Grant

• Current Assignee: Edwards Limited (Atlas Copco AB)
• Original Assignee: Edwards Limited (Atlas Copco AB)
• Inventors: Bruce, Simon Harold
• Primary Examiner(s): LETTMAN, BRYAN MATTHEW
• Application Number:
  US11/919,535
• Publication Number:
  US 20090317261A1
• Time in Patent Office: 2,987 Days
• Field of Search: 417/32, 417/44.1, 417/423.4
• US Class Current: 417/32
• CPC Class Codes: F04C 18/12 of other than internal-axis type
• CPC Class Codes: F04C 2270/07 Electric current
• CPC Class Codes: F04C 2270/09 Electric current frequency
• CPC Class Codes: F04C 2270/125 Controlled or regulated
• CPC Class Codes: F04C 2270/175 Controlled or regulated
• CPC Class Codes: F04C 2270/19 Temperature
• CPC Class Codes: F04C 28/08 characterised by varying the rotational speed
• CPC Class Codes: F04C 28/28 Safety arrangements; Monitoring
• CPC Class Codes: F04D 15/0077 Safety measures F04D15/02 takes precedence
• CPC Class Codes: F04D 15/0263 the condition being temperature, ingress of humidity or leakage
• CPC Class Codes: F04D 19/042 Turbomolecular vacuum pumps

Abstract

A pumping system includes a pumping mechanism, a motor for driving the pumping mechanism, a device for supplying power of a variable frequency to the motor, a control device for setting a maximum value for a current in the motor, and a device for supplying to the control device data indicative of the temperature of gas exhaust from the pumping mechanism and a temperature of the stator of the pumping mechanism, wherein the control device is configured to use the received data to adjust the maximum value during operation of the pumping system.

Claims

1. A pumping system comprising:

a pumping mechanism;

a motor for driving the pumping mechanism;

a variable frequency drive that supplies electrical power to the motor;

a controller for controlling the motor via the variable frequency drive, wherein the controller sets a maximum value for a current in the motor and a maximum value for rotational frequency in the motor;

a first temperature sensor for supplying a first signal to the controller, the first signal indicative of a temperature of gas exhausted from an outlet of the pumping mechanism; and

a second temperature sensor located on a stator adjacent to an inlet throat of the stator of the pumping mechanism for supplying a second signal to the controller, the second signal indicative of the temperature of the stator adjacent to the inlet throat of the stator of the pumping mechanism,

wherein the controller adjusts at least one of the maximum value for current in the motor and the maximum value for rotational frequency in the motor based on a difference between the temperature of the gas exhausted at the outlet of the pumping mechanism, as indicated by the first signal, and the temperature of the stator adjacent to the inlet throat of the stator of the pumping mechanism, as indicated by the second signal, during operation of the pumping system.

2. The system according to claim 1, wherein the controller adjusts the amplitude and frequency of the power supplied to the motor by the drive means during operation of the pumping system.

3. The system according to claim 1, wherein the first temperature sensor is located proximate an exhaust of the pumping mechanism.

4. The system according to claim 1, wherein the controller adjusts at least one of the maximum values in dependence at least on the variation with time of the signal received from the first temperature sensor.

5. The system according to claim 1, wherein the controller adjusts at least one of the maximum values in dependence on at least the variation with time of the signal received from the second temperature sensor.

6. The system according to claim 1, further comprising a plurality of the second temperature sensors each located at different positions on an external surface of the stator of the pumping mechanism.

7. The system according to claim 1, further comprising a vibration sensor, wherein the vibration sensor supplies a signal indicative of vibration of the pumping mechanism, and wherein the controller uses the signal received from the vibration sensor to adjust at least one the maximum values.

8. The system according to claim 1, wherein the controller adjusts at least one of the maximum values according to a predetermined relationship between the sensed temperatures.

9. The system according to claim 1, further comprising a pressure sensor for supplying a signal indicative of the pressure of gas entering the pumping mechanism, and wherein the controller uses the signal received from the pressure sensor to adjust at least one of the maximum values.

10. The system according to claim 1, wherein the controller comprises a first controller for setting the maximum values, and a second controller for receiving the first and second signals and instructing the first controller to adjust at least one of the maximum values in response thereto.

11. The system according to claim 1, wherein the second temperature sensor is located on an external surface of the stator adjacent to the inlet throat of the stator of the pumping mechanism.

12. A method of controlling a pumping system comprising:

setting maximum values for current and frequency in a motor of the pumping system, wherein the pumping system includes a pumping mechanism, the motor, which is for driving the pumping mechanism, and a variable frequency drive unit for supplying power to the motor;

receiving data indicative of a temperature of gas exhausted from an outlet of the pumping mechanism and a temperature of a stator of the pumping mechanism adjacent to an inlet throat of the stator of the pumping mechanism; and

adjusting at least one of the maximum value for current in the motor and the maximum value for rotational frequency in the motor based on a difference between the temperature of the gas exhausted at the outlet of the pumping mechanism and the temperature of the stator adjacent to the inlet throat of the stator of the pumping mechanism, as indicated by the data, during operation of the pumping system.

13. The method according to claim 12, further comprising adjusting the amplitude and frequency of a power supplied to the motor during operation of the pumping system.

14. The method according to claim 13, wherein adjusting the at least one of the maximum values for current in the motor and for rotational frequency in the motor comprises adjusting the at least one of the maximum values in dependence on received signals indicative of the temperature of gas exhausted from the pumping mechanism and the temperature of the stator adjacent to the inlet throat of the stator of the pumping mechanism.

15. The method according to claim 14, wherein adjusting the at least one of the maximum values for the current in the motor and for rotational frequency in the motor comprises adjusting the at least one of the maximum values in dependence on the variation with time of the signal indicative of the temperature of gas exhausted from the pumping mechanism.

16. The method according to claim 14, wherein adjusting the at least one of the maximum values for the current in the motor and for rotational frequency in the motor comprises adjusting the at least one of the maximum values in dependence on at least variation with time of the signal indicative of the temperature of the stator of the pumping mechanism adjacent to the inlet throat of the stator of the pumping mechanism.

17. The method according to claim 12, wherein adjusting the at least one of the maximum values for the current in the motor and for rotational frequency in the motor comprises adjusting the at least one of the maximum values using a signal indicative of vibration of the pumping mechanism during use of the pumping system.

18. The method according to claim 12, wherein adjusting the at least one of the maximum values for the current in the motor and for rotational frequency in the motor comprises adjusting the at least one of the maximum values using a signal indicative of the pressure of gas entering the pumping mechanism.

19. The method according to claim 12, wherein the temperature of the stator is obtained from a sensor located on an external surface of the stator at an inlet throat of the stator of the pumping mechanism.