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Systems and methods of laser texturing and crystallization of material surfaces

  • US 8,753,990 B2
  • Filed: 12/21/2006
  • Issued: 06/17/2014
  • Est. Priority Date: 12/21/2005
  • Status: Active Grant
First Claim
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1. A method for micro texturing a surface of a material, comprising:

  • providing a gaseous or vacuum environment in an area around the surface of the material;

    irradiating a portion of the surface with short laser pulses;

    moving at least one of the surface or a laser beam relative to each other to allow the short laser pulses to irradiate the surface;

    wherein the method produces a periodic array of micro pillars, semi-periodic array of micro pillars, or a non-periodic array of micro pillars on the surface, resulting in changes in properties of the surface wherein nanospikes are produced atop the micro pillars;

    wherein said material comprises a semiconductor;

    wherein the laser pulses have a duration of between about one femtosecond and about 999 picoseconds; and

    wherein the laser pulses have a wavelength of between about 400 and about 1,600 nm.

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