Light-emitting device and manufacturing method thereof
First Claim
1. A method of fabricating a light-emitting device comprising:
- providing a substrate;
forming a plurality of light-emitting stack layers on the substrate;
forming discontinuous holes directly on the substrate;
etching the discontinuous holes; and
cleaving the substrate along the discontinuous holes,wherein one of the plurality of light-emitting stack layers is substantially surrounded by the discontinuous holes from a top view.
1 Assignment
0 Petitions
Accused Products
Abstract
A light emitting device and a method of fabricating thereof are provided. The method of fabricating the light emitting device comprises: providing a substrate having a first major surface and a second major surface; forming a plurality of light-emitting stacks on the first major surface; forming an etching protection layer on each of the light emitting stacks; forming a plurality of holes by a discontinuous laser beam on the substrate; etching the plurality of holes; and slicing off the substrate along the plurality of holes to form a light emitting device. The light emitting device has a substrate wherein the sidewall of the substrate comprising a first area with a substantially flat surface and a second area with substantially textured surface.
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Citations
19 Claims
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1. A method of fabricating a light-emitting device comprising:
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providing a substrate; forming a plurality of light-emitting stack layers on the substrate; forming discontinuous holes directly on the substrate; etching the discontinuous holes; and cleaving the substrate along the discontinuous holes, wherein one of the plurality of light-emitting stack layers is substantially surrounded by the discontinuous holes from a top view. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification