Plasma deposition on a partially formed battery through a mesh screen
First Claim
1. A plasma deposition method for depositing a battery component material on a partially fabricated battery cell in a plasma deposition zone, the method comprising:
- (a) providing in the plasma deposition zone, a battery support comprising at least one partially fabricated battery cell, the partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface;
(b) maintaining a mesh screen spaced apart, and at a preset distance from, the exposed surface of the battery component layer of the partially fabricated battery cell, the mesh screen having a plurality of mesh openings;
(c) maintaining a pressure of a process gas in the plasma deposition zone; and
(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.
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Accused Products
Abstract
A plasma deposition method deposits a battery component material on a partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface. A mesh screen is maintained at a preset distance from the exposed surface, the mesh screen having a plurality of mesh openings. A process gas is energized to form a plasma by applying an electrical power to deposit the battery component material onto the exposed surface of the battery component layer. The mesh screen reduces migration of the charge-carrying metal species in the battery component layer to the exposed surface of the partially fabricated battery cell.
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Citations
17 Claims
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1. A plasma deposition method for depositing a battery component material on a partially fabricated battery cell in a plasma deposition zone, the method comprising:
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(a) providing in the plasma deposition zone, a battery support comprising at least one partially fabricated battery cell, the partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface; (b) maintaining a mesh screen spaced apart, and at a preset distance from, the exposed surface of the battery component layer of the partially fabricated battery cell, the mesh screen having a plurality of mesh openings; (c) maintaining a pressure of a process gas in the plasma deposition zone; and (d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer, whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A plasma deposition method comprising:
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(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species; (b) maintaining in the plasma deposition zone, a mesh screen at a preset distance away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings; (c) maintaining a pressure of a process gas in the plasma deposition zone; and (d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer, whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A plasma deposition method comprising:
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(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species; (b) maintaining in the plasma deposition zone, a mesh screen at a distance of at least 1 cm away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings; (c) maintaining a pressure of a process gas in the plasma deposition zone; and (d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer, whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer. - View Dependent Claims (15, 16, 17)
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Specification